Exhaust Cleaner for Clean Rooms AMP Series 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.
(mm) 2.5 3 4 4.5 6 7.5 9 13 2.18 3.48 4.57 6.99 9.56 Black (B) White (W) Burst pressure (MPa) Red (R) Other than T00425, T0604 Blue (BU) Yellow (Y) Green (G) Nominal size (inch) Maximum operating pressure 5 32 " 5 16 " 1 4 3 8 " 3 16 " 1 8 " 1 2 " " Operating temperature (C) Air/Water Fluid Precautions Max. operating pressure (at 20C) 1.5 MPa Be sure to read before handling.
Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting
Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting
Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting
D RAI N 4 V Red 3 Com m uni cat i on connect or V Bl ack 1 5 CAN _H W hi t e 2 CAN _L Bl ue N ot e1) W i re col or w hen t he opt i on cabl e i s used.
Connection thread size Proper tightening torque[Nm] 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 Chamfered area for female thread By chamfering as shown in the following table, machining of threads is easier and effective for burr prevention.
5 KKA4 Series (KKA4P-02F+KKA4S-02F) 20 4 15 3 10 2 KKA3 Series (KKA3P-01F+KKA3S-01F) 5 1 KKA7 Series (KKA7P-06F+KKA7S-06F) 0 0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Pressure MPa Pressure MPa Plug: Without check valve Socket: With check valve Plug: Without check valve Socket: Without check valve 10 10 9 9 KKA6 Series (KKA6P-04M-1+KKA6S-04M-1)
Bracket (Option) AV R 1/8, 1/4 Dedicated mounting screw AU 22 14 (Hex. width across flats) (M4 x 0.7) M5 x 0.8 38 AF 2 26 2-4.5 600 8 AR (Lead wire length) 19 3 25 IR 5 9 8 5 VEX 36 1 3 22 22 AMR 3.2 ITV IC M5 type PT type 40 VBA VE SMC DIGITAL PRESSURE SENSOR ALM. SET 20 VY1 + G P.SET PPA AL 14-11-19
Bracket (Option) AV R 1/8, 1/4 Dedicated mounting screw AU 22 14 (Hex. width across flats) (M4 x 0.7) M5 x 0.8 38 AF 2 26 2-4.5 600 8 AR (Lead wire length) 19 3 25 IR 5 9 8 5 VEX 36 1 3 22 22 AMR 3.2 ITV IC M5 type PT type 40 VBA VE SMC DIGITAL PRESSURE SENSOR ALM. SET 20 VY1 + G P.SET PPA AL 14-11-19
JFA connector J4000 series SC02B-J42SK-GHXR 2 24 VDC (1000) 1 RS-485 BUS + 2 RS-232C RD 1 2 3 4 5 3 RS-232C SD 4 RUN/STOP signal input Alarm, RUN/STOP , Communication connector 5 SG 6 Output cutoff alarm (open when alarm occurs) 9 8 7 6 7 Common for output cutoff alarm D-sub 9 pin (socket type) Holding screw: M2.6 8 RUN/STOP signal input 9 RS-485 BUS 8 HEF Series Operation Display Panel
MPa 5 m Nominal filtration rating Drain capacity (cm3) 8 25 45 45 45 Drain guide port size 1/8 1/4 Construction Relieving type 10-: Fluorine grease 21-: Lithium soap based grease Grease 10-: Class 3 Cleanliness class (ISO class) 21-: Class 3 Options/Part No.
66 17 10 218 80 22 10 218 80 19 10 241 90 25 10 241 90 21 10 277 100 30 10 334 150 40 13 13 16 16 19 19 22 22 32 100 63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37
The 220 VAC and 230 VAC are interchangeable as well. *2 The allowable voltage fluctuation is 15% to +5% of the rated voltage for the 115 VAC or 230 VAC.
O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMH150 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122
Doc. no.VQ7-6-OMW0001 ISO Standard Solenoid Valve PRODUCT NAME VQ7-6/VQ7-8(-X23) Series MODEL / Series / Product Number *PIN assignment of -x23 is different from standard product Contents Safety Instructions -2 5 Port Solenoid Valve Precautions -4 VQ7-6/VQ7-8 Series Specific Product Precautions -7 Series VQ7-6 Single Unit How to order/Specification -9 Construction -11 Manifold VV71 Series
(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.
Parallel I/O Type: 6 (PNP), Mounting: 8 (DIN Rail), Cable Connector: 5 (5), Actuator: LEY, Type: G (Guide Rod), Body Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting: D (In-line), Lead: B (16: 5mm; 25: 6mm; 32, 40: 8mm), Stroke: 150mm
Length: 5 (5m), Controller Type - LEC, JXC: 1P (LECP1, PNP, Programless Type), I/O Cable Length for LEC: 5 (5m), Controller Mounting: D (DIN Rail)
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 400mm, Motor Option: B (w/Lock), Rod End Thread: M (Male), Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: C61 (JXC61, Parallel PNP, Step Data Input Type), I/O