3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Refer to pages 2-5-40 to 2-5-43 for control unit.

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

Hygienic Design Cylinder/Basic Type

Grease for food part no.: GR-H-010 (10 g) Standard grease part no.: GR-S-010 (10 g) HYQB20-PS HYQB25-PS 20 25 HYQB20-PS HYQB25-PS 20 25 HYQB32-PS HYQB40-PS HYQB50-PS HYQB63-PS HYQB32-PS HYQB40-PS HYQB50-PS HYQB63-PS 32 40 50 63 32 40 50 63 HYQB20H-PS HYQB32H-PS Set of nos. above o, !0, !4. Set of nos. above o, !0, !4.

05-hyq-e

Grease for food part no.: GR-H-010 (10 g) Standard grease part no.: GR-S-010 (10 g) HYQB20-PS HYQB25-PS 20 25 HYQB20-PS HYQB25-PS 20 25 HYQB32-PS HYQB40-PS HYQB50-PS HYQB63-PS HYQB32-PS HYQB40-PS HYQB50-PS HYQB63-PS 32 40 50 63 32 40 50 63 HYQB20H-PS HYQB32H-PS Set of nos. above o, !0, !4. Set of nos. above o, !0, !4.

VXA31/32

A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

1

Note 3) Refer to the catalog, since the dimensions of standard stroke Series CQ2 and CQS are different from that of long stroke type. 6-18-1 2 SMC Actuators: Copper-free Air Cylinders 6, 8, 10, 12, 15, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 Air Cylinders 20-series has been added by design modification. (98.6.1) Series Application Bore size (mm) Standard Copper-free 6 8 12 (10

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Option (No additional charge on 7/8" and 1 1/4" bore) 1.4 2.0 Non-rotating accuracy 0.12 ftLbf (0.16 Nm) 0.04 ftLbf (0.06 Nm) 0.09 ftLbf (0.13 Nm) Maximum allowable torque Standard Stroke (in) Standard stroke Long stroke Max. stroke as standard Mounting 1/2, 1, 2, 3, 4, 5, 6 1/2, 1, 2, 3, 4, 5, 6 7, 8, 10, 12 12 40 Rod side nose (B) Double end (E) Head side pivot (C) 32 40 Note 1) Minimum

Vacuum Filter AFJ Series

-03-40-T/AFJ40-04-40-T 12 12 AFJ20-02-40-T AFJ30-03-40-T AFJ20-02-40-S AFJ30-03-40-S AFJ40-04-40-S 10 10 Pressure drop [kPa] Pressure drop [kPa] 8 8 AFJ40-04-40-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 40 m Large flow type Nominal filtration rating: 40 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate

ZSM1-115/121

Besides, do not connect a PLC, which can detect 1 [mA], since there is a leak current of 1 [mA] in OFF state. 0 Time Hi 5 to 40 [mA] B 10 [ms] or shorter B 10[ms] or shorter Brown OUT(+) Main circuit of switch Main circuit of switch Load A 5 [ms] or longer 12 to 24 [VDC] When the auto shift input is 10 [ms] or shorter, switch output responds.

XLA Series

Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for

XLA- ∗ -F7NJ ∗ - ∗ Series

Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding

3

Maximum flow of rated flow range Pressure Loss (Reference Data) PFMC7501 (for 500 L/min) PFMC7102 (for 1000 L/min) PFMC7202 (for 2000 L/min) 50 50 50 Supply pressure 200 kPa Supply pressure 400 kPa Supply pressure 200 kPa Supply pressure 400 kPa 40 40 40 Pressure loss [kPa] Pressure loss [kPa] Pressure loss [kPa] Supply pressure 200 kPa Supply pressure 400 kPa 30 30 30 20 20 20 10 10 10

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Size: 10 to 50 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed auto switch Solid state auto switch Hysteresis angle DM9 DA9, DA9V Size Rotating angle Operating angle m 10 10 10 10 Operating angle m 10 10 10 10 B 45 62 68 83 B 49 66 72 87 A 27 35 39 49 A 31 39 43 53 Hysteresis angle 90 80 65 50 42 35 30 24

XL-OMV0005

Refer to Chapter 3 3-2. and 3-3 Step 3 (P9, 10). Air facility for valve drive For opening and closing the valve. Table 6. Bolt and Nut size Valve size Bolt size Nut size 16 M4 M4 25 M5 M5 40 M6 M6 50 M8 M8 63 M10 80 M10 6 XL-OMV0005 2-4.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

15 20 25 30 40 35 0 2 4 6 8 10 12 16 14 18 20 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Construction PF2D504/520 Parts list Material Number Parts o !

PC Wiring System Series PCW

8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 1 1 2 3

Rotary Table/Vane Style Series MSU

180 10 90 5 90 10 180 10 90 5 90 10 180 10 90 5 90 10 180 10 90 5 Air (Non-lube) Fluid 1.05 1.5 Proof pressure (MPa) 5 to 60C Ambient and fluid temperature CRB2 0.15 to 0.7 0.2 to 0.7 0.15 to 1.0 Operating pressure range (MPa) Rotation time adjustment range (s/90) 0.07 to 0.3 (0.5 MPa) CRBU2 20 N 40 N 50 N 60 N Allowable radial load CRB1 15 N 30 N 60 N 80 N Shaft load Allowable

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

90 5 90 10 180 10 90 5 90 10 180 10 90 5 90 10 180 10 90 5 Air (Non-lube) Fluid 1.05 1.5 Proof pressure (MPa) 5 to 60C Ambient and fluid temperature 0.15 to 0.7 0.2 to 0.7 0.15 to 1.0 Operating pressure range (MPa) Rotation time adjustment range (sec/90) 0.07 to 0.3 Allowable radial load 40 N 50 N 60 N 20 N 30 N 60 N 80 N 15 N Shaft load Allowable thrust load 2 15 N 30 N 40 N 10 N Allowable

Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing)

Model selection PsAllowable pressure Refer to page 21, Table 10 PsAllowable pressure Refer to page 21, Table.10 Es Allowable kinetic energy Refer to page 21, Table 10 13/28 In this series, the work load and the maximum operating pressure are restricted to prevent the magnetic coupling from being separated.