9.8

Pressure range Switch 100 kPa 0 100 kPa 500 kPa 1 MPa For vacuum pressure ZSE10 0 101 kPa 105 kPa 10 kPa For compound pressure 100 kPa 100 kPa ZSE10F 105 kPa 105 kPa For positive pressure 100 kPa 1 MPa ISE10 105 kPa (0.105 MPa) 1.05 MPa Rated pressure range of switch Set pressure range of switch Back page 4 Revision history Acquisition of UL standards.

5

(Different surfaces, Same surface), With 1 pc. 15 105 110 115 With n pcs. 15 + 40 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 105 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 115 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) With 2 pcs.

VNC

port Manual override (Non-locking) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 x 2-18 mouting hole Applicable flange Pilot port Rc A Model L K J H F E D C B VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40 50 278 293.5 317.5 310.5 326 350 12 12 14 36 42 54 100 105

C95

105 120 125 130 1, 2 F5NTL 15 + 55 (n 2)/2 25 + 55 (n 2)/2 100 + 55 (n 4)/2 105 + 55 (n 4)/2 105 + 55 (n 4)/2 120 + 55 (n 4)/2 125 + 55 (n 4)/2 130 + 55 (n 4)/2 n n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 10 10 60 65 65 75 80 85 1 100 100 90 95 95 100 105 110 2 (Same side) A3 2 (Different sides

Booster Relay Series IL100

O-ring NBR 18 O-ring NBR 19 O-ring NBR 20 O-ring NBR 21 O-ring NBR 22 O-ring NBR 57 Lock-Up Valve Series IL201/211/220 Positioners Regulators Relays/Valves Electro-Pneumatic Transducers Actuators Detection Conversion Unit Solenoid Valves Air Preparation Equipment Industrial Filters Piping Materials Dimensions IL201 14.5 Panel fitting dimension Panel 35 58 45 Max. 4 2 x 6.6 2 10 62 21 5 105

KS/KX

0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42 68 76 94 88 14 4 10.4 10.4 8 17 1 4 15.2 18 18.5 6 26.1 18.0 3 8 Connection thread 1 4 52 18.5 23.5 21 10 3 8 1 2 3 8 1 2 22 7 36.3 29.5 53 54 55 24 20.9 26 22 12 8 46.1 46.1 105

VHS

Left IN1(P) Piping VHS500-06 VHS501-06 VHS400-04 VHS401-04 VHS400-03 VHS401-03 VHS400-02 VHS401-02 Right IN1(P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2)(CV) Weight (kg) 93(5.22) 57(3.20) 35(1.97) 21(1.18) 105(5.90) 76(4.27) 54(3.03) 35(1.97) 0.29 1(P)2(A) 2(A)3(R) 0.34 0.25 0.27 Left or right to the front face of the handle.

KS/KX

04S KXH12-03S KXH12-04S 11 13 39 35 8 16 10.4 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 17 15 12.8 38 39 42 43 44 1 8 1 4 1 8 20 26 28 34 42 68 76 94 88 14 4 10.4 10.4 8 17 18 18.5 15.2 1 4 6 26.1 18.0 3 8 1 4 52 18.5 23.5 21 10 3 8 1 2 3 8 1 2 7 22 36.3 29.5 53 54 55 24 20.9 22 26 8 12 46.1 46.1 105

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

Drivers for LJ1, LG1, LX Dimensions 5.2 Driver 150 168 160 5.2 20 A 105 3 Driver dimensions For LJ1, LG1 Driver input/output signal list (CN-1/F connector) Signal description Control signal power supply Servo ON input Alarm clear input Counter clear input Gain switching input Pin no. 12 13 14 19 20 21 22 23 24 25 26 Symbol IM COM GND OZ+ OZ CZ CW+ CW CCW+ CCW FG Signal description Torque

Pneumatic Positioner IP300/IP3100

I t al (Silicon) Low Temperatufe L Porl Connection NIL PT Thr6ad PF Parallel Pip Thread t l{PT Amarican National Standard Pioe Thread Acceesoris t l{ll Standard Lever Control Lengrth (0.25 to 3.35 inches) (6lo 85mm) D High Pressure Signal Spring K 1/2 Split Range Spring E Longsr Lever Control Length (2.35 to 4.33 inchss) (60 lo 11omm) F Longer Levsr Conlrol Lengnh (4.13 to 5.91 inches) (105

Self-seal Fittings Series KC

Nylon Urethane L1 L2 M 1 4 1 4 3 8 3 8 3 8 KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 2.6 32 36 42 79 105 2.6 6.8 16.2 25.6 35.4 M12 1 M14 1 M16 1 M20 1 M22 1 40.5 42.7 49.4 53.9 56.1 14 17 19 24 27 17 17 19 22 24 14.7 14.7 15 14.2 13.7 13 15 17 21 23 18 19 21.5 24 25.5 6.8 13.1 20.4 30.4 Straight: KCH Applicable tube O.D.

C76

-X Accessory Double knuckle joint GKM-A 100 165 JA-Floating joint 70 160 20Calculation: (Example) C76F40-100T, C76C40, KJ12DA Base weight 11250 (40) g Mounting bracket 305 g Single knuckel joint 105 g 1125 + 305 + 105 = 1535 g Data Auto Switch Mounting, Minimum Possible Cylinder Stroke Rail Mounting Type Band Mounting Type (mm) (mm) No. of auto switches No. of auto switches 2 pcs. n pcs

Compact Hydraulic Cylinder

110 115 120 125 150 175 200 225 250 85 90 95 100 105 110 115 120 125 130 155 180 205 230 255 100 105 110 115 120 125 130 135 140 145 170 195 220 245 270 120 125 130 135 140 145 150 155 160 165 190 215 240 265 290 55 60 65 70 75 80 85 90 95 100 125 150 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 110 135 160 185 210 75 80 85 90 95 100 105 110 115 120 145 170 195 220

Compact

B 2 x 4 x Square nut M5 x 0.8 LER 8.5 5.5 (105) 105 Stroke LEH [Origin]Note 1) Origin Note 2) Origin Note 2) When LECP1, LECP6 or LECPMJ is used. 3 5.3 When LECP2 is used. When LECP2 is used.

SMC Electronic Switch Series Variations

port Rc1/8 Dimensions/With DIN rail Station L1 L2 L3 2 70 105 140 3 105 140 175 4 140 175 210 5 175 210 245 6 210 245 280 3.8-6 ISA Guide for Use/Design Data When designing a pneumatic circuit with an Air-Catch Sensor, please refer to the data below.

45

A: Orange B: Green Stations n 10 stations 11 12 13 14 15 16 17 stations M3 Terminal screw 298 323 335.5 348 360.5 385.5 398 410.5 L1 L2 L3 L4 287.5 312.5 325 337.5 350 375 387.5 400 272 288 304 320 336 352 368 384 (Rail mounting hole pitch 12.5) 13 17.5 15.5 14 12 16.5 15 13 1-6-105 SX5000: PC Wiring System Compatible (Flat ribbon cable type/Plug-in) SS5X5-45GUStations DC4 C6 C8 (Pitch) P

51

V MM NA P S RR TF TH TT TV TW TX TY TZ Z ZZ -X Up to 300 80 100 M22 x 1.5 M26 x 1.5 80 100 Rc1/4 Rc3/8 104 105 18 22 11 13.5 55 65 11 12 110 130 72 93 85 100 45 60 64 72 Up to 300 26 32 183 192 241.5 268.5 IY-G08 IY-G10 Technical Data Use a thin wrench when tightening the piston rod. Refer to the dimensions of the basic type for the female rod end type and the long male rod end type.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

MTS 105 Particle concentration (particles/m3) MY Special cylinder tube 104 Class M3.5 [Class 100] CY A special cylinder tube is employed using extruded aluminum material. Even long strokes are not subject to deflection because of direct attachment to the cylinder body, and non-contact construction is achieved through combination with a linear guide.

VXA21/22

Applicable Fluids Standard Option (1) Water (Standard, Up to 40C) Air (Standard, dry), Turbine oil Vacuum (Up to 1 Torr) Carbon dioxide (CO2), Nitrogen gas(N2) Freon11, 113, 114 Vacuum (Up to 103 Torr) (V, M) Non-leak (105 atm cc/sec or less) (V, M) Symbol N.C.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Particle generation has been reduced to 1/20 compared to series 12-CY1B (previous SMC product) even without vacuum suction. 105 Particle concentration (particles/m3) 104 Class M3.5 [Class 100] 103 Class M2.5 [Class 10] Stainless steel linear guide (specially treated) 102 The specially treated linear guide achieves low particulate generation, high linearity and high precision.