11 4 36.5 L1 L2 4 41.5 45 C4: 4 One-touch fitting M plug connector (M) Stations D side U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n x C4, M5 4(A), 2(B) port C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 P = 11 12.5 (46) L plug connector (L) n: Stations Dimensions n L 11 138 130 10 127 119 L1 L2 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105
105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor
Set flow range when auto-shift or auto-shift zero is selected Model PFM710 PFM725 PFM750 PFM711 Set flow range -10.5 to 10.5 L/min -26.3 to 26.3 L/min -52.5 to 52.5 L/min -105 to 105 L/min -34No.PF-OMJ0006-J [F 8] Display resolution This function is only available for the 10 and 100 L/min types. The minimum setting unit can be changed by selecting the display resolution.
Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range For vacuum pressure ZSE30A 0 101 kPa 105 kPa 10 kPa For compound pressure 100 kPa 100 kPa ZSE30AF 105 kPa 105 kPa For positive pressure 100 kPa 1 MPa ISE30A 105 kPa (0.105 MPa) 1.05 MPa Rated pressure range of switch Set pressure range of switch Back page 2 These safety instructions are intended to prevent hazardous situations and/or equipment
Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5
D-A7 D-A80 D-A73C D-A80C 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 CP95 Symbol Specifications D-C7 D-C80 NCM -XA Change of rod end shape D-A7H D-A80H Band mounting style (6, 10, 16) -XB6 Heat resistant cylinder (150C) Not available with switch & with air cushion NCA -XB7 Not available
220 77.5 80 50 40 18 9 88 35 9 4.6 74 3 226 187 38 105 235 93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43 105 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 105 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 105 297 Note 1) For AC20 only, the position of the pressure gauge is above the piping center.
ZPT16 ZRJ'20 32 32 32 32 32 32 ZPT25 ZPT16 ~ '6 18 12.5 21 .5 33 56 B9 B9 89.5 3.5 1.2 Deep type mm ZPT32 33 33 33 33 33 33 M_I 1>A 1> 8 C 0 E F G 1:4 1:6 y H 92 6 ZPT400 105 110 105 110 105 110 105 110 .
-X Accessory Double knuckle joint GKM-A 100 165 JA-Floating joint 70 160 20Calculation: (Example) C76F40-100T, C76C40, KJ12DA Base weight 11250 (40) g Mounting bracket 305 g Single knuckel joint 105 g 1125 + 305 + 105 = 1535 g Data Auto Switch Mounting, Minimum Possible Cylinder Stroke Rail Mounting Type Band Mounting Type (mm) (mm) No. of auto switches No. of auto switches 2 pcs. n pcs
B TA ~ TL TU TC TX TE TO TR n TS TH TF Z " TOH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12 g.070 MII-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16 +8-070 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 1 6gmo Mounting plate (Double clevis) MII-S06 63 75 100 70 15 11 0 90 130 20 11 22 14 60 80 105 201.084 80 95 100 70 15 130 11 0 150 20 11 22 14 50 80 129 20 1 1)84 Ma,510
Material: Cast iron I-04 I-05 I-08 I-10 16 + 0.1 0.3 16 0.1 0.3 28 0.1 0.3 30 0.1 0.3 22 27 37 37 24 28 36 40 55 60 71 83 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 15.5 15.5 22.5 24.5 20 20 26 28 69 74 91 105 12 + 0.070 0 12 + 0.070 0 18 + 0.070 0 20 + 0.084 0 Applicable bore size (mm) 40 flat washer size Cotter pin size Part no.
VNA3-20A VNA4-25A 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55 60.5 73 1 84 100 92 108 135.5 137 153 154 170 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 80 90 2.3 2.3 62 72 50 60 30 35 31 36 35 40 43 49 5.5 6.5 17.5 20 151.5 32A, 40A, 50A Port size Main Port Rc(PT) Pilot port A B C D E F G H I J K L M Model Rc(PT) 1 8 1 4 1 4 VNA5-32A VNA6-40A VNA7-50A 1 4 1 105
size (mm) 10 16 Mounting hole 7 3.2 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) LA H F D LY NN C LX Y B LC LT MM X A LB LH LZ NA NB S Z Z S Z S Z S 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 116 [117] 117 [118] 128 [129] 129 [130] 10 16 28 8 4 M8 x 1 14 24 7 84 12 1.6 5 72 15 15 9 32 9.5 60 37.5 4.5 16.5 M4 x 0.7 12.5 52.5 28 8 5 M10
(n 2) 2 25 + 55 (n 2) 2 100 + 55 (n 4) 2 120 + 55 (n 4) 2 (n 4) 2 125 + 55 (n 4) 2 130 + 55 (n 4) 2 D-F5NTL D-F59F 105 + 55 n = 4, 8, 12, 16 15 + 55 n (Same side) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 100 10 25 120 125 130 105 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 2 (Different sides, same side), 1 95 100 15 80 85 90 (n 2) 2 (n
, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 10 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 2 (Different sides, Same side), 1 20 95 100 105 110 D-Y7BAL (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 110 + 45 105 + 45 n = 4, 8, 12, 16 100 + 45 n = 4, 8, 12, 16 95 + 45 n = 4, 8, 12, 16 20 + 45 n = 2, 4, 6, 8 2 (Different sides, Same side), 1 15 120 130 140 n = 4, 8, 12, 16 D-P5DWL (n 2) 2 (n 4) 2 (n 4)
1/8, 1/4 126 87 36 60 28.5 41.5 43 30 24 5.5 3.2 1/4, 3/8 167 115 41 80 30 55 57 41 35 35 14 7 7 4 1/4, 3/8, 1/2 220 147 48 110 38 72.5 75 50 40 40 18 9 9 4 Accessory/Optional specifications (2) (3) (3) (3) (3) (3) With auto-drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge Upward facing handle Model H2 J K L B B B B B C ACG20 ACG30 ACG40 87 24 33 12 5.5 105
, 12, 16) Note 2) 80 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) (n = 2, 4, 6, 8) Note 1) 10 + 30 (n 2) 2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 2 (Different surfaces, Same surface) 1 20 100 105 110 D-Y7BA n 100 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2
M E F 3 3 12 12 12 12 G 12 12 N SMC SMC O P NOTES: 1) SIZE 1 1/4,3/8, 1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 3/4, 1 6 PORTS,1,3,5 PORTS 2) SIZE 1 1/4,3/8, 1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 1/2, 3/4,1 2 PORTS,2,4 PORTS 3) ALL DIMENSIONS ARE IN MILLIMETERS SIDE U SIDE D n 3 STATION 2 1 SMC SMC BB 2 2 2 2 2 2 AA S R Q 4 4 4 4 4 4 U T X Y Z V W PITCH NOTE #2 177.5 A 119 B 9 C 50.5 D 48.5 E 58.5 F 87 G 105
type) E Pilot port 12(P1), 10(P2) Port size: refer to table below C K (External pilot solenoid) P1 P2 J J B (Air operated) D 4 x 2 x 18 mouting hole 32 H F A Applicable flange Port 1, 2 Pilot port 12(P1), 10(P2) A Model B C D E F H J K Note) VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40 50 292.5 (294.5) 308 (310) 332 (334) 130 150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 100 105
1050 Kgf/cm 2 0 10.197 -1.07 10.71 ISE70 Bar 0 10.000 -1.05 10.50 Psi 0 145.04 -15.2 152.3 (PD) 1000 5000 580 5200 MPa 0 1.6000 -0.105 1.680 kPa 0 1,600.0 -105 1680 Kgf/cm 2 0 16.315 -1.07 17.13 ISE71 Bar 0 16.000 -1.05 16.80 Psi 0 232.06 -15.2 243.7 (PD) 1000 5000 738 5200 ISE70 MPa (PD) PD [MPa] (PD)(ISE70 MPa) -62No.PS-OMV0003CN-G Pr = a (PD) + b (PD) = (Pr b)