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Real-time switch output, accumulated switch output, or Up to 9 of flow rate value can be accumulated. accumulated pulse output can be selected as an output type.

Repeat the same setting steps for CH2 to CH4. 9 Series PSE Operation : Pressure Setting Manual setting Channel selection Output mode MPa Hysteresis mode: Hysteresis of the switch output can be set arbitrarily.

0.05 200 2 Guide rod type Series LXP 200 3 Slide screw 0.05 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 Sanyo Denki Co., Ltd. 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 High rigidity slide table type Series LXS 200 4.5 Slide screw 0.05 100 6 Without motor brake 100 9

Body : PFA PFA Body : PFA PFA Seals : PTFE PTFE Seals : PTFE PTFE PVDF PVDF PVDF PVDF Lock nut adjustment knob : Lock nut adjustment knob : Triple seal construction Triple seal construction Triple seal construction Triple seal construction Triple seal construction 7 6 3 2 5 4 1 A Port 8 9 B Port Integral fitting construction (Series LQ2 Hyper Fittings are used.) 1 2 3 4 5 6 7 8 9 Body Nut

Front matter 9 Glossary of Terms Pressure Terminology Others 1. Maximum operating pressure differential The maximum pressure differential (the difference between the inlet and outlet pressure) which is allowed for operation, with the valve closed or open. When the downstream pressure is 0 MPa, this becomes the maximum operating pressure. 2.

Construction VHS20/30 VHS40/40-06/50 6 8 7 2 2 5 5 1 4 IN OUT OUT IN 1 9 3 EXH. EXH. Component Parts No.

(mm) Thread Weight g H A B C E F D G I J Model M3 x 0.5 M5 x 0.8 M-3ALU-2 M-5ALHU-2 5 7 9 11 6.5 7.5 2.5 3.5 9.4 13.5 5 7 1.6 3.5 0.9 2.5 3 4 4 2 x 1 .2 Parts list Width across flats H Applicable tubing 4 3 2 1 Material Brass Brass Brass No. 1 2 3 4 Description Sleeve Stud Barb elbow Gasket Note Electroless nickel plated Electroless nickel plated Electroless nickel plated NBR, Stainless

1A base gasket kit, NEW SY5000 MFLD*** $2.14 + Add to Quote Add To Cart Add to Cart SMC SY50M-9-2 gasket, NEW SY5000 MFLD*** $1.28 + Add to

Refer to" LECS operation manual and operation manual (Simplified Edition)l, for details of each parameter. 9 - Click on the "Single Axis Write" button. Turn the power OFFand ON again. The Parameter is then enabled. Please set the parameters for each actuator. Please change the parameter values according to usage.

(Nm) L(mm) MHM-16D M3x0.5 0.63 5 MHM-25D M4x0.7 1.5 7 MHM-32D M5x0.8 3 8 MHM-50D M6x1 5.2 9 2. (Nm) L(mm) MHM-16D M6x1 5.2 11.5 MHM-25D M8x1.25 12.5 12.4 MHM-32D M10x1.5 24.5 13.5 MHM-50D M12x1.75 42 16 3.

Doing so may cause human injury and/or an accident. 9. Refer to the Auto Switches Precautions (Web Catalog) if using with an auto switch. 10. Risk to people with pacemakers The product has a magnet inside. It may interfere with the use of an electronic equipment such as a pacemaker.

Doing so may cause human injury and/or an accident. 9. Refer to the Auto Switches Precautions (Web Catalog) if using with an auto switch. 10. Risk to people with pacemakers The product has a magnet inside. It may interfere with the use of an electronic equipment such as a pacemaker.

Doing so may cause human injury and/or an accident. 9. Refer to the Auto Switches Precautions (Web Catalog) if using with an auto switch. 10. Risk to people with pacemakers The product has a magnet inside. It may interfere with the use of an electronic equipment such as a pacemaker.

Dimensions P.9 1 Document No.DOC1018377 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

No. o S o1 T P2 U Q3 V R4 W Z12 -6- (1) Nm 1/8 (2) (3) (4) -7- (1) (2) (3) (4) (1) (2) (3) (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 (6) 0.6Nm -8- (1) (2) (3) 12.5Nm (4) ()ON-OFF (5) 79Nm (6) (7) (1) AF AM AFM (2) (1) ( (2) 1.52 (1) -9- 6 (1) 1 1.5 (2) , (3) (4) [][] -10- 8 2 6 3 2 () 5 2 2 (80-) (80-) 2 2 9 EXH 2 2 ON-OFF 1 1 7 2

d (4)[][] -10- 8 2 6 3 2 () 5 2 2 (80-) (80-) 2 2 9 EXH 2 ON-OFF 1 1 7 2 2 2 No.

Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Lock keys ( ref er t o P11) 9 Rel at i on bet w een set t i ng of gai n and response t i m e Response t i m e Q ui ck Sl ow Set t i ng of gai n G L. 9 G L. 8 G L. 7 G L. 6 G L. 5 G L. 4 G L. 3 G L. 2 G L. 1 G L. 0 Rel at i on bet w een set t i ng and sensi t

Green 1 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 6 9 5. Apply a thickness gauge again and check that the Green turns on.

No.PS-OME0003CN-F / / PSE53 SMC 2 8 8 9 9 11 12 12 14 -1No.PS-OME0003CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety

8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR5000-OMN0001 / / / / 1 1 3) 3) 1 1 () 3 VFR5000-OMN0001 VFR5000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10 1 1) M5 1/6~1/4 1~1.5Nm ) ( ) 2 Rc Nm Rc 1/8 7~9