Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes 6 8 10 12 Flow rate l/min (ANR) Controlled 100 180 230 260 390 460 660 790 920 1580 1710 (free) flow Effective area mm 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Note) Flow rate values are at a pressure of 0.5MPa, and temperature of 20C.

End Lock Cylinder Series CBJ2

2.3 9 6 33 21 0 -0.3 18.3 9.5 42 15 55.5 + Stroke 28 83.5 + Stroke 2-5.5 Mounting hole With rear end lock / CBJ2L16-HN Piping port 2-M5 x 0.8 6 8 8 Cover side (front side) 2-M10 x 1 5 20 M5 x 0.8 19.8 23 25 14 2.3 9 6 33 0 -0.3 18.3 12.5 12.5 15 42 28 8 50 + Stroke 86 + Stroke 2-5.5 Mounting hole 5 Series CBJ2 Dimensions Double clevis With front end lock / CBJ2D16-RN +0.030 5H9 0 Clevis

Dedicated Controller Series LC1 Uniaxial Type

Control terminal list 14 GND SET-UP 2 Content Terminal Pin No. Description RUN 15 +24V Common The positive common of the input terminal. (1,14) HOLD 3 (2) Starting preparation The terminal which performs setup operations (actuator starting preparation). SET-UP STOP 16 ALARM RESET 4 The terminal which performs program start.

Slide Tables MX Series

N347 Slide Tables MXH, MXS, MXQ, MXF, MXW, MXP MX Series Integrated Cylinder and Guide Bearing 6 Styles Multiple Mounting and Porting Configurations Bore Sizes from 6mm to 25mm Wide Range of Options Q Q Table of Contents Q Q Q MX Series Features .pages 4-5 Q Safety Instructions . pages 6-22 MXH .pages 9-11 MXS.pages 12-14 MXQ.pages 15-17 MXF .page 18 MXW.page 19 MXP.pages 20-21

Electro-Pneumatic Valve NVEP/NVEF Series

. + l% against DU22-26V (14 F.S.) Currer Stability forTmp. Fluct. l\,lax. +1% @ 79'F (25'C) {1A F.S.) Max. +2% @ 79'F (25'C) (1A F.S.) vEA 250 vEA 251 vEA 252 Cperating Temp.

Digital Flow Switch Series PFA For Air Series PFW For Water

Table 1 Display Real-time flow rate l/min Accumulated flow l, m, m x 10 ft, ft x 10, ft x 10 CFM Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min, or l, m or m x 10)]. 14 For Air Digital Flow Switch Series PFA 4. Output Specification Selection Mode For For Flow rate setting SET SET Press the SET button.

Electro-Pneumatic Regulator IT1000/2000/4000

(Note) Gauge port RC(PT)1/8, Pre6sur g6uge, 14{1.0}, 28{2.0}, 72{5.1), 100{7.1}, 145{10.2) How to Order Model t x#l r*m ? Electrlcal connectlon ?

5 Port Solenoid Valve Series SQ1000/2000

,C8 A, B port Dimensions Formulae L1 = 17.5n + 52 L2 = 17.5n + 74.5 n: Stations (max. 16 stations) L n 1 69.5 92 112.5 123 2 87 109.5 137.5 148 3 104.5 127 150 160.5 4 122 144.5 175 185.5 5 139.5 162 187.5 198 6 157 179.5 200 210.5 7 174.5 197 225 235.5 8 192 214.5 237.5 248 9 209.5 232 262.5 273 10 227 249.5 275 285.5 11 244.5 267 287.5 298 12 262 284.5 312.5 323 13 279.5 302 325 335.5 14

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Dimensions Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 10 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 5

Multistage Ejector Series ZL

Vacuum sensor unit 5 Nozzle 6 Diffuser 7 Detent plug P397110 Other than vacuum switch 8 Lead wire cover P397176 Vacuum switch specifications Front cover B With valve 12 Valve plate With valve 13 Needle With valve 14 Supply valve (N.C.) With valve SYJ514 15 Release valve (N.C.)

AC Servo Motor Driver (Parameter Configuration using Setup software (SigmaWin+ TM ))

Refer to " LECY operation manual (Simplified Edition) for details of parameters recommended value of each actuator. 3 4 14 - 4.4 Saving Parameters (Online) Saving parameters has done in Online or Offline. 1. From the menu bar, click Parameters(U)-Edit Parameters(U). The Parameter editing window will be displayed. 2. Click the button to save of the "Parameter Editing" window.

IDX-OM-W029

Series 1-1 1 2 IDX-OM-W029 1 IDU55E,75E OUT IN (ONOFF ) (EVAPORATING TEMP) 5-2 5-2 (6 ) AC200V AC230V L1 L2 L3 PE L N PE M3 6.5mm 1.25mm M3 6.5mm 1.25mm 2 2 IDU Series 1-1 1 3 IDX-OM-W029 1 () IDU Series 1-1 1 4 IDX-OM-W029 2 2 2-1 IDU22E75E 90170kg 2-2 2 2 1 2000m 240 050 600 mm 600 mm 600 mm 600 mm 600 mm ( ) IDU Series 2-1 2 1 IDX-OM-W029 2 2 2 2 6 6-3 IDF-AB501 14

IDX-OM-W095

IDX-OM-W095 1.3 HFC 1-4 IDFC60/70/80/90 Series 1-5 IDX-OM-W095 1.4 / 1 1.5 () IDFC60/70/80/90 Series 1-6 IDX-OM-W095 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFC60/70/80/90 Series 2-1 IDX-OM-W095 () IDFC60/70/80/90 Series 2-2 IDX-OM-W095 3 3.1 50kg IDFC60/70/80/90 Series 3-1 IDX-OM-W095 3.2 3.2.1 (85%) 2045 050 () 2000m 600 mm 600 mm 600 mm 600 mm 600 mm 3.2.2 7 7.3 IDF-AB500 14

Pressure Relief 3 Port Valve with Locking Holes

How to Order added *2 and *3. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

IR30-OM00013

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

VBA-OM-S001

OUT port Mounting VBA1: Tightening torque of 12 to 14 Nm (R1/4) VBA2: Tightening torque of 22 to 24 Nm (R3/8) Drain port Rc1/4 (4) O-ring : Mount the O-ring in the groove on the joint of the tank at the back of the booster regulator.

PSxx-OMQ0004E

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2013-2018 SMC Corporation All Rights Reserved PS-OMQ0004-B

ISA3-IOLink.eng

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 SET 2 secs. Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved PS-OMW0010

SY3000V-OMY0001

32V 3 3 A B , 10 No.SY3000V-OMY0001 SY series DIN a b DIN DIN DIN 25 2 610 3 1115 4 1620 5 2124 6 DIN DIN DIN A B a b 5 D PC 1 D (IP40) PC FREE LOCK LOCK FREE 11 No.SY3000V-OMY0001 SY series AB 4(A),2(B),1(P),3/5(E) 12 No.SY3000V-OMY0001 SY series 1) 0.1mm 2) 0.1mm 3) +0.15mm 0.2mm 1) TK-123 , 2) 13 No.SY3000V-OMY0001 SY series SY : KQ2H, KQ2S KJH, KJS 14

VQZ100V-OMT0001

16 No.VQZ100V-OMT0001 Revision history TW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved No.VQZ100V-OMT0001