Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

VK3000

Refer to external dimensions in pages 3-2-4 to 3-2-10, and then mount it. VFN 48 V DC None Z Precautions Plug a connector in or out vertically, never at an angle. How to Calculate the Flow Rate S 6 V For obtaining the flow rate, refer to page 3-1-10.

Series 10-, 21- AF-A Air Filter

Option Applicable model 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A Bracket assembly Note 2) AF52P-050AS AF22P-050AS AF32P-050AS AF42P-050AS AF42P-070AS Note 2) Assembly includes a bracket and 2 mounting screws. 1069-1 A Air Filter 1021-AF-A Dimensions AF20-A AF30-A to 40-06-A 10211021T N S J M U D J M U D S N T Air Preparation Equipment Pressure

Unit Manifold Valve

High flow type (0 to 0.3 MPa) PV060 4A 40 For 4 stations 4 mounting screws (M2 x 27 L) and one gasket are included. PV060 3A 40 For 8 stations w Plate Assembly Part No. Stations Fitting Barb fitting One-touch fitting PV060-10-8A PV060-10-7A PV060-10-10A PV060-10-9A 4 stations Connector cable length 8 stations Nil 6 10 300 mm Barb fitting is included.

VCL

Please consult with SMC regarding other voltages. 3/4 (20A) Orifice size Electrical entry Class 3 Class 2 Orifice size (mm) 2 3 4 5 7 10 Class 4 Symbol 2 3 4 5 7 10 G Grommet C Conduit Refer to the below table for orifice and port size combinations.

EXxx-OMY0006CN

-10 EX245-FPS1 68 No.EX##-OMY0006CN Fig. 10-11 EX245-FPS2 Fig. 10-12 EX245-FPS3 69 No.EX##-OMY0006CN 11.

Refrigerated Air Dryer

Symbol Nil 10 mm AM Coating color White 1 Weight lbs (kg) 40 (18) 55 (25) 57 (26) 64 (29) 73 (33) 110 (50) AMD Compliant standards UL, CSA Note 1) ANR is under the conditions of 68F (20C) at atmospheric pressure and relative humidity of 65%. Note 2) Air flow capacity for each outlet air pressure dew point is indicated.

CXWM/CXWL

10 15 15 20 MS4-10 MS5-10 MS6-15 MS6-15 MS8-20 Left Right Left Right Operating direction of the housing Operating direction of the housing Manufactured by Misumi Trading Ltd.

Air cylinder

Table 1 Tightening torque (Unit: Nm) Foot Flange Clevis Trunnion B CG1*20 1.5 1.5 to 2.2 CG1*25 2.9 2.5 to 3.5 CG1*32 2.9 6.0 to 8.6 CG1*40 4.9 10.8 to 14.6 CG1*50 11.8 19 to 25 CG1*63 24.5 30 to 40 CG1*80 24.5 --CG1*100 42.2 --8)Do not hit or grasp the sliding parts of the cylinder tube and piston rod with other objects.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

60 80 100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 8-9-10 10 Air Slide Table Long Stroke Type Series MXY Construction @3 y w q r u #0 MX MTS !

Pressure Relief 3 Port Valve With Locking Holes

44 63 43 5.5 26 10 4.2 VHS5510 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 50 6.5 31 12 4.2 Model Optional Specifications With bracket Built-in silencer N Q R S T U V W X Y AA BB VHS2510 5.4 8.4 27 40 75.4 31.3 25.3 53.3 30 2.3 3 12 VHS3510 6.5 10 36.5 53 90.9 40 33 67 41 2.3 3 14 VHS4510 8.5 19 43.5 70 119.4 53 44 79 50 2.8 3 19 VHS4510-06 8.5 19 43.5 70 123.4 55 46 79 50 2.8 4 22 VHS5510

VXA21/22

Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

50 63 80 100 up to 500 30 27 60 22 44 16 13 32 10 15 51 8 42.3 56 M8 x 1.25 6 14 11 M14 x 1.5 19 27 17 84 2.5 25 146 1/4 up to 600 35 32 70 27 52 20 13 40 12 17 58 11 47.3 61 M8 x 1.25 7 18 11 M18 x 1.5 19 30 17 90 2.5 25 159 3/8 up to 600 35 32 85 27 64 20 15.5 40 10 17 58 11 54.8 68.5 M10 x 1.25 7 18 14 M18 x 1.5 19 31 17 98 4 25 170 3/8 up to 750 40 37 32 78 25 52 14 21 71 13 65.8 M12

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

ZFB100 ZFB101 ZFB200 ZFB201 ZFB300 ZFB301 ZFB401 16 x 14 x L60 I-34S-A 10 x 6 x L33 10 pcs. 10 pcs. I-35S-A 10 pcs. 10 pcs. 12 x 8 x L42 O-ring, Seal Wiping with alcohol, etc., may cause damage. I-36S-A 10 pcs. 10 pcs. 14 x 10 x L45 I-39S-A 10 pcs. 10 pcs.

Air Filter

Structural Drawing, Option and Replacement Parts 10 6. Bowl Assembly Specifications 11-18 7. Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-28 10-1. Bowl Assembly Replacement 23-25 10-2. Element Replacement 26-28 11. Disassembly Drawing 29 12.

ZX

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum switch unit E C ZX1 1 10 Ejector unit Filter unit F ZX1 1 10 Ejector unit PV/V port size Ejector unit nozzle dia.

ML1

Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5

XMH/XYH Series

Specifications Table 4 Model Note 1 XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures ,

VXZ

80 60 10 60 40 1 AC DC AC/DC Maximum 10 (1) 5 (2) Minimum Note 1) Dew point is below 10C Note 2) Below 50 cSt Note 3) D, E, N, P, etc. in parentheses represents option symbol.

Digital Flow Switch (Integrated display type)

PF2W704(T) 0.5 L/min 4 L/min PF2W720(T) 2 L/min 16 L/min PF2W740(T) 5 L/min 40 L/min PF2W711 10 L/min 100 L/min -46No.PF-OMO0012-E Revision history A: Contents revised in several places. B: Revision. (kPa MPa (page 38)) C: Contents revised in several places. D: Contents revised in several places. [July 2018] E: Revision.