Process Pump

Dimensions 17 Revision 9-Feb-1998 Initial release 23-Dec-2019 Revision A Completely revised by format change. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved 18

Process Pump

-Supply air at appropriate pressure. 18 10. Outer dimensions PB1011A-01PB1013A-0119 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

Process Pump

Also, one piece of amp "HPX-EG00-1S-L02" manufactured by Azbil Corporation is required for one sensor to detect the fluid leakage (two amps are required in total). 14 Revision 18-Aug-2020 Revision D Completely revised by format change.

Process Pump

Also, one piece of amp "HPX-EG00-1S-L02" manufactured by Azbil Corporation is required for one sensor to detect the fluid leakage (two amps are required in total). 13 Revision 18-Aug-2020 Revision D Completely revised by format change. Change the part number of amp for the sensor.

Valve Controller

How to connect 1)Switch contact, relay contact output Fig. 17 Temporary stop operation: Switch / relay contact OFF Re-Start Operation: Switch / relay contact ON 2) Transistor output Fig. 18 Temporary stop operation : Transistor OFF Re-Start Operation: Transistor ON 3) Open collector output Fig. 19 Temporary stop operation: Open collector OFF Re-Start Operation: Open collector ON 7-2 When

Valve Controller

Setting of DIP switch for temporary stop. 1) DIP switch setting Change the DIP switch as shown below. 1 2 3 Operating conditions: OFF ON OFF Temporary stop Fig. 16 .How to connect (1)Switch contact, relay contact output Fig. 17 Temporary stop operation: Switch / relay contact OFF Re-Start operation: Switch / relay contact ON (2) Transistor output Fig. 18 Temporary stop operation : Transistor

R R R REGULATOR FOR CHEMICAL LIQUIDS EGULATOR FOR CHEMICAL LIQUIDS EGULATOR FOR CHEMICAL LIQUIDS EGULATOR FOR CHEMICAL LIQUIDS LVR LVR LVR LVR Series Series Series Series

(Part 1: Electrical equipment of machines (Part 1: General requirements) 18-1992: Manipulating industrial robots Manipulating industrial robots Manipulating industrial robots -Safety. Safety. rate injury.

XL-OMY0001

1 2 4 1 0.4MPa G 3 4 2 XLA-16 2.4mm 7mm -25 3mm 8mm -40 4mm 10mm -50 5mm 13mm -63 -80 6mm 17mm < 2 < 15 XL-OMY0001 7-3. 1 2 XLA-16/25 2 2 Nm XLA-16 0.9 -25 1.5 -40 2.5 -50 6.3 -63 -80 14 2< 2 3 1 1 4 1 2 2 1 3 4 1 1 O 1 16 XL-OMY0001 5 6 1 1 1 7 2 3 Nm 1 2 XLA-16 0.7 -25 1.5 4 -40 2.5 -50 6.1 -63 15 -80 0.4MPaG O 17 XL-OMY0001 7-4. 1 40 25 1 :0.3Nm 125 2) 16 18

High Vacuum L Type Valve

Perform final torqueing of the bolts in the same numerical order (diagonally). 18 XL-OMV0007 7-4. Heater Replacement Procedure Step 1 Assembly of heater Heat transfer sheet Heater Heater Body Mounting screw Body Heater cover Mounting screw Heater cover Size 25 Size 40 or larger Put heat transfer sheet(Note1), heater, heater cover to backside of body.

XLA Series

Period and scope of warranty The guaranteed period covers the period which finishes the earliest among 2 million operating cycles (for size 16 to 80) or 1 million operating cycles (for size 100 and 160) [with our durability test conditions], 18 months after shipping from us, and 12 months after starting the use of the product at your place or your customers place.

XLA- ∗ -F7NJ ∗ - ∗ Series

Period and scope of warranty The guaranteed period covers the period which finishes the earliest among 2 million operating cycles (for size 16 to 80) or 1 million operating cycles (for size 100 and 160) [with our durability test conditions], 18 months after shipping from us, and 12 months after starting the use of the product at your place or your customers place.

XL-OMV0002

11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

D D D Body (material: A6063) K C C C C E E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18

High Vacuum L Type Valve

Period and scope of warranty The warrantyd period covers the period which finishes the earliest among 0.1 million operating cycles [with our durability test conditions], 18 months after shipping from us, and 12 months after starting the use of the product at your place or your customers place.

XL-OMY0003

. <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) < SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5

XLJ- -*G1 Series 25 40

Period and scope of warranty The guaranteed period covers the period which finishes the earliest among 0.5 million operating cycles [with our durability test conditions], 18 months after shipping from us, and 12 months after starting the use of the product at your place or your customers place.

XMC/XYC Series

Warranty period and guaranteed range The guaranteed period covers the period which finishes the earliest among 2 million operating cycles [with our durability test conditions], 18 months after shipping from us, and 12 months after starting the use of the product at your place or your customers place.

FGE-C

FGD-OP001 SUS316 FGE-KT001 NBR O FGE-KT002 FKM O V CY-24S SUS304/SWCH 001(FGESLA) 002(FGESLB) 003(FGESLC) FGE-CV SUS304 SUS304 M8X1.25XL30 SS400 M8X1.25 SS400 SS400 () 8/12 FGX-OM-L009-B 2 2 FGES L A FGES L B FGES L C 1) () (R) 12 (MPa) 0.7 () 80(60) 4 4 2)8 4 2)12 (mm) 6570250 6570500 (8 6570250) 6570750 (12 6570250) (MPa) 0.1 SUS304 SUS304 O FGESNBR FGELFKM SS400 (kg) 10 13 18

Air cylinder

Port (3) Rod seal (2) Seal retainer (1) Retaining ring Fig. 4 Replacement of rod seal 18 - 3-2.

CM2x-OM0230Q

(XC85,X446)P19 c) 4. 17 - 3-2. 3-2-1. 1 2 3 3-2-2. 1 2 3 4 5 6 7) 8 1) 2) 33. 331. 4. 20 25 32 40 CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS 1 3-3-2. 1 2 3 4 18 - 4. (XC85,X446) 4-1. -XC85 GR-H-010(10g) <> <> 4-2. PTFE X446 GR-F-005(5g) 1) 19 - 2) () 5. 5. 20 - 6. 1.