Low Profile

Relationship Between Flow Rate and Pressure Difference (Representative values) 100 [Inrush] 90 80 70 60 50 40 30 20 10 0 0 0.05 0.1 0.15 0.2 0.25 Pressure difference [MPa] Flow rate [L/min (ANR)] Rated voltage SX090 [Holding] SX91 1 2 35% (SX090) 42% (SX9 ) of rated voltage 0 V SX92 100 10 ms T1 (ON) (2 s or more) T2 (OFF) Energized condition 1 Low Profile 2/3-Port Solenoid Valve SX90/090

0.4

Enclosure C4 C6 C8 C0 F0 F1 F2 F3 P1 P2 P3 L0 L1 L2 T1 T3 M1 M2 M3 Nil W Dust-protected Dust-tight, Water-jet-proof (IP65) With 4 one-touch fitting With 6 one-touch fitting With 8 one-touch fitting Without one-touch fitting (With clip) Without lead wire F kit for 2 to 12 stations/Double wiring F kit for 13 to 24 stations/Double wiring F kit for 2 to 24 stations/Single wiring P/J/G/S kit for

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Precision Clean Regulator SRP Series

ITV 2 1 Options IC Bracket ITVH Model B21-1-T1 Rolled steel plate (electroless nickel plated) Material ITVX Pressure gauge Product part no. SRP1-M5 SRP1-01 Pressure gauge part no.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

Sealmaterial Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1

ZSM1-115/121

40 mA Current consumption 10 mA or less (24 VDC) ZSM1-121 Supply voltage 100 VAC/DC Max. operating current range 24 V or less: 50 mA, 48 V: 40 mA, 100 V: 20 mA Max. contact capacity AC 2 VA, 2 W DC How to Order ZSM1 1 15 Vacuum switch diaphragm style 0.5 m (Standard) 3 m Lead wire length Nil L Switch/Voltage 15 21 Solid state 4.5 to 28 VDC Contact (Reed switch) 100 VAC/DC Connection 0 1 T1

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 1/8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.80X: With suction filter (For mounting on ZX unit) 0R: Base mount type (For mounting on ZR unit)35 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

The NCA1 expanded line of medium duty cylinders offer bore sizes ranging from 5 to 8 inches, and come standard with adjustable air cushion.5in. bore medium duty air cylinder, 11 NFPA mounting options, Standard with adjustable air cushion, Auto switch capable, KIT, SEAL, LARGE BORE, ACTUATOR, NCA1 TIE-ROD CYLINDER, T1, 5 INCH NCA1 PART, 0.53714 lb

. *, various mounting configurations, cushion for noise damping.Double acting, single rod, lube type, Bore sizes: 125mm to 300mm, Strokes up to 2400mm available, Seven mounting styles available, Auto switch capable, BUSHING, ACTUATOR, CS1/CS2 TIE ROD CYLINDER, T1, 125MM CS1/CS2 PART, .10340 lb

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 1/8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.80X: With suction filter (For mounting on ZX unit) 0R: Base mount type (For mounting on ZR unit)35 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 1/8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.80X: With suction filter (For mounting on ZX unit) 0R: Base mount type (For mounting on ZR unit)35 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 1/8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.80X: With suction filter (For mounting on ZX unit) 0R: Base mount type (For mounting on ZR unit)35 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

. *, various mounting configurations, cushion for noise damping.Double acting, single rod, lube type, Bore sizes: 125mm to 300mm, Strokes up to 2400mm available, Seven mounting styles available, Auto switch capable, WEAR RING XB6, ACTUATOR, CS1/CS2 TIE ROD CYLINDER, T1, 125MM CS1/CS2 PART, .10340 lb

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 1/8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.80X: With suction filter (For mounting on ZX unit) 0R: Base mount type (For mounting on ZR unit)35 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking