PF2A7H.eng

Accumulated output mode Excessive accumulated flow Lower digits Exceeds the range of the 2nd. turn of flow indication. ft3x106 ft3x103 m3x103 m3 m3 ft3 L/min L CFM ft3x106 ft3x103 m3x103 m3 m3 ft3 L/min L CFM ANR OUT ANR OUT Time Do not touch the terminals and connectors while the power is on.

SI unit for EtherNet/IP TM

L L L L L L L L L L L L: Low fixed (0) Input status area Input status area specifications Item Status State 0 Normal SOLV State of power supply for solenoid valve 1 Abnormal (19 V or less) Output area mapping For EX260-SEN1/-SEN2 Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 For EX260-SEN3/-SEN4

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

PFMB.eng

[L/min] PF-OMP0003-A

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

MHR3-10R/MDHR3-10 MHR3-15R/MDHR3-15 0.6 L L L L 0.6 Pressure ( MPa) Pressure ( MPa) 0.5 0.5 Gripping point 0.4 L: Distance to the gripping point 0.4 Internal grip 0.3 0.3 0.2 0 10 20 30 40 50 0.15 0.2 0 10 20 30 40 50 Gripping point L (mm) Gripping point L (mm) Gripping point Effective Gripping Force Guidelines for the selection of the gripper with respect to workpiece mass Selection of

SI unit for EtherNet/IP TM

L L L SOLV L L L L L L L L L L L L: Low fixed (0) Input status area Input status area specifications Item Status State 0 Normal SOLV State of power supply for solenoid valve 1 Abnormal (19 V or less) Output area mapping Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 -45No.EX-OMX1001 Dimensions -46No.EX-OMX1001

Process Pump <Fluororesin Type> Series PA3000

0.2 0.2 0.3MPa 0.3MPa 0.1 0.1 0.1 0.2MPa 0.2MPa 0.2MPa 00 5 10 00 5 10 00 5 10 15 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) PAP3313-T11: Flow rate characteristics (10Hz)* PAP3310-T11: Air consumption PAP3313-T11: Air consumption 0.4 15 200 Air consumption (l/min [ANR]) Discharge flow rate (l/min) Discharge pressure (MPa) SUP = 0.5MPa SUP = 0.5MPa 0.4MPa 0.3 150 0.4MPa 10 0.4MPa

HRX-OM-W032

less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L]

“

NPN 1 output ISE30A-l01-N-ML Digital pressure PNP 1 output ISE30A-l01-P-ML NPN 1 output/ Voltage output ISE30A-l01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-l01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

Fieldbus system IO-Link Master Unit

power supply. 13 L+Control 6 Turn ON/OFF the L+ power supply.

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

40 50 100 200 300 400 1 5 4 MGG 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance : l (mm) Eccentric distance : l (mm) Stroke (mm) Stroke (mm) MGC l = 200 mm Graph l = 300 mm Graph v = 150 mm/s or less Graph v = 200 mm/s or less Graph MGF 20 300 300 MGZ 200 200 MGF100 MGF100 20 MGT 100 100 MGF100 MGF100 10 MGF100 MGF100 50 40 50 40 MGF63 MGF63 Load mass: m0 (kg) Load

Clean Regulator

0.10 0.2 0.05 0.05 0.1 10 0 5 15 20 25 0 0 1000 500 500 1000 1500 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 1000 500 10 5 0 15 20 25 500 1000 1500 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min 858 Clean

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 78.00000 lb

PFMV3.eng

PFMV505 0.5 L 0 to 0.5 [L/min] PFMV530F -3.0 to 3.0 [L/min] -3.0 L Sensor connector PFMV510F -1.0 L -1.0 to 1.0 [L/min] WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury.

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

ND hole H10 L l t t l t t m m R1 m m d Dd9 d Dd9 12 + 0.2 0 0.1 0.3 NX A1 U1 L1 7 12 Material: Stainless steel 304 Material: Pin and retaining ring both stainless steel 304 Material: Pin and retaining ring both stainless steel 304 Part no.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

L M L CXTM L Series Action Double acting/Single rod Double acting CY1B: 6 10, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASS AS1001FG AS2001FG AS2051FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations AS3001FG AS4001FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle

Guide Table Series MGF ø40, ø63, ø100 1

40 50 40 DMGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 -X 20 20 MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph

PFMC.eng

Only air, N2, are applicable. [ 25] 25 L/min (PFMC7501) End stop position Set value [P_1] [ H_1] Hysteresis of OUT1 [ 50] 50 L/min (PFMC7102) Hysteresis [H_1] 225o [ 100] 100 L/min (PFMC7202) Flow [L/min] Do not use the product in a place where static electricity is a problem.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

pressure: 0.5 MPa 10 20 50 0.15 0.3 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 40 0.6 0.1 0.2 30 0.4 5 10 20 0.05 0.1 0.2 10 0 0 0 0 0 10 20 5 10 5 10 0 Number of needle rotations Number of needle rotations Number of needle rotations 15-9-62 7 Speed Controller for Low Speed Operation Standard Type