Construction / Parts list, seal list Double acting/ Finger open Single acting / Normal open Single acting / Normal close Double acting / Finger close 5 4 12 7 1 9 10 8 16 15 14 3 2 21 11 18 19 13 20 6 17 Components No. Description Material Remarks Components 12 Needle roller High carbon chromium No.
Performance . 18 5-1. Installation distance and Discharge time (Discharge time of 1000V100V) . 18 5-2. Static neutralization range (Discharge time of 1000V100V) . 19 5-3. Pressure Flow characteristics . 20 6. Dimensions . 20 7. Specifications . 22 8.
Improper model selected 18 The number of connected products for which copying is possible is up to 10 pcs. Reduce the number to 10 pcs or less. Too many pressure switches connected Check the number of connected copy destination Pressure switches. Product failure Replace the product.
Note 2) Resistivity recovery: time taken to recover to 18 Mcm with ultrapure water. Note 3) See How to Order below for items represented by .
holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18
Tube size (mm) Dimension of coil (mm) No. of tubes Max. operating length (m) L D Part No. 210 18 1 52 2 35 3 22 1 54 2 27 3 17 1 41 TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 1.5 4 2.5 280 28 265 1 2 5 tubes/ case 1.5 1 2 325 24 6 4 37 305 330 31 8 5 Dimensions are changeable due to material.
For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2. Caution Light/Surge Voltage Suppressor Piping If supply port air pressure drops to less than 0.2 MPa, the valve may malfunction. In such a case, use external pilot type. (When throttling IN port, or operating with OUT port open to the atmosphere or in a similar operation.)
For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2. Operating pressure range 0 to 0.9 MPa 10 to 50C (No freezing. Refer to page 4-18-4.) Ambient and fluid temperature Response time 20 ms or less (at the pressure of 0.5 MPa) (1) Max. operating frequency 10 Hz Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)
Refer to page 4-18-4.) Ambient and fluid temperature Response time (1) 30 ms or less (at the pressure of 0.5 MPa) Max. operating frequency 10 Hz Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)
Refer to page 4-18-4.) Ambient and fluid temperature Max. operating frequency VFN VT325-D 5 Hz Response time (1) 30 ms or less (at the pressure of 0.5 MPa) Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)
Dimensions LLHAStations 4 x Mounting hole for W Y K A D E L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 U 3/8 Pitch = B 2 x P port n x A port (mm) Dimensions (mm) A G D E C U Y W V N K H2 H1 B Model LLH2A LLH3A LLH4A Station 5 4 3 2 Model 10 67 19 65 19 5.5 M4 34 27 18 87 85.5 31 46.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 19 76 27.5 94.5 27.5 6.5 M5 47
Output 18 Output ALARM Note 3) ALARM Note 3) 19 Load Load Output 19 Output Load Load 20 Output 20 Output AREA AREA FG Round terminal 0.5-5 FG Round terminal 0.5-5 Note 1) For pulse signal wiring method, refer to Detailed Pulse Signal Wiring.
Booster regulator IN port Rc 1/4 Tank IN port Rc 3/8 3 R 1/4 Tank OUT port Rc 3/8 33 10 20 18 8 60.5 (Fully closed) 366 65 (Fully closed) 8.7 3.5 Hexagon across flats19 Drain port 4-11 mounting hole 14-9-8 9 Air Tank VBAT05 to 38 Dimensions VBAT10, VBAT10S With booster regulator VBA1100/VBA1 connected. Tank IN port Rc 1/2 Booster regulator IN port Rc 1/4 F.R.L.
IS ZSM PF2 Pressure Sensor Controller IF Series PSE300 18 9.6 Data Response Time ms 20.8 Set Pressure Resolution Can be mounted in close proximity with each other either horizontally or vertically.
holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18
Flow (l/min (ANR)) MAX.20 MAX.50 MAX.75 Symbol 100 200 300 Tubing size Metric size JIS Symbol 08 8 Release button: Blue 10 3 16 05 101 201 301 401 ZFB101 ZFB101 ZFB201 ZFB301 ZFB401 " MAX.20 MAX.30 MAX.60 MAX.100 Metric size Release button: Red Element Part No. 1 4 07 " Applicable filter model Element size (mm) Part no. 3 8 1 2 11 13 " " ZFB100 ZFB101 ZFB200 ZFB201 ZFB300 ZFB301 ZFB401 18
Compatible Drivers Pulse input type /Positioning type Pulse input type CC-Link direct input type SSCNET III type Driver type LECSC Up to 255 CC-Link LECSS SSCNET III LECSA Up to 7 > LECSB > Series Number of point tables Pulse input Applicable network Incremental 17-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Control encoder USB communication External
Bar + High-voltage power supply module + Controller IZT 40 X14 34 D 1 6H R F IZT X14 42 34 D 1 6H R F Bar IZTB X14 40 34 D 1 6H R F Standard model no. e pages 17 and 18 Bar length Type 40 411 Standard Symbol 16 22 34 40 46 58 64 82 112 130 160 190 232 250 Length [mm] 160 220 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 42 Non-standard The bar of non-standard length is available.
PG: Flat ribbon cable (20 pins) PH: Flat ribbon cable (10 pins) SUP/EXH block (D side mounting) Note Up to 18 solenoids possible. Note Up to 8 solenoids possible. Symbol Stations 02 18 Symbol Stations 02 08 2 stations 18 stations 2 stations 8 stations SS5J3-60PD2-06D 1 set (Manifold part no.) SJ3160-5CU-C6 2 sets (Single solenoid part no.) SJ3260-5CU-C6 2 sets (Double solenoid part no.)
01 02 03 01B 02B Port size Side ported 1/8" Side ported 1/4" Side ported 3/8" Bottom ported 1/8" Bottom ported 1/4" Size 26 mm Size 18 mm R M Note) External pilot 18 mm and 26 mm sizes mixed Note) Refer to pages 27 and 28 for details of option M.