Multistage Ejector

ZL-OM00801 Circuit Diagram ZL112 ZL112-K1*-D*** A ZL112-K2*-D*** A ZL212 22 - Doc. no. ZL-OM00801 Weight 23 - Doc. no. ZL-OM00801 Exhaust Characteristics and Flow Characteristics of Ejector 24 - Doc. no.

60

ECN DESCRIPTION DATE BY APP IN9001 1 A UPDATED SPLITTER DIMENSIONS 3/16/2011 JH MB A A 60 300 200 B B MALE M12 MALE M12 1 FEMALE M12 BRANCH B BRANCH A C C +24VDC +24VDC 1 ITV Branch A to AO Channel 1 ITV INPUT SIGNAL 0-10VDC 0-10VDC 2 2 0VDC 0VDC 3 3 N/C 1-5 VDC 4 4 D D N/C ITV MONITOR OUT 1 Branch B to AI Channel 2 3 JUMPER 4 1 UIUSP-C01-DUP00011 ITV TO EX600 AMB CUSTOM CABLE 1 ITEM NO PART

In-line Air Filter

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

VFN2120N-5B-02N-X36 NAMUR Solenoid Valve Rotary Actuator Configuration

side Voltage 3 110VDC 5 24VDC Manual override B Locking type (Tool required) Thread type N NPT Thread size 02 1/4 Specifications 5-way solenoid valve configuration (for Double acting actuator ) Fluid Air or inert gas Reverse function Normal function Working pressure range 21.8psi to 130psi (0.15 to 0.9 MPa) D-TYPE B-TYPE Ambient & Fluid Temperature 14F to 140F (10C to +60C) Lubrication Not

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

IDX-OM-W095

A E D G F C P J M N H K O L mm A B C D E F G H J K L M N O P IDFC60 R1 307 745 605 161 405 681 71 330 704 355 126 94 46 12.5 IDFC70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFC80 R2 438 957 863 169 480 958 219 78 100 11.0 463 916 485 170 IDFC90 13 mm IDFC80 IDFC90 IDFC60 745 957 () () 704 916 () 355 () 330 485 463 IDFC70 890 () 849 () 390 365 IDFC60/70/80/90 Series 7-3 IDX-OM-W095

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90