MGP

80 80 100 100 Load weight m (kg) 50 50 50 50 40 40 30 30 20 20 10 50 100 200 10 10 50 100 200 10 46 Compact Guide Cylinder: Heavy Duty Guide Rod Type Series MGP Horizontal Mounting Slide Bearing MGPS50, 80 5 l = 50mm V = 200mm/s 6 l = 100mm V = 200mm/s 100 100 80 50 50 80 80 80 Load weight m (kg) Load weight m (kg) Load weight m (kg) Load weight m (kg) 40 40 30 30 50 50 50 20 20 50 10 10

Air Slide Table

23 58 135.5 4 2 103.5 118 MXQ16A-50Z 40 27 80 28 63 145.5 6 3 113.5 128 MXQ16A-75Z 46 23 58 52 80 34 88 176.5 6 3 144.5 159 MXQ16A-100Z 44 39 102 44 80 53 113 220.5 8 4 188.5 203 MXQ16A-125Z 44 20 127 44 80 53 138 245.5 10 5 213.5 228 35 Air Slide Table/Double-ported Type MXQA Series Dimensions: MXQ 16A [Adjuster Option] MXQ 16A-m With adjuster option (16) Double-ported type MXQA Metal

Smooth Cylinder/Low Speed Cylinder

Clevis pin and knuckle pin are common for bore size 80 and 100. (mm) RHC Applicable bore (mm) 20 25 32 40 50 63 80 100 TT TR Part no.

2

(C) Correction factor 1.21 1.10 1 0.87 0.76 0.74 0.72 0.70 IDG 5 to 30 35 40 45 50 55 60 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 45 50 55 60 65 70 75 80 5 to 45 50 55 60 65 70 75 80 Data B: Ambient Temperature Note) Series IDF IDF1E to 75E Series IDU IDU3E to IDU37E IDU55E, 75E IDF100F to 150F IDF190D to 240D Ambient temp.

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

24

80 80 80 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 10 32, 40 10 32, 40 25 25 5 5 20 20 Load mass m [kg] Load mass m [kg] 25 20 25 16 16 20 16 16 12 12 1 1 12 12 MGJ JMGP 0.1 10 30 50 51 100 300 200 0.1 10 30 50 51 100 300 200 MGP MGP Stroke [mm] Stroke [mm] MGPW MGQ (15) L = 50 mm, V = 400 mm/s (16) L = 100 mm, V = 400 mm/s 50 50 MGG 100 100 100 100 80 80 MGC 80 80 63 63 MGF 50, 63 50, 63

MG

distance l (mm) (3) 50 Stroke or Less, V = 400 mm/s (4) Over 50 Stroke, V = 400 mm/s 300 300 200 200 80 80 100 100 Load weight m (kg) Load weight m (kg) 50 50 50 50 40 40 30 30 20 20 10 50 100 200 10 10 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) 8-19-52 MGPS50/80 (5) l = 50 mm, V = 200 mm/s (6) l = 100 mm, V = 200 mm/s 100 80 50 80 80 80 40 Load weight m (kg) 30 50

smcmaintenancepartslist

For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

Cylinder with Lock

80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 Load mass m [kg] Load mass m [kg] 63 63 50 50 40 40 50 50 32 32 32 32 10 10 1 100 500 400 300 200 1000 1 100 500 1000 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph n Graph c 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m

JIS Standard Hydraulic Cylinder

0.064 50 50 46 40 M24 x 1.5 35 32 28 11 24 65 231 22.4 M20 x 1.5 30 27 9 19 60 226 0 0.35 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 257 28 M24 x 1.5 35 32 11 24 70 247 0.030 0.076 0.050 0.112 80 80 65 55 M39 x 1.5 60 57 45 15 41 95 295 35.5 M30 x 1.5 45 42 13 30 80 280 0.030 0.076 0.036 0.090 0 0.4 100 100 80 65 M48 x 1.5 75 72 56 16 50 115 325 45 M39 x 1.5 60 57 15 41 100 310 374 CH2E/CH2F

Table of Contents

, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

10

Bore size [mm] B TA TL TU TC TX TE TO TR TT TS TH TF Z TDH10 Bore size [mm] Z MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12+0.070 0 32 92 40 96 50 109 63 109 80 134 100 134 125 163 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 105 20+0.084 0 80 95 100 70 15

Electric Actuators

P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

1

32 13.5 14.5 C76 50 165 67 19 80 37 15 16.5 63 165 67 19 100 44 16.5 17.5 C85 80 199 81 25 The above diagram shows head side lock type and manual releasing non-lock type.

MB

B TA TL TU TC TX TE TO TT TR TS TH TF TDH10 MB-S03 32 40 50 63 80 100 125 32 40 50 63 80 100 125 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.084 0 47 60 60 80 80 100 115 46 52 65 75 95 114 136 45 60 60 70 70 90 105 8.5 10 10 15 15 15 18.5 62 80 92 110 130 158 186 50 63 75 90 110 132 160 74 97 109 130 150 184 212 12 17 17 20 20 26 26 13 17 17 22 22 24 24 10 12 12 14 14 17 25 35

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

ZP

Product specifications Pad diameter Mounting thread size Buffer body material Brass Steel Brass Steel Brass Steel Nut tightening torque ZP2-F (40/50) H ZP2-F (40/50) HB M18 x 1.5 28 to 32 Nm 48 to 52 Nm 45 to 50 Nm 75 to 80 Nm 45 to 50 Nm 75 to 80 Nm JB JF JB JF JB JF 40, 50 ZP2-F (63/80) H ZP2-F (63/80) HB ZP2-F (100/125) H ZP2-F (100/125) HB 63, 80 M22 x 1.5 100, 125 M22 x 1.5 Time of

NCG/CG1

bore size 80 and 100.

Table of Contents

80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 1.3 0.3 0.3 0.1 0.1 1.3 80 80 1.3 0.7 0.7 0.2 0.2 0.1 0.1 Refer to page 303 for acceleration time. 213

Tie-rod Type Hydraulic Cylinder

80 60 22.4 30 17 17 M10 x 1.5 22 12 25 M18 x 1.5 30 80 80 26 65 13 65 212 12 75 115 M12 x 1.75 32 8 100 100 75 28 32 22 20 26 14 29 M22 x 1.5 35 90 100 34 80 13 80 234 14 90 139 M27 x 2 M12 x 1.75 38 6.5 118 118 90 35.5 35 27 19 27 14 34 35 100 125 34 80 15 100 250 16 112 170 M14 x 2 M27 x 2 38 6.5 140 140 112 35.5 35 27 19 27 16 34 35 100 160 43 100 17 110 279 18 140 197 M16 x 2 M33 x 2