F/ISE Reference page Item 3 Output type Example of internal circuit and wiring 4 Auto shift function, Chattering prevention function 5 Measures to be taken when error occurs 6 11 For General Fluids High Precision Digital Pressure Switch Series ZSE60F/ISE60 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 Bracket A ZS-24-A View A Bracket D A 30 20 20 45 55 4.5 4.2 11.5 40
6 6 9.5 12.5 15 178 195 221 18 18 18 12 15 15 44 50 56 138 150 171 4 5 5 1/4 1/4 1/4 to 1000 to 1000 to 1000 7 Series MGZ Non-rotating Double Power Cylinder Applicable auto switches Auto switch models Auto switch type Electrical entry D-Z7, Z80 Grommet Reed switch D-Y59, Y69, Y7P Grommet D-Y7NW, Y7PW, Y7BW Grommet (2 color indicator, with diagnostic output) Solid state switch Grommet (2
Micromesh element 1 20 0.7 2 3 40 SUS316 L EM5, 6 0 to 250 74 30 105 (Absolute) 2 4 HEPO II element Precision cleaning R 0 to 80 0.5 30 PP EJ 6 13 1 Series FQ1 Quick Change Filter Specifications Model FQ1011 FQ1012 FQ1010 1 (L125) 1 (L250) 2 (L250 x 2) No. of built-in elements (L: Element length in mm) Operating pressure Maximum 1MPa Operating temperature Maximum 80C (Not exceeding boiling
D-RNK 21.1 6 30 2-3.5 46 5 Connector for sensor e-con 3
] , 1000 100 [F11] [MPa]/[kPa]/[kgf/cm 2]/[bar]/[psi]/[inHg] 2]/[bar]/[psi]/[inHg]:) ([kgf/cm 21 -[F 0] 30 - [F80] 30 ,OFF <> [F80] 1 2 2 1 [F80] 1,OFF 1 2,30 () 2 OFF ON 31 - [F81] , <> [F81] [F81] , 000 40 32 - [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 34 -"" 33 - 1 2 OUT1 3 OUT1 4 OUT1 5 OUT1 6 OUT2 7 ON 8 OFF 9 10 11 12 13 14 15 2 34 - [F96
12 VDC A1 85 to 240 VAC Clean air outlet 06 6 output points 10 10 output points IN Bag filter IN 1 A is not a CE marked product.
Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.
15.2 18.5 20.9 18.5 21.7 3.2 5 6 25.4 36 37 39.5 40.7 42.5 53.2 57.2 59 65 70.8 76 76.9 81.3 3.4 4.4 5.1 6.1 5.2 6.3 6.7 8 7.4 8.2 9.8 10.9 10.3 11.3 7.9 11.1 11.8 12.8 12.3 13.4 16.3 17.6 19.3 20.1 21.7 22.8 22.7 23.7 20.9 23.8 24.5 25.5 28.9 30 33.2 34.5 38.6 39.4 41 42.1 51.6 52.6 11 9.8 5 6.7 9.8 10.1 12.3 11.5 12.3 15.7 16.1 8.8 2 3.2 4 6 4 6 6 8 6 8 10 12 10 12 12.7 3.3 5.5 9.1 11
CRJ1 CRJ05 Model 30 25 Fr Allowable load (N) 25 20 FS(a) 25 20 FS(b) 6 5 Pinion gear Output shaft size (mm) Stopping the pinion gear by having it strike against the flat surface of the piston eliminates backlash.
A A B Section BB PCD Thread Coupling Motor 28.3 10.5 30 8 26 32 6 0.5 Section AA (Housing interior) Coupling mounting dimensions 11 Series LG1H Nonstandard Motors/Matsushita Electric Industrial Co., LTD Drivers Dimensions 5.2 150 160 168 5.2 20 A 105 3 Summary of input /output signals (connector CN-1/F) Dimension table Pin No. 1 2 3 4 5 6 7 8 9 10 11 Pin No. 12 13 14 19 20 21 22 23 24 25
bore, depth 5.5 From back 2 x 2-M6 x 1.0, thread depth 12 4 2-M8 x 1.0 Adjustment bolt 36 60 6 15 66 15 66 32 69 68 52 1 0 10 6 (absorber stroke) 36 2-RB0806 shock absorber M8 x 1.0 0.5 (difference in level) 93 Note) Rc(PT) 1/8 Cylinder port 174 + Stroke 6 6 2-7 through 52 82 15 28.5 M5 x 0.8 Hexagon socket head plug 25 36 8 48.5 48 59 60 52 44 40 SMC 11 (width across flats) 11.5 Body (Support
[660] (164) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate
There may be large variations depending on the surrounding environment (variations as much as 30%).
Item CH2 measured value: 16-bit signed integer Bit offset 47 46 45 44 43 42 41 40 39 38 37 36 35 34 33 32 Item CH32 measured value: 16-bit signed integer Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item CH4 measured value: 16-bit signed integer Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Error diagnosis CH4 diagnosis CH3 diagnosis CH2 diagnosis CH1 diagnosis Reservation
2.5 0.5 1 1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5 10 7.5 0 0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5(4) 4.5 5 9 10 11 15 2(4.5) Bore size (mm) 1.5(1) 3.5(1) 3(0.5) 5.5(3) Long stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5(2.5) 8 8.5 12 13 11.5 15 10 9.5 15 17 19.5 25.5
Proper tightening torque Nm 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 Nominal size of threads 1/8 1/4 3/8 1/2 3/4 Load operating voltage Power supply voltage Switch's internal voltage drop > [When used for air] 6. Be certain to observe specifications for the measured flow rate and maximum operating pressure. Operation at a flow rate exceeding the prescribed range can cause damage.
Add 10 g for conduit type, 30 g for DIN terminal type, 60 g for conduit terminal type respectively.
Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.
5R.D. <> [F 6] [FSC] 1 [F 6] -30NO.ZK2-OM00801-B [F11] <> [F11] 1000 100 [F11] [MPa]/[kPa]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm2]/[bar]/[psi]/[inHg] 22[F 0] -31NO.ZK2-OM00801-B [F80] 30 OFF <> [F80] 2 1 [F80] 1 OFF 1 2 30 () 2 ON OFF -32NO.ZK2-OM00801-B [F81] <> [F81] [F81] 000 41 -33NO.ZK2-OM00801-B [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 35 -34NO.ZK2