0.4

Example: -BKN Refer to pages 95 to 99 and 105 to 107 for manifold option parts.

7

Valve Leakage Rate Fluid and Ambient Temperature Internal Leakage Seal material Leakage rate (Water) Note) Fluid temperature (C) Ambient temperature (C) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 1 to 99 20 to 60 EPDM 0.2 cm3/min or less 1 cm3/min or less Note) No freezing External Leakage Seal material Leakage rate (Water) Note) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 0.1

CQS

Stroke range Stroke range Bore size Bore size Long stroke 31 to 99 31 to 99 12, 16 12, 16 Stroke range 51 to 199 51 to 199 20 20 51 to 299 51 to 299 25 25 Part no.: CQSB25-47D-XB10 Makes 47 stroke tube. B dimension is 69.5 mm. Part no.: CQSB25-47D CQSB25-50D with 3 mm width spacer inside. B dimension is 72.5 mm.

AC Servo Motor Driver (Pulse input type/Positioning type)

The step No. of program which is being performed is displayed. 0 to 120 18 Settling time The settling time is displayed. 0 to 999 ms 19 Oscillation detection frequency The frequency at oscillation detection is displayed. 100 to 4500 Hz 20 Tough drive times The times moving to the tough drive are displayed. 0 to 99 times 79 - 6.

VQ4000

Note 3) When two or more symbols are specified, indicate them alphabetically. 2-5-27 Base Mounted 28 Series VQ4000 Kit (Serial transmission unit) for I/O S 23 75.5 Mounting hole for 2-M5 8 61.5 143 10 1.6 14.5 99 32 U side 8 (128.5) L2 (In the case of DI unit, 1pc: 8 number of inputs) Min. 0 to max 4 unit (0 to 216 mm) DI unit 54 SI unit P = 25 44 n B A 8 2 4 B A C12: One-touch fitting for

3

VXA Fluid and Ambient Temperature Valve Leakage Rate Internal Leakage Fluid Temperature (C) Ambient temperature (C) Steam 183 or less 20 to 60 Heated water 99 or less Fluid Seal material Leakage rate Note 1) 2) Steam FKM 1 cm3/min or less Note 3) Heated water 0.1 cm3/min or less Note 1) Leakage is the value at ambient temperature 20C.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Station (Max. 20 stations) Dimensions L n 2 49 61 87.5 98 19 372 384 412.5 423 20 391 403 425 435.5 14 277 289 312.5 323 15 296 308 337.5 348 16 315 327 350 360.5 17 334 346 375 385.5 18 353 365 387.5 398 11 220 232 262.5 273 12 237 251 275 285.5 13 258 270 300 310.5 6 125 137 162.5 173 7 144 156 187.5 198 8 163 175 200 210.5 9 182 194 225 235.5 10 201 213 237.5 248 3 68 80 100 110.5 4 87 99

Process Pump

Proof pressure Port size (Nominal size B) Weight (kg) 1/8, 1/4 1/4, 3/8 Ambient and fluid temperature 5 to 60C 0.38 0.55 Dehumidification rate 99% Note) Maximum flow rate at pressure 0.7 MPa When 2 years passed, or pressure drop reaches 0.1 MPa Element service life Refer to Best Pneumatics No. 5 for further details. Note) With auto drain is 0.15 MPa.

Multi Channel Pressure Sensor Controller

When 1 digit = 1 kPa, the pressure is given with an increment of 1 kPa, e.g., 1, 2, 3, , 99, 100. Digit (Min. setting unit) E One of the switch output types, and means the operation in which a switch is turned on when pressure equal to the switch output set value or less is detected.

PROFIBUS DP Compatible Fieldbus System

(Tightening torque: 0.6Nm) SW3 SW2 SW1 Address 1 2 0 0 0 0 1 1 0 0 2 2 N.C. 9 9 99 0 0 100 0 1 101 1 2 5 125 Bus terminator switch ( SW4 ) This switch can set the bus terminator. -19No.EX##-OMO0019 Configuration In order to configure the GW unit in the PROFIBUS DP network, the appropriate device master file (GSD file) for the GW unit will be required.

Digital Pressure Switch

When 1 digit = 1 kPa, the pressure is given with an increment of 1 kPa, e.g., 1, 2, 3, , Digit (min. setting unit) 99, 100. F Fine adjustment mode See "Fine adjustment of indicated value". Abbreviation of full span or full scale which means the max. fluctuation range. For example, when the pressure range is 0 to 1[MPa], the F.S. will be 0-0 = 1[MPa]. F.S.

Low Friction Cylinders Series MQ

38 33.5 48 8 5 M LY 16 58.5 3.2 48 42 62 9.2 5.8 LH 20 64 3.2 52 46 66 10.7 5.8 25 68.5 3.2 57 57 71 11.2 5.8 X X LG Y Y 4 x LD LT 30 88 3.2 64 64 78 11.2 7 LS + Stroke LX 40 81 3.2 79 78 95 14.7 8 A + Stroke LZ (mm) Bore size (mm) Stroke range (mm) A B FD FT FV FX Rod side flange type: MQQLF 10, 16, 20 10 10 to 40 61.5 79.5 4.5 5.5 30 45 16 10 to 60 70.5 90.5 6.6 8 39 48 20 10 to 60 79 99

High Purity Chemical Valve

PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13 19 110.5 112.5 37 26 37 Rc 1/4, 3/8, NPT 1/4, 3/8 M6 x 1 46 60 99

Cylinder with Lock Series CNG

26 16 25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB M5 x 0.8 141 (149) 88 5.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 M6 x 0.75 151 (159) 98 6 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M8 x 1.0 154 (162) 99

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

VQ 03: A/B port Rc 3/8 4 Round head combination screw Gasket M3 x 42 (Flat nickel plated) VQ4 5 Specify the number of stations inside in the part number. 6 Tension bolt SY9000-23VQ5 SY9000-25-1 Hexagon nut 7 Cover Lead wire 8 DIN rail VZ1000-11-4Refer to page 1.2-99. VQZ Specify the number of stations (4 to 12) inside in the part number.

REA/REB

MK(2) 25 to 40 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model RS Q G D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) RS H A 25 18 99 43 74 74 99 43 18 32 RZQ 21.5 46.5 46.5 83.5 83.5 108.5 108.5 21.5 40 23.5 48.5 48.5 99.5 99.5 124.5 124.5 23.5 MI W S Operating Range CEP1 Bore size (mm) Auto switch model

JXCx-OMT0023

Stroke limit warning (99. ) selection 0: Valid 1: Invalid When this parameter is se t to "1", the st roke limit warning (99. ) will not occur even if the forward rotation stroke end (LSP) or reverse rotation stroke end (LSN) turns OFF.

MY1

For MY1M50, 63 Work piece EY SMC EC a FH a 5 4.5 6 4 9 9.5 W 58 70 88 104 128 152 TT 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 7 12 15 15 25 25 S 46.7 67.3 73.2 73.2 99 99 h 3.5 4.5 5.5 5.5 11 11 FW 66 82 95 FH 16 22 22 FC 14 17 22 22 30 35 FB 52 67 78 F 5 6 8 8 8 8 EY 50 57.5 73 87 115 138.5 EC 7.7 9 11.5 12 18.5 19 EB 32 38 50 57 66 77 E 20 24

Basic Type/Direct Mount Type

Note 4) D-Z7 and D-Y types cannot be mounted. 25 to 63 (mm) Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA A B C D D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-A9 D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-A9 Bore size (mm) 25 32 40 50 63 19 23 18 98 94 99 42 38 43 75 79 74 22.5 26.5

CNG

800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99