Stations: 05, System, Port Combinations: Ejector System, Common PV: ø5/16", Inch Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: Individual Wiring Specification, Option: -, Manifold Assembly, Delivery Condition: -

Stations: 05, System, Port Combinations: Ejector System, Common PV: ø5/16", Inch Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: Individual Wiring Specification, Option: w/DIN Rail Mounting Bracket, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Stations: 05, System, Port Combinations: Ejector System, Common PV: ø8, Metric Size, Exhaust: 1 [Ejector System, Silencer Common Exhaust (End Plate on Both Sides)], Wiring: D-sub Connector, 25 Pins, Option: w/DIN Rail Mounting Bracket, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Stations: 05, System, Port Combinations: Ejector System, Common PV: ø5/16", Inch Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: D-sub Connector, 25 Pins, Option: w/DIN Rail Mounting Bracket, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Stations: 05, System, Port Combinations: Vacuum Pump System, Common PV: ø8, Common PS: ø6, Metric Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: D-sub Connector, 25 Pins, Option: w/DIN Rail Mounting Bracket, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Stations: 05, System, Port Combinations: Ejector System, Common PV: ø8, Metric Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: D-sub Connector, 25 Pins, Option: -, Manifold Assembly, Delivery Condition: -

Stations: 05 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: C [Vacuum Pump System PE Port Female

.: 03 (ø5/32"), Actuator Type: 05 (Straight Plunger), Suffix: None, Indicator: Z (w/Miniature Indicator)

Body Class: 2 (ø4 Orifice), Fitting Type: V, Tube Size: 05 (3/16"), Output Tube Size: None, Breathing Port Thread: Threaded, NPT1/8, Handle: 1 (90 Degree Turn Type)

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Model: LVH20 (Body Class 2, N.C.), Lever Operation: Non-locking, Self-reset, Tube Size: 05 (3/16")

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

AMX-OM-L020_e

O . auto drai n: M i n. 0. 1 M Pa O PERATI O N M AN U AL M i n. 0. 05 M Pa Keep f ol l ow i ng t o operat e M ai n l i ne f i l t er properl y. M ax. 1. 0 M Pa Fol l ow i ng envi ronm ent s l ead t o cause breakage. Envi ronm ent Low er t han 5 D o not use under f ol l ow i ng envi ronm ent . D o not use under f ol l ow i ng condi t i ons.

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Directional Control Driver for Electric Cylinder

Adjusted thrust OFF: 100% thrust (Max. thrust) ON: A-PHASE (Retracted side) OFF: B-PHASE (Extended side) Output ON command input Red 2 ON Adjusted thrust command input Yellow SET 3 Traveling direction command input A-PHASE 4 Orange Cable for motor output terminal LC3F2 1 C3 02 1 CN3 Motor Output Terminal Table 2 1 Terminal Function Pin number Optional cable color Cable type Cable length 02 05

CA2

model Bore size (mm) 40 50 63 80 100 D-G39/K39 D-A3l/A44 BDS-04M BDS-05M BMB1-063 BMB1-080 BMB1-100 Auto switch model Bore size (mm) 40 50 63 80 100 D-G39/K39 D-A3l/A44 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M MB MB1 D-G5l/K59 D-G5lW/K59W D-G59F D-G5NT D-G5NB D-B5l/B64 D-B59W D-G5l/K59 D-G5lW/K59W D-G59F D-G5NT D-G5NB D-B5l/B64 D-B59W CA2 CA2 BH2-040 BA5-050 BAF-06 BAF-08 BAF-10 BA-04 BA-05