ZMA

Pressure Source Warning 1. Vacuum pressure switches There will be no change in performance if a pressure of approximately 0.5 MPa is applied momentarily (when releasing vacuum), but care should be taken that pressures of 0.2 MPa or more are not applied on a regular basis. Operating Environment Warning 1.

Compact Cylinder

(Part 1: General requirements) ISO 10218-1: Manipulating industrial robots Safety. etc. Caution: Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

4) Connector (Option) 1 CH 2 3 4 r Pin no.

2-Color Display

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = (A-B)/2 n-1 Min.

1

thread type Valve size Orifice diameter Fitting size Spacer Face seal fitting/Compression fitting Nil None A With spacer 1 Size 1 1 2 2 3 2 1/4 * The spacer is used to raise the body when fastening it onto a flat area.

IS1000

R 1/8 23 Precautions Be sure to read before handling.

1

Auto switch Approx. 5 to 15 Fig. 1-2 Fig. 1-1 Fig. 1-3 Fig. 1-7 Fig. 1-6 * A watchmakers (precision) screwdriver has a small gripping diameter. Therefore, the tightening of the M3 set screw of the band may sometimes be insufficient. To prevent this, check the ridge protrusion of step u, and confirm that the band is securely fastened.

ZSE F/ISE

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when workpiece is vacuumed. Min.B: Maximum pressure value when workpiece is not vacuumed.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

7 t CRB2 Single vane For 180 (Indicates intermediate position) For 90 (Indicates A port pressurized) CRBU2 CRB1 @1 Component Parts MSU !1 u Material Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

ZQ-OM01401

RL a 2 0.54~0.66Nm) 1 Ass'y P.27 1 2 L POM,POM,PET,SUS 3 R POM,POM,PET,SUS 4 () (PET) P.27 2 5 Assy PBT P.27 3 6 Assy () P.27 7 7 NBR P.27 4 8 NBR P.27 5 9 Ass'y P.27 6 26 - No.ZQ-OM01401-B 7.4 1 Ass'y2 ) ZQ1-SR1-04-A (1) 01 1 (1) 02 2 08 8 2 () (2 ) ZQ1-SE2-A 3 Assy (2 ) ZQ1-SC1-A 4 (10 ) ZQ-3-005-10AS 5 (10 ) ZQ-3-009-10AS 6 Assy (4 ) ZQ1-WS3-A (1) 3 M3 () (1) 4 M4 ()

3 Port Solenoid Valve

(Refer to page 11.) 1) If a lubricant is used in the system, use class 1 turbine oil (no additive), ISO VG32.

Compact Guide Cylinder

Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction. 2) Vacuum pads are excluded from this 1 year warranty. A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Use 0.3 to 0.7 times the thrust (differs depending on the operating speed) as a guide for actual use. g: Gravitational acceleration Dynamic moment Mounting orientation Dynamic load FE Horizontal Ceiling Wall Vertical Z M 1.4 100 x a x mn x g 1 3 a a ME x FE x Z Dynamic moment ME Dynamic moment ME does not occur. 1 3 mn x g ME M3 ME x FE x Y mn x g ME FE FE Note) Regardless of the mounting

Sine Rodless Cylinder Series REBR Direct Mount Type

7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

BP1000

[Cracking pressure] This is the pressure at which a check valve first opens and achieves a given flow rate as pressure increase. [Ultimate vacuum] The maximum vacuum generated by a vacuum generator. [slpm] Abbreviation for standard liter per minute. Indicates the volumetric flow in liters per minute of time at standard conditions of a temperature of 0C and a pressure of 1 atmosphere.

Economy Valve

Stop e a The air in the upper cylinder chamber is exhausted from the port 1 (P) of VEX A YE A and the air in the tank flows in through the port 1 (P) of VEX A X EA.

Escapements Series MIW/MIS

Tapped on upper and lower faces 2: Tapped on all faces (5 surfaces including end surface) 12 12 1 A S D M9BW MIW Double finger type 32 50 1 A S D M9BW MIS Single finger type Made to Order For detailes, refer to page 1423.

DOC1013369

Doc.no.DOC1013369-A PRODUCT NAME Speed controller with compact indicator MODEL/ Series/ Product Number AS-FS*A Doc.no.DOC1013369-A Contents 1.Saftey Instructions 34 2.Specific Product Precautions 511 3.Applications 12 4.Specifications 12 5.Malfunctions and Countermeasures 12 6.Construction 1317 2 - Doc.no.DOC1013369-A Speed controller with compact indicator AS-FS*A Series Safety Instructions

Cylinder with Lock Series CLS

) 1/4 Unlocking port (unlocked when pressurized) Z + 1/2 stroke Plug with breathing hole GC BB BA GA GA 2-Rc(PT) P 4-J Width across flats KA M MM BZ GB R TY TDe8 90 59 D W 14 AL C A K 43 N N TT B M S + Stroke H BY TX TZ ZZ + Stroke With rod boot Z1 + l + 1/2 stroke 75 l 15 40 h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) 125 140 160 A AL B BA BB BC BY BZ C D GA GB GC J K KA

Safety Instructions

Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/4 40 to 42 Rc 11/2 48 to 50 Rc 2 48 to 50 Reference How to tighten M5 threads on the fittings After tightening by hand, use a tightening tool to add about 1/6 turn more. But when using miniature fittings, after tightening by hand, use a tightening tool to add 1/4 turn more.