Two Hand Control Valve

0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !

Slit Valve

A6063 Main material of vacuum part Body A5052 Bonnet A5052 Others Stainless steel 304 Exhaust direction Free Mounting direction Vertical Port size M5 x 0.8 Rc 1/8 End-lock mechanism With lock mechanism at opening/closing position Note 5) Cylinder volume (L) 0.12 0.2 Non-cassette type 8 14 Cassette type: Standard 12 20 Weight (kg) Cassette type: Half MESK 12 20 Cassette type: Full MESK 11

Foot Pedal Type

11 Symbol B A (A) 4 (B) 2 2 x Rc1/8 (Port 2, 4) 38.2 26.2 2 x M5 x 0.8 (Port 3, 5) 12 14 Rc1/8 (Port 1) 3 (EB) 1 (P) 5 (EA) Total Travel (T.T.) 2.5 Full Operating Force (Reference value)(F.O.F.) 55 N (at 0.5 MPa) 530.2 1590.2 Safety Instructions Be sure to read Handling Precautions for SMC Products (M-E03-3) before using.

Compact and

Piping diameter ZU05mA 0.5 90 48 7 13 14 3.9 18.6 ZU07mA 0.7 11 16 28 4.3 19.1 The piping diameter for each port should be the standard size of One-touch fitting.

AMD

precautions on every series. 14-20-22 2 Micro Mist Separator Series AMD How to Order AMD150 to AMD850 AMD 250 03 J B Body size Option 1 4 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard Standard Standard J Drain guide B female thread R IN-OUT reversal direction Accessory (Option) Symbol Description Bracket T Element service indicator Nil B 3 4 650 1 850 11

Air Tank Series AT 1

R 1/2 R 3/4 R 11/4 R 2 R 1 Accessory (2) Rc 1/2 Valve for drainage (1 pc.) Pressure gauge (1 pc.) R 3/8 x 100 M16 x l 250 M16 x l 300 M24 x l 500 M16 x l 500 Anchor bolt (4 pcs.) Note 1) Manufactured upon receipt of order Note 2) The accessories should be mounted by user.

RSH

As a rough guide, tighten the screw an additional 90C after feeling a tight resistance. 4.3-11 Lever Detection Switch (Proximity Switch) Mounting Position Proximity Switch Specifications/Manufacturer: OMRON Co. Ltd. E2E-X1C1 E2E-X2D1-N Model no.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

4 6-14-10 11 Series NCM Construction: Single Acting, Spring Return t y q !1 !2 e r !0 w o CJ1 CJP CJ2 CM2 CG1 !

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data 8-16-11 11 Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F 10, 15, 25 How to Order CY1F R 10 300 F9BW Number of auto switches Magnetically coupled rodless cyinder, low profile guide type Nil S n 2 pcs. 1 pc. n pcs

Connector Mounting Position: Both Sides 11~20 Stations, Stations: 11 Stations, SUP/EXH Block Mounting: 2~10 Stations: One Side, 11~20 Stations: Both Sides, Port Size: ø6 One-touch Fitting

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

R Right side parallel L Left side parallel Symbol LEKFS25 LEKFS32 LEKFS40 H 20 24 30 A 12 16 20 B 6 8 10 E Battery-less absolute (Step motor 24 VDC) y Motor option t Stroke*1 u Actuator cable type/length Robotic cable [m] Nil None R8 8*2 R1 1.5 RA 10*2 R3 3 RB 15*2 R5 5 RC 20*2 Nil Without option B With lock Size Stroke 100 200 300 400 500 600 25 V V V V V 32 V V V V V 40 V V V V V 11

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

Compact manifold regulator ARM10/ARM11 ZS-32-D Mounting option Direct precision operated regulator ARP20 (K) /ARP30 (K) /ARP40 (P) 126 A Digital Pressure Switch ISE35 Series Refer to pages 11 and 12 for Pressure Switch Precautions.

ITVH

Right angle type cable connector 3 m 52 10 ARJ (33) Straight type cable connector 3 m AR425 to 935 52 12.5 ARX AMR Setting part ARM 10 M12 x 1 Cable connection thread (Plug type) 5.5 8 ARP 111 11 Digital pressure display IR-A M5 x 0.8 Solenoid valve EXH Breathing IR M4 x 0.7 depth 8 F.G.

Pulse Valve

Description Material 1 Body ADC 8 Seal NBR 2 Main valve Resin 9 Washer Fe (Chromated) 3 O-ring NBR 10 Compression nut ADC 4 Bonnet ADC 11 Hexagon bolt Stainless steel 5 Sub-valve Resin 6 O-ring NBR 7 Bonnet ADC JSXFAF/Direct Piping Type Port size: Sizes 06, 10 Port size: Size 14 i u y t t r r e e w IN w IN q q Component Parts Component Parts No.

Multi-connector with One-touch Fittings DMK Series No. of Connecting Tubes: 6, 12

34 11 4 12 5 7 11 43 55 38 Click here for applicable color caps. 250 B

Wireless System

End Plate (D side) p. 11 Dimensions p. 12 LED Display p. 15 Technical Data p. 22 Important p. 22 Safety Instructions Back Cover 6 Wireless System EX600-W Series RoHS How to Order EN W EX600 1 SI Unit Wireless compatible Output type Symbol Specifications 1 PNP 2 NPN SI unit Symbol Specifications Note EN Wireless master unit For EtherNet/IP SV Wireless slave unit Wireless master

Industrial Filters

(Refer to 11. Nominal filtration accuracy on page 118.)

AR20-B to AR60-B

13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

Series GS40 Digital Pressure Sensor 1

SET 20 VY1 + G P.SET PPA AL 14-11-19

Lightweight and Compact

Lights up during remote operation. 11 Changing pressure unit Pressure unit can be changed. MPa PSI t [RUN] lamp Lights up when the product is started, and goes off when it is stopped.