SMC Corporation of America
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(Tightening torque: 0.7 to 0.8 Nm) (2) Mount the end plate bracket (EX600-ZMA2) to the end plate using 2-M4 x 14 screws.

IODD file 14 Data Storage 14 Parameter data 14 Output number layout / Process data 23 Input number layout / Process data 26 Troubleshooting and Maintenance 27 Specification 32 Specifications 32 Dimensions 34 -1No.EX-OMW0016-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

(Tightening torque: 0.7 to 0.8 Nm) (2) Mount the end plate bracket (EX600-ZMA2) to the end plate using 2-M4 x 14 screws.

M12-anchor bolts (4 pcs.) are required. (27.2[inch]) 692 Anchor bolt (4-14) Anti-seismic bracket (optional) Top Anti-seismic bracket (optional) Anchor bolt (4-14) Top Front Figure 8-9 Anchor Bolt Mounting Position HRW Series 8.6 Anchor Bolt Mounting Position 8-13 HRX-OM-K003 Chapter 8 Appendix 8.7 Compliance This system conforms to the following standards.

E J J 16 22 A A (C) C (C) C 14 2 x H 2 x H Port size Port size 2 x 5.3 2 x 5.3 Mounting hole Mounting hole Width across flats 27 Width across flats 27 14 34 14 34 2 x 5.5 Mounting hole 42 42 B B DIN terminal: D Conduit terminal: T 23 23 (E) G1/2 Cable 6 to 12 K I F I F 34 K D 32 J Width across flats G Width across flats G (E) 14 25 31.5 (44) E E 14 J (L) A (C) C A 2 x H Port size E (E) G1

Refer to pages 14-21-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 8 for Precautions on every series. Selection Piping Warning Warning AD402 AD600 1.

Double clevis pin made of stainless steel Double clevis type Knuckle Joint Pin Y XC27 12A , 14A , 16A Double knuckle joint pin made of stainless steel Double knuckle joint IY XC27 12 , 14 , 16 Mounting as the same as standard size.

40 82 75 14 71.5 64.5 8 11 13 16 52 M8 x 1.25 69 5 14 10, 15, 20, 25 50, 75, 100 50 83.5 75.5 14 73.5 65.5 10.5 10.5 15 20 64 M10 x 1.5 86 7 17 63 85 77 15.5 79 71 10.5 15 15 20 77 M10 x 1.5 103 7 17 (mm) Bore size (mm) R W Z L M N O P 32 7 34 5.5 9 Rc 1/8 7 49.5 14 40 7 40 5.5 9 Rc 1/8 7 57 14 50 8 50 6.6 11 Rc 1/4 8 71 19 63 8 60 9 14 Rc 1/4 10.5 84 19 Series CBQ2 Dimensions Foot type

S Couplers Energy saving by pressure loss reduction increased by 39% increased by 39% increased by increased by 39% Thread R1/4 type Compared to the conventional model Cv factor reduced by 22% (20 N) reduced by 22% (20 N) reduced by reduced by 22% (20 N) Plug insertion force Compared to the conventional model at 0.5 MPa reduced by 14% (12 g) reduced by 14% (12 g) reduced by reduced by 14%

Using the equipment out of the specified range could cause the equipment to be damaged, malfunction, or operate improperly. 14-14-7 5 Air Preparation Equipment Precautions 3 Be sure to read before handling.

Guide rod type / LEYG Series . 14 3.1 Specification . 14 3.2 How to Order . 15 3.3 Construction . 16 4. Product Outline . 17 4.1 System construction . 17 5.

(between lead wire and case) Ambient temperature ... 10 to 60C (14 to 140F) Enclosure . IEC529 standard IP67, watertight (JISC0920) Weight Table Unit: g (oz.)

14 92 (102) 184 (199) 103 (113) 202.5(217.5) 114 (124) ( ): N.O. 17-3-52

Vacuum regulator 13-14-2 Series IRV 13-14-3 Controls the vacuum pressure in accordance with external electric signals.

14 92 (102) 184 (199) 103 (113) 202.5(217.5) 114 (124) ( ): N.O. 17-3-52

(between lead wire and case) Ambient temperature ... 10 to 60C (14 to 140F) Enclosure . IEC529 standard IP67, watertight (JISC0920) Weight Table Unit: g (oz.)

Please contact SMC. 3) 14 to 194F (10 to 90C) for Vespel seat. 4) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). 5) Tested with Helium gas inlet pressure 1000 psig (7 MPa). 6) On panel mount option, bonnet port is not threaded. 7) Mass, including individual boxed weight, may vary depending on connections or options.

IODD file 14 Data Storage 14 Service data 14 Output number layout / Process data 23 Input number layout / Process data 26 Troubleshooting and Maintenance 27 Specification 32 Specifications 32 Dimensions 34 -1No.EX-OMY0021 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Reed Auto Switch: D-A9 (mm) Stroke B A Stroke C Stroke Model 5 10 15 20 5 5 10 10 15 15 20 20 MXJ4 MXJ6 MXJ8 9 4 14 0.5 14 0.5 3 9 4 14 0.5 14 0.5 18 -0.5 10 5 25 0.5 9 4 14 -0.5 14 -0.5 25 0.5 Solid State Auto Switch, 2-Color Indication Solid State Auto Switch: D-M9, D-M9W (mm) Stroke B A Stroke C Stroke Model 20 15 10 5 20 15 10 5 15 20 10 5 MXJ4 MXJ6 MXJ8 4.5 4.5 18 18 8 13 7 3.5