CU

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

Precision Regulator

Flow Rate Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

AIR COMBINATION

39.6 50 40 9 18 5 48 3/4 Optional specifications Semi-standard specifications Round type Metal bowl Round type With With With auto drain Metal bowl Metal bowl Metal bowl Model pressure gauge with level gauge pressure gauge barb fitting drain guide with drain guide with level gauge with drain guide (with color zone) H H B B B B B B B J J 26 77.9 59.3 AC10A-A 26 AC20A-A 58.5 59.5 37.5

VM

Toggle Lever/VM122-M5-08, VM132-M5-08 JIS Symbol 2 port Panel mounted hole 3 port 10N F.O.F. 0.5MPa supply 60 P.T. Push Button (Mushroom)/VM122-M5-30R, B, G, Y/VM132-M5-30R, B, G, Y Panel mounedt hole JIS Symbol 2 port 3 port 21N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T.

MHS

L L 2 . 3 . 6 4 . 5 . 6 . 2 2-3. 1 2 Nm mm 16 5 20 M30.5 0.59 6 25 6 8 32 40 M40.7 1.4 8 10 50 63 M50.8 2.8 10 80 M61 4.8 12 100 M81.25 12 16 125 M101.5 24 20 3 P9P11 7 Nm mm MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3

CJ2Q

Low Friction: Double Acting Single Rod Series CJ2Q 10, 16 How to Order Bore size 10 16 10mm 16mm Mounting Basic Axial foot Front flange Double clevis Standard stroke (mm) B L F D 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 CJ2Q L 16 60 Standard L 16 60 C73 CDJ2Q With auto switch Number of switches With auto switch (Built-in magnet) 2 1 n S n Auto switch

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications 2 21 01 1 G 0 R 1 VXK AC 0 2 21 01 1 G 5 VXK DC Model Bracket Orifice size Refer to the Table (1) None Nil Fo

Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC Connector Refer to the Table (3) shown below for availability.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

1 IO-Link master Number of ports and connector Symbol Number of ports Connector Port specifications B 4 ports M12 connector Symbol Content A Port Class A B Port Class B Summary of Product parts EX600-L#B1 No.

ALF400 to 900, ALT-5/-9

Lubricators NALF400, 400-06, 500, 600, 800, 900 Pressure Characteristics How To Order 145 NALF 4 00 N02 B 120 Tank pressure (psig) 90 Option Body size 4 1/2 5 3/4 6 1 8 1-1/2 9 2 Nil None B Bracket Port size 60 02 1/4 03 3/8 04 1/2 06 3/4 10 1 12 1-1/4 14 1-1/2 20 2 30 0 15 30 45 60 70 90 100 Line pressure (psig) l e d o M A B C D e z i S t r o P Dimensions/Auto feed lubricator 0 0 4

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

, 400-06, 500, 600, 800, 900 Pressure Characteristics How To Order 145 NALF 4 00 N02 B 120 Tank pressure (psig) 90 Option Body size 4 1/2 5 3/4 6 1 8 1-1/2 9 2 Nil None B Bracket Port size 60 02 1/4 03 3/8 04 1/2 06 3/4 10 1 12 1-1/4 14 1-1/2 20 2 30 0 15 30 45 60 70 90 100 Line pressure (psig) l e d o M A B C D e z i S t r o P Dimensions/Auto feed lubricator 0 0 4 F L A N 5 1 . 3 ) 0

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

1 Direct Operated Solenoid Valve Metal Seal Series VS4 10 Model Flow characteristics Max. (1) operating cycle (cpm) (3) VK Response (2) time (ms) Weight (kg) Model Port size Rc (Nominal size) Number of positions JIS Symbol P A/B A/B EA/EB VZ C [dm 3/(sbar)] C [dm 3/(sbar)] b b Cv Cv AC DC AC DC AC DC VS4110-01 (6A) 3.2 3.2 0.42 0.37 0.86 0.80 1 8 2 (Single) 1,200 180 13 or less 45 or less

Precision Regulator Series IR1000/2000/3000

82 Mounting hole Pressure gauge (Option) 12.5 60 2.3 48 Bracket (Option) 5.5 9.5 Panel mounting hole M5 depth 7 75 83 119 18 1 1 Max.4 IN Bleed Pressure gauge (Option) Exhaust SUP(1) OUT(2) OUT 43 Panel When mounting on a panel, refer to page 561 in Specific Product Precautions. 60 50 50 2 x Rc 1/8 Pressure gauge port 2 x Rc 1/4 Port size M6 x P0.5 15.5 82 60 9 IR3120-0 Mounting hole 48

NAIV

Symbol fl:] w 8$ Flow Characteristics NAN200 900 o Specifications 35 70 125 3s0 200 r7s0 An Flow (SCFMI Mar opetating pressu|e-145PSl(t0 2kg lcIrf) Nois reduction-30d B or more Operating tenperature range-40 1 40"F (5 ' 60 "C) Noise Level Model Model Port size (NPT) Eftectlve oririce mm2 (Cv) Wbight rbs.

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

Coil rated voltage 12, 24 VDC, 100, 110 to 120, 200, 220, 240 VAC (50/60 Hz) (3) (A) 2 INT Allowable voltage fluctuation 15 to +10% of rated voltage Coil insulation type Class B or equivalent Apparent power AC (Power consumption) Inrush 5.0 VA/60 Hz, 5.6 VA/50 Hz Electrical specifications Holding 2.3 VA (1.5 W)/60 Hz, 3.4 VA (2.1 W) 9/50 Hz Power consumption DC 1.8 W Electrical entry Grommet

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

Coil rated voltage 12, 24 VDC, 100, 110 to 120, 200, 220, 240 VAC (50/60 Hz) (3) (A) 2 INT Allowable voltage uctuation 15 to +10% of rated voltage Coil insulation type Class B or equivalent Apparent power AC (Power consumption) Inrush 5.0 VA/60 Hz, 5.6 VA/50 Hz Electrical specications Holding 2.3 VA (1.5 W)/60 Hz, 3.4 VA (2.1 W) 9/50 Hz Power consumption DC 1.8 W Electrical entry Grommet,

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

Symbol fl:] w 8$ Flow Characteristics NAN200 900 Specifications 35 70 125 3s0 200 r7s0 An Flow (SCFMI Mar opetating pressu|e-145PSl(t0 2kg lcIrf) Nois reduction-30d B or more Operating tenperature range-40 1 40"F (5 ' 60 "C) Noise Level Model Model Port size (NPT) Eftectlve oririce mm2 (Cv) Wbight rbs.

Vacuum gripper

152.9 ZP 13 C 152.9 ZP 16 C 153.4 ZP 20 C 154.9 ZP 25 C 154.9 ZP 32 C 155.4 ZP 10 B 156.9 ZP 13 B 159.4 ZP 16 B 160.9 ZP 20 B 164.4 ZP 25 B 164.9 ZP 32 B 169.9 ZP 20 UT 150.9 ZP 16 J 164.9 ZP B25 J 183.4 ZP B30 J 189.9 ZP3P 20 JT2 SF 169.1 ZP3P 20 JT2 SF M 169.1 ZP3P 32 JT2 SF 180.5 ZP3P 32 JT2 SF M 180.5 ZP3P 20 JT5 SF 182.6 ZP3P 25 JT5 SF 186.4 ZP3P 32 JT5 SF 200.9 0 0 Note

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Formula for Obtaining the Set Value A B ZSP P_1 or P_3 P_2(H_1) or P_4(H_2) PSE200 PSE300 P_1(P_3)=A-(A-B)/4 P_2(P_4)=B+(A-B)/4 Hi Auto-shift input PS H_1(H_2)=(A-B)/2 Lo ISA B Switch output response time at time of auto-shift input A Auto-shift input time C Precision indicator setting PSE PSE200 PSE300 15 ms or less 10 ms or more This function eliminates slight differences in the output

LECA6_C

1 12 A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 10.5 14.2 2 1 5.6 23.7 A1 2 (7.0) 1 3 3 4 B1 12.7 2 1 18 A4 B4 (6.7) 15 16 11 30.7 44 - 11.2 () L 1 1.5m U 1 1 3 3m V 2 2 W 3 3 5 5m Shield 8 8m Vcc B-1 12 A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 4 B-1 5 A-1 1 B-3 2 A-3 5.6