Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Elgiloy®; Nozzle: 315L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Elgiloy®; Nozzle: 315L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Elgiloy™; Nozzle: 316L SS), Surface Finish: M [0.25 μм], Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections,

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Elgiloy™; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Elgiloy™; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Elgiloy®; Nozzle: 315L SS), Surface Finish: M [0.25 μм], Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Elgiloy®; Nozzle: 315L SS), Surface Finish: M [0.25 μм], Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Elgiloy™; Nozzle: 316L SS), Surface Finish: X [5 μin. (0.13 μm)], Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections

Parallel Seal Type Slit Valve

Maintenance Warning Please refer to the attached Procedure for maintenance. 10 - 7Troubleshooting Status Possible cause Countermeasure Operating pressure is too low Increase pressure to 0.45MPa or more.

Safety Speed Control Valve (SSC Valve) Series ASS 1

02 03 04 06 10 Type 1 8 ASS100/110 ASS300/310 ASS300/310 ASS500 ASS500/600 ASS600 ASR PAT.PEND 1 4 00 10 Meter-out control type Meter-in control type Meter-in type is available only for ASS110 and ASS310. 8 3 ASF 1 2 3 4 1 JIS Symbol Thread type Nil N F Rc NPT G Meter-out control Meter-in control Caution Be sure to read before handling.

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 01 to 0.7, Specification: Without magnet, Port thread type: M Screw, Auto Switches: Without auto switch

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 01 to 0.7, Specification: Without magnet, Port thread type: M Screw, Auto Switches: Without auto switch

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 01 to 0.7, Specification: Without magnet, Port thread type: M Screw, Auto Switches: Without auto switch

Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 10 (ø10), Cup Form: B (Bellows), Cup Material: N (NBR), Attachment: with (Guide) Attachment

Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 10 (ø10), Cup Form: B (Bellows), Cup Material: S (Silicone Rubber , White), Attachment: with (Guide) Attachment

Unit Size: 7 (75mm), Cup Flange Shape: A (42mm x 42mm), Manufacturer: 01 [UR: 3(e), 5(e), 10(e), 16(e)], Cup Series: ZP (Basic), Cup Diameter: 10 (ø10), Cup Form: C (Flat with Rib), Cup Material: N (NBR), Attachment: with (Guide) Attachment

Body Size: 1 (M5x0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread: R (or Metric), Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 01 (ø1/8"), Seal: w/o Sealant

Body Size: 1 (M5x0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread: R (or Metric), Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 01 (ø1/8"), Seal: w/o Sealant

Body Size: 1 (M5x0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread: R (or Metric), Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 01 (ø1/8"), Seal: w/o Sealant

Body Size: 10 (800 L/min. 28.2 scfm), Thread Type: Body Size 05: M Thread; Body Size 10-40 R Thread, Port Size: 01 (1/8)