Electric Actuator Triple Axis P&P Unit

Picture from above B: Recommended Bolt type M6 x 20 M5 x 18 M5 x 18 M4 x 16 M5 x 14 M4 x 14 Recommended tightening torque (N.m) 6.80.3 4.40.1 4.40.1 2.10.1 4.40.1 2.10.1 Motor Coupling Y Z Y Z A The motor mounting bolts must be procured by the customer. Please follow any other mounting standards if the customer provides any. ABCD GHJK LM NP 5.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

x 0.8 (5/32") 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 36 21 M5 x 0.8 6 35 35 82 62 20 93 48 14.5 6 22 50 7 39 36 21 M5 x 0.8 6 8 76 25 17.5 45 45 105.5 114 65 32 64 7 52 38.5 25 M5 x 0.8 6 499 Series LVD With flow rate adjustment (Max.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(mm) Bore size A B C D F FB FC FT FX FY FZ GA GB H MM NA NB NN S Z 10 15 12 14 4 8 13 4.5 1.6 24 14 32 8 5 28 M4 x 0.7 12.5 9.5 M8 x 1.0 46 74 16 15 18.3 20 5 8 19 5.5 2.3 33 20 42 8 5 28 M5 x 0.8 12.5 9.5 M10 x 1.0 47 75 5 Series CJ2Y Dimensions Head flange (G) CJ2YG Bore size Stroke Z Mounting nut MM NN GA Piping port 2 x M5 x 0.8 GB NN Cover surface Rod end nut C D B 0 0.3 FY FB 2 x

S070

0 Barb fitting assembly (for cylinder port) SS070A013A SS07050A 32 Port size Applicable tube 3.18/2 Applicable tube 4/2.5 32 40 Note) Order is accepted in 10 units. !

Compact Cylinder

Example) Bolt M5 x 60 L 2 pcs.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

How to Order Manifold Assemblies (Example) Double solenoid (24VDC) SY3260-5G-C6 (2 sets) Cylinder port size M5: M5 x 0.8 Example Single solenoid (24VDC) SY3160-5G-M5 (2 sets) Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) SS5Y3-60-04U R D side Port R C8: With 8 One-touch fitting P Stations 1 2 n Port P C8: With 8 One-touch fitting U side SS5Y3-60-04U 1 set (type

VKF300

VKF300-11A-2 For VKF334: VKF300-11A-1 8 3 4 For VKF33 : VKF300-6A-1 2 sets per unit required Bushing assembly 9 Resin 2 3 Port Direct Operated Poppet Series VKF300 Dimensions/Single Type Grommet: VKF332-GM5 01 DIN terminal: VKF332-DM5 01 Body ported type 17 Rc(PT) 1/8, M5 x 0.8 (port A) Manual override (non-locking) A A 18.5 20.5 1 Approx. 300 (lead wire length) 28.5 32 2.3 32 2.3 Max. 10

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

7 2 x M5 x 0.8 Width across flats 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 Effective area: 2.4 mm2 Effective area: 2.4 mm2 Weight: 5.3 g Weight: 4.8 g Extension Fitting: M-5J Nipple: M-5N Width across flats 7 Width across flats 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Effective area: 4.0 mm2 Effective area: 4.0 mm2 Weight: 3.6 g Weight: 1.5 g Universal Nipple: M-5UN Bulkhead Union: M-5E M5 x 0.8 M8 x 0.75

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

ZX

Individual air supply port PV Individual air supply port PV Adapter D Adapter D M5 (or M6) Pitch = 21 Individual air supply port (PV port) M5 (or M6) Individual air supply port (PV port) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) (or M6) Vacuum pad connection port (V port) M5 x 0.8 M5 x 0.8 (or M6) Adsorption nozzle piping port 13-2-35 35 Series ZX Vacuum pad connection

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Description Pilot valve assembly AXT627-42-1 (M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1 (M5 x 50) AXT627-10-1 VFR53/54/55 8 NBR Hexagon socket head screw Gasket 9 10 AXT627-42-1 (M5 x 50) Refer to How to Order Pilot Valve Assembly on page 1298.

KS/KX

Kl Ml Hl Dl MS Tl 2.1-32 Series KS/KX Male connector: KSH (Standard) Tube O.D. (mm) Connection thread R(PT) Min. hole dia. Effective area (mm2) Nylon Urethane <M5, M6> <M5, M6> Weight (g) H (Hex.) Part No.

End Lock Cylinder Series CBG1

I J to 350 20 18 15.5 13 14 8 12.5 12 2 12 12 35 5 25.3 37 26 M4 x 0.7 depth 7 to 400 25 22 19.5 17 16.5 10 12.5 14 2 12 12 40 6 28.3 40 31 M5 x 0.8 depth 7.5 to 450 32 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 to 800 40 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 to 1200 50 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25 depth 16 to 1200

Compact Cylinder with Air Cushion Series RQ

Mounting bolt Example) Bolt M5 x 50L 4 pcs.

Compact Cylinder with Air Cushion

Example) Bolt M5 x 50l 4 pcs.

RQ

Example) Bolt M5 x 50l 4 pcs.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

01 DIN terminal: VKF332-DM5 01 Body ported Grommet: VKF332-G17 Rc 1/8, M5 x 0.8 2(A) port Manual override (Non-locking) A A 18.5 20.5 300 (Lead wire length) 28.5 1 32 2.3 32 2.3 59 68 MAX.10 71.5 Applicable cable O.D. 4 to 6.5 Pg.7 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

VKF300-11A-2 For VKF334: VKF300-11A-1 8 3 4 For VKF33 : VKF300-6A-1 2 sets per unit required Bushing assembly 9 Resin 2 3 Port Direct Operated Poppet Series VKF300 Dimensions/Single Type Grommet: VKF332-GM5 01 DIN terminal: VKF332-DM5 01 Body ported type 17 Rc(PT) 1/8, M5 x 0.8 (port A) Manual override (non-locking) A A 18.5 20.5 1 Approx. 300 (lead wire length) 28.5 32 2.3 32 2.3 Max.

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.