Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

4 25 2.5 25 5 14 MXY12 M5 x 0.8 31 52 40 15 86 8.5 30.9 5 3 36 32 6 18 PH TB Z T WR RL QW R RH WE WD Q W PR P PL TH Model MXY6 5.1 2.9 88 4 12 60 5 7 30 11 13 3(depth 3) 3(depth 3) 2.5 9 20 25.5 MXY8 6.1 98 3.4 4 15 70 6.5 7 38 19 13 3(depth 3) 3(depth 3) 3 10 25 32 MXY12 7.8 114 4.5 21 5 8.5 90 7 50 29 18 4(depth 4) 4(depth 4) 4 13 33 42 n QL Model 50 100 150 200 250 300 350 400 50

IC

0 VEX IC-0(Internal sensor type) IC-1(External sensor type) No. q w e r Description Note Breathing port (M3 x 0.5 x 9.5) Breathing port (M3 x 0.5 x 9.5) Power supply, 10 bit input cable 13 wire, O.D. 6.8 mm, 1 mm length AMR Pneumatic regulator connection cable 5 wire, O.D. 6 mm, 1 mm length q q Cable for 4 point switch output ITV 3 wire, O.D. 3.4 mm, 1 mm length Cable for external sensor

ARJ1020F

5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

Booster Regulator Series VBA1110 to 4200 1

Q [l/min(ANR)] = x D2 x W x (P2 + 0.101) x 60 x C 6 4 x 10 0. 101 VBAT10, VBAT20, VBAT38 Q [l/min(ANR)] = x 1002 x 200 x (0.8 + 0.101) x 60 x 1 = 841 4 x 106 0. 101 Select booster regulator size from flow characteristics table. Refer to page 14-9-3 for flow characteristics.

VER2000/4000

6 q w e r t y u i Block packing !

PF2A/PF2W

Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Component Parts Material ADC NBR PBT Stainless steel PBT PBT No. q w e r t y Description Attachment Seal Spacer Mesh Body Sensor Flow direction Operating Unit Descriptions Connectors Connectors shown below are applicable (female contact).

VQ5000

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Q H 05 1 3 5 ZM JIS Symbol Air supply port Exhaust port Vacuum port Port size connection Nozzle diameter 05 07 0.5 mm 0.7 mm 3 5 M5 x 0.8 M3 x 0.5 Specifications Ejector System Circuit 10 1.0 mm 13 1.3 mm Applicable nozzle size (mm) Supply valve P Q Supply valve and release valve 0.5, 0.7, 1.0, 1.3 Air operated valve H M 0.35 MPa 0.5 MPa Supply pressure Components Port size M3 x 0.5 M5 x

ZX

Code w Ejector exhaust type Weight Standard accessory Codes q and w are corresponding to the suffixes in How to Order to indicate the exhaust method.

Compact

E _ 6 9 " . q l 1 2 3 4 5 Load (kgl 6 7 8 I IE tleunic Auuat I||oilelSdodi||g trlollloil Criteria of Accelerating Speed (Horizontal Orientation) LXSH5BC .of /.

NCRBIBwserbs

(Not a\ailabl on NCRBI BWl0) x ( ) : When porl A is pressunzed. x x Optional M3 fiiing available S ho/r lo ofder page NCDRBIOWIQoI$ol[r$Q Rotation Time Setting Bodg To k Used As A Flange ltcRElB\ltfto Actual Torque Even a small torque generated by the rotary actuator, due to inertia, can cause damage. Therefore.

Air Pilot Operated

1&4 I Spdng-spooltuln xTmtl0 4 Orlng -Slv ARRt6A{14 sltw a3lambt-congEt3 ot spoot end st.v (metchd s6t) end (4) detjt4 6 XT@4 7 Q!!e, axT01&5 I P[ot cotr asrmDty with oprator.

10

0 q !6 r RJ10, 14, 2015, 2725 w i !2 r !3 !1 q e t y u o !0 !6 Component Parts No. Material Treatment Description No.

Heavy Duty Stopper Cylinder

head cap screw (M2.5 x 12 L). e If the detecting position is changed, go back to step q.

17

6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

center (A) 4 (B) 2 SX q t r w 5 (R) 3 (R) 1 (P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R) 3 (R) 1 (P) 3 position pressure center u (A) 4 (B) 2 3 (R) 1 (P) 5 (R) (This figure shows a closed center type.) 5 (R) 3 (R) 1 (P) Component Parts Replacement Parts Note Zinc die-casted Part no.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

0 Steel wire NBR Steel wire NBR XT010-20 XT010-21 XT041-1 4-16-6 Series VS3135/3145 Dimensions VS3135/3145 V100 SY SYJ VK VZ VT 3-Port size VP 4-Q Mounting hole 3-Q Mounting hole VG VP S070 VQ VS3135 VKF VQZ VZ Q Terminal dimensions Port size Rc VS A Model B C D E F G H J K L M N P R S T U VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19

Electric Actuator/Rod Type LEY16, 25, 32 Series LEY Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

q Check that actuator label for model number. This matches the controller. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O conguration matches (NPN or PNP). q w *Refer to the Operation Manual for using the products.

Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O conguration matches (NPN or PNP). q w Refer to the operation manual for using the products.