A B A B A B A A A B For the I/O Unit part number mounted, refer to the following pages.
2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 58.2 5.5 35 18 28.8 70.7 B COM A B COM A B COM A B COM A B COM A DIN rail holding screw Manual override DIN
5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.
B B B B 19 P 40 39 P 35 A A A A A 19 2 MAX.5 10 10 (Lead wire length) G : About 300 H : About 600 24.5 (Pitch) P=10.5 10.5 (Mounting holes) L2 4 L1 (Non-locking) Manual override A A 20 48.5 [55] 15 B B 5 36.1 1.5 29.5 A A (Pitch) P=10.5 17.5 2n-One-touch fitting (A, B port) 20 15 B B 5 1.5 2n-M5 0.8 (A, B port) (Pitch) P=10.5 15.7 Other dimensions are the same as the M5T.
Special Applications: Copper, Fluorine & Silicon-free+Low Particle Generation, Body Size: 25, Reverse Flow: Reverse Flow Mechanism, Thread: NPT, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: Nameplate/Caution Plate for Bowl in Imperial Units
Special Applications: Clean Series, Body Size: 25, Reverse Flow: Reverse Flow Mechanism, Thread: Rc, Port Size: 03 [3/8 (Size 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: 1+R
Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 25, Reverse Flow: K (Reverse Flow Mechanism), Thread: N (NPT), Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )
Body Size: 25, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 03 (3/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa
Body Size: 25, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa
Regulator, Pressure Boosting Valve: -, Regulator Type: -, Shape: -, Operating Environment: -, Compatible Fluid: -, Exhaust Mechanism (Air Bleed): -, Reverse Flow Function (Relief): -, Supply Side Connection Type: -, Supply Side, Connection Diameter: -, Flow Direction: -, Control Side Connection Type: -, Control Side, Connection Diameter: -, Pressure Gauge: -, Size of Body: -, Accessory: -
Regulator, Pressure Boosting Valve: -, Regulator Type: -, Shape: -, Operating Environment: -, Compatible Fluid: -, Exhaust Mechanism (Air Bleed): -, Reverse Flow Function (Relief): -, Supply Side Connection Type: -, Supply Side, Connection Diameter: -, Flow Direction: -, Control Side Connection Type: -, Control Side, Connection Diameter: -, Pressure Gauge: -, Size of Body: -, Accessory: -
Body Size: 25, Backflow: w/Backflow Function, Thread: NPT, Port Size: 3/8, Options: Square Embedded Type Pressure Gauge, w/Limit Indicator, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale, Made to Order: 0.4 MPa Setting
Body Size: 25, Backflow: w/Backflow Function, Thread: NPT, Port Size: 1/4, Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale, Made to Order: 0.4 MPa Setting
Body Size: 25, Backflow: w/Backflow Function, Thread: NPT, Port Size: 3/8, Options: w/Bracket, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale, Made to Order: 0.4 MPa Setting
Body Size: 25, Backflow: w/Backflow Function, Thread: NPT, Port Size: 3/8, Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale, Made to Order: 0.4 MPa Setting
Body Size: 25, Backflow: w/Backflow Function, Thread: NPT, Port Size: 1/4, Options: Round Type Pressure Gauge, w/Limit Indicator, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale, Made to Order: 0.4 MPa Setting
Body Size: 25, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 03 (3/8), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)
Body Size: 25, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 03 (3/8), Options: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)
Body Size: 25, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)
Body Size: 25, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: G (Round Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)