Size: M3, M5 Basis, Style: Universal, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø3.2, Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Universal, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: 10-32UNF, Tube Size: 1/8", Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: 1/4", Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: 10-32UNF, Tube Size: Ø3.2, Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: 10-32UNF, Tube Size: Ø3.2, Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø6, Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: 1/4", Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø3.2, Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: 5/32", Option: None, Lock Nut: J (Round)
Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø4, Option: Nickel Plated, Lock Nut: -
High Vacuum L Type Valve Step 7 Reassembly of bonnet assembly (No.2) 3 Bolt 1 2 4 Bonnet assembly Port 1(P) Bolt size, Tool, Tightening torque of bolt (Nm) valve Bolt size Hex Tightening torque size wrench XLFV-16 M3 3 0.7 -25 M5 4 1.5 -40 M6 5 2.5 -50 M8 6 6.1 Body -63 M10 8 15 -80 Turn ON the solenoid valve to supply air pressure of 0.4MPa (G) to the port 1(P).
Tighten the FG terminal (M3 round head combination screw) firmly with a tightening torque of 0.3 Nm. Tighten the connector fixing screws (M2.5 slotted head screws) firmly with a tightening torque of 0.2 to 0.3 Nm. A. Dual power supplies B.
Panel mount adapter Remote type monitor unit/Display unit V Symbol Instantaneous flow rate Accumulated flow M L/min L G gal/min gal Mounting screw (M3 x 8L) Waterproof seal (Accessory) * Under the New Measurement Law, units other than SI (symbol M) cannot be used in Japan. * G: Made to order Reference: 1 [L/min] 0.2642 [gal/min] 1 [gal/min] 3.785 [L/min] (Accessory) Panel Option/Part No.
Pressure dew point: 3C Oil concentration: 0.1 mg/m3 With the above conditions, notation of the quality class is 1, 4, 2. 344 LLB Series Clean Air Module / Precautions 2 Be sure to read this before handling the products.
ZS-32-A Length: 2 m (With rubber cover) Note Lead wire with connector Mist separator regulator AWM20/AWM30/AWM40 For ISE35--A (AR/AW series) Mounting thread (M3 x 7L, 2 pcs.), adapter, lock pin, O-ring are attached ZS-32-C Mounting option Micro mist separator regulator AWD20/AWD30/AWD40 For ISE35--B (ARM10/11 series) Mounting thread (M3 x 13, 2 pcs.), adapter, lock pin, O-ring are attached
Round head screw (M3 x 8) 4 pcs. r Seal Cap (10 pcs.) Enclosed parts Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs. Be sure to mount a seal cap on any unused I/O connectors. Otherwise, the specified enclosure cannot be maintained.
/min (ANR)) (Example) To get pressure drop at 0.3 MPa of air pressure, 5 m3 /min (ANR) of air flow and model HAW75-20, use P = 0.0065 MPa at 0.7 MPa from the table and convert P1 to 0.3 MPa.
(When greasy fumes are 1,000 mg/m3 at the IN side, it will be 5 mg/m3 or less at the OUT side.) Exhaust ducts from a vacuum pump is not necessary.
Check the detecting position again and tighten the mounting screw to fix the auto switch definitely (the tightening torque of M3 screw should be about 50 to 70 N/cm). 5. Modification of the detecting position should be made following step #3. Auto Switch Mounting Band Part No.
L L N'm J MJ in3 in3 Energy em3 (ee) 0.0610 m3 35.320 0.0283 28.329 1t3 N'm 0.7375 11 Ib 1t3 J 0.7375 It Ib L 0.0353 Power It IbiS hp 9al(U.S.) 3.785 gal (U.S.)