SMC Corporation of America
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Retainer prevents accidental loss of needle. 5 to 60C (No freezing) Ambient and fluid temperature Round lock nut With seal, Round lock nut, Nickel plated Option Weight (g) 181 106 64 29 10 6 3 Flow rate L/min (ANR) 105 230 460 920 1700 20 Controlled flow Free flow Sonic conductance dm 3/(sbar) 0.32 0.7 1.4 2.8 5.2 0.06 Critical pressure ratio Controlled flow 0.2 0.25 0.3 0.25 0.25 0.2 Free

Unit: N During unclamping (Extension end) 80 to 100 (9010) L type During unclamping (Extension end) Bore size (mm) Rod size (mm) Operating direction Piston area (cm2) 0.8 1.1 1.5 2 2 3 3.7 4.9 6 8 10.5 12.5 16.5 19.6 28 31.2 80 to 100 (9010) R type 0.3 24 33 45 60 60.8 90.2 112 149 182 243 319 380 502 596 851 948 0.5 40 55 75 100 100 149 185 245 300 400 525 625 825 980 1400 1560 0.7 56 77 105

13 11 84 25 38 80 60 MGP 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 32 46 95 70 75, 100 125, 150 200, 250 300 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 32 50 105 80 MGQ 70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 38 60 125 95 45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore (mm) Z Y X W WH W V U T S R Q O P MGC 20 25 32 40 50 140

(Different surfaces, Same surface), With 1 pc. 105 15 110 115 15 + 40(n 2) 2 (n = 4, 8, 12, 16) 105 + 40(n 4) 2 110 + 40(n 4) 2 115 + 40(n 4) 2 With n pcs. (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) With 2 pcs.

I.D. 427 TU0425-100-X3 TU0604-100-X3 TU0805-100-X3 TU1065-100-X3 TU1208-100-X3 4 6 8 10 12 2.5 4 5 6.5 8 285 Max. operating pressure 142 0 4 32 70 105 140 10Clean Series Operating temperature F Only available in 20m rolls.

Analog The analog span point (5 V (10 V), 20 mA) can be changed within 10 to 105% of the rated flow rate with respect to the displayed value.

Switch Pressure range 100 kPa 0 100 kPa 500 kPa 1 MPa 2 MPa For vacuum pressure ZSE20C 101 kPa 0 105 kPa 10 kPa For compound pressure ZSE20CF 100 kPa 100 kPa 105 kPa 105 kPa 1 MPa 100 kPa ISE20C 105 kPa (0.105 MPa) 1.05 MPa For positive pressure 2 MPa 100 kPa ISE20CH 105 kPa (0.105 MPa) 2.1 MPa Rated pressure range of the switch Set pressure range of the switch Functions Sub screen setting

L x 105 L 105 105 -50 -50 x 110 L x 110 L 110 110 -75 -75 x 135 L x 135 L 135 135 -100 -100 x 160 L x 160 L 160 160 Material: Chromium molybdenum steel Surface treatment: Nickel plated 3 Series CQU Allowable Kinetic Energy Operating pressure: 0.5 MPa 100.0 10.0 Load mass [kg] 40 32 25 20 1.0 0.1 10 100 1000 Maximum speed [mm/s] Allowable Rod End Lateral Load Eccentric distance Stroke 100.0

(Refer to page 403 for details of the MK2T series.) 12, 16 20, 25 103 101 MK 102 (MK2T) Allowable moment of inertia [kgm2] Allowable moment of inertia [kgm2] 104 MK 103 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 (MK2T) MK (MK2T) Allowable

Pressure range Switch 100 kPa 0 100 kPa 500 kPa 1 MPa For vacuum pressure ZSE10 0 101 kPa 105 kPa 10 kPa For compound pressure 100 kPa 100 kPa ZSE10F 105 kPa 105 kPa For positive pressure 100 kPa 1 MPa ISE10 105 kPa (0.105 MPa) 1.05 MPa Rated pressure range of switch Set pressure range of switch Back page 4 Revision history Acquisition of UL standards.

with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159(172.5) 159(172.5) 118 (135) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) 158.7 158.7 6-Rc 3/4 1(P), 5(R1), 3(R2) port 6-Rc 3/4 1(P), 5(R1), 3(R2) port 2-G1 (Electrical entry) 47.5 12 21 47.5 R2 R1 36 PE 21 4.4

(Different surfaces, Same surface), With 1 pc. 15 105 110 115 With n pcs. 15 + 40 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 105 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 115 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) With 2 pcs.

port Manual override (Non-locking) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 x 2-18 mouting hole Applicable flange Pilot port Rc A Model L K J H F E D C B VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40 50 278 293.5 317.5 310.5 326 350 12 12 14 36 42 54 100 105

105 120 125 130 1, 2 F5NTL 15 + 55 (n 2)/2 25 + 55 (n 2)/2 100 + 55 (n 4)/2 105 + 55 (n 4)/2 105 + 55 (n 4)/2 120 + 55 (n 4)/2 125 + 55 (n 4)/2 130 + 55 (n 4)/2 n n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 10 10 60 65 65 75 80 85 1 100 100 90 95 95 100 105 110 2 (Same side) A3 2 (Different sides

O-ring NBR 18 O-ring NBR 19 O-ring NBR 20 O-ring NBR 21 O-ring NBR 22 O-ring NBR 57 Lock-Up Valve Series IL201/211/220 Positioners Regulators Relays/Valves Electro-Pneumatic Transducers Actuators Detection Conversion Unit Solenoid Valves Air Preparation Equipment Industrial Filters Piping Materials Dimensions IL201 14.5 Panel fitting dimension Panel 35 58 45 Max. 4 2 x 6.6 2 10 62 21 5 105

Drivers for LJ1, LG1, LX Dimensions 5.2 Driver 150 168 160 5.2 20 A 105 3 Driver dimensions For LJ1, LG1 Driver input/output signal list (CN-1/F connector) Signal description Control signal power supply Servo ON input Alarm clear input Counter clear input Gain switching input Pin no. 12 13 14 19 20 21 22 23 24 25 26 Symbol IM COM GND OZ+ OZ CZ CW+ CW CCW+ CCW FG Signal description Torque

I t al (Silicon) Low Temperatufe L Porl Connection NIL PT Thr6ad PF Parallel Pip Thread t l{PT Amarican National Standard Pioe Thread Acceesoris t l{ll Standard Lever Control Lengrth (0.25 to 3.35 inches) (6lo 85mm) D High Pressure Signal Spring K 1/2 Split Range Spring E Longsr Lever Control Length (2.35 to 4.33 inchss) (60 lo 11omm) F Longer Levsr Conlrol Lengnh (4.13 to 5.91 inches) (105

Nylon Urethane L1 L2 M 1 4 1 4 3 8 3 8 3 8 KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 2.6 32 36 42 79 105 2.6 6.8 16.2 25.6 35.4 M12 1 M14 1 M16 1 M20 1 M22 1 40.5 42.7 49.4 53.9 56.1 14 17 19 24 27 17 17 19 22 24 14.7 14.7 15 14.2 13.7 13 15 17 21 23 18 19 21.5 24 25.5 6.8 13.1 20.4 30.4 Straight: KCH Applicable tube O.D.

Left IN1(P) Piping VHS500-06 VHS501-06 VHS400-04 VHS401-04 VHS400-03 VHS401-03 VHS400-02 VHS401-02 Right IN1(P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2)(CV) Weight (kg) 93(5.22) 57(3.20) 35(1.97) 21(1.18) 105(5.90) 76(4.27) 54(3.03) 35(1.97) 0.29 1(P)2(A) 2(A)3(R) 0.34 0.25 0.27 Left or right to the front face of the handle.

04S KXH12-03S KXH12-04S 11 13 39 35 8 16 10.4 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 17 15 12.8 38 39 42 43 44 1 8 1 4 1 8 20 26 28 34 42 68 76 94 88 14 4 10.4 10.4 8 17 18 18.5 15.2 1 4 6 26.1 18.0 3 8 1 4 52 18.5 23.5 21 10 3 8 1 2 3 8 1 2 7 22 36.3 29.5 53 54 55 24 20.9 22 26 8 12 46.1 46.1 105