Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Load voltage 24 VDC,100 VAC 24 VDC (10 to 28V) 28 VDC or less Load current range Indicator light 5 to 40mA, 5 to 20mA 5 to 40mA 40mA or less D-Z73 D-Y59B D-Y59A Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment 2-wire type 3-wire type Solid

Precision Regulator

Note 5) Not applicable to both high and low temperature environments.

Soft Start-up Valve

to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/4 128 59 53 74 53 Width across flats 36 52 AV5000-m06, 10-5 to 6G(Z)m-A Model [mm] Optional specifications With bracket With

Fluoropolymer Tubing Variations

32" 1/4" 6.35 5/32" 3.95 TILM11 3/8" x 1/4" 3/8" 9.53 1/4" 6.33 TILM13 1/2" x 3/8" 1/2" 12.7 3/8" 9.5 TILM19 3/4" x 5/8" 3/4" 19.05 5/8" 15.85 TILM25 1" x 7/8" 1" 25.4 7/8" 22.2 TILM32 11/4" x 11/10" 11/4" 31.75 11/10" 27.95 KQB2 O.D. 3.18 1/16" 1.58 0.086" 2.18 KS KX I.D.

Speed Controller with

Flow Rate and Effective Area Flow Direction Symbol on Body AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 1.5 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 2 6 8 1/4" 5/16" 460 7 6 10 8 10, 12 6 JIS symbol Inch size Tube O.D. 5/16" 5/32" 1/4" 1/4" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 660 10 290 4.5 390 6 920 14 920 14 1390 21 20 0.3 130 2 230 3.5 Controlled flow (Free flow) Effective

EX600-WEN_WSV.eng

Hardware failure) 3 3 4 5 4 1 3 IRELAND (353) 1 403 9000 W-SS OFF Power supply for control and input (US1) is not supplied.

EXxx-OMV0028.eng

(4) EX600-ED5-# PWR IN: M12 4-pin Plug, A-code GREECE (30) 210 271 7265 PWR OUT: M12 5-pin Socket, A-code Red LED flashes.

PFxx-OMS0001CN

4 mA [F98] -56No.PF-OMS0001CN-A [F99] <> [F99] [iNi] [ini] [] [oFF] [oN] 5 [F99] -57No.PF-OMS0001CN-A 1 // () 1 -58No.PF-OMS0001CN-A [LoC][][LoC] 1 [LoC]1 < -> 5 [UNLoC] [LoC] 5 [LoC] [UnLoC] -59No.PF-OMS0001CN-A < -> [F81] 5 [UNLoC] [LoC] 5 [LoC] [UnLoC] ( ) [000] 1 [UNLoC] [FAL] 3 [LoC] /30 -60No.PF-OMS0001CN-A [000] <> [UNLoC] 5 ( ) 1 1 -61No.PF-OMS0001CN-A

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3

CS1

CS1C125SCS1125, #5 CS1C140SCS1140, #5 CS1C160SCS1160, #5 CS1C180SCS1180, #5 CS1C200SCS1200, #5 CS1C250SCS1250, #5 CS1C300SCS1300, #5 The drawing shows with an auto switch.

ASD

5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Component Parts Note Description U packing U packing Cassette Packing O ring O ring O ring O ring O ring Gasket Spacer ASD230F only Material NBR NBR Description No. !1 !2 !3 !4 !5 !6 !7 !8 !

KK/KK13

/O.D. mm Part no. 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 KK3P-50N -60N -65N KK4P-50N -60N -65N -80N -85N KK6P-80N -85N -110N KK3S-50N -60N -65N KK4S-50N -60N -65N -80N -85N KK6S-80N -85N -110N 1/8 1/8 1/4 1/4 1/2 1/2 Straight type with One-touch fitting Straight type with One-touch fitting Applicable

MK

5 !6 !7 !8 !

Table of Contents

Actuation Plug Plug (A) 4 (B) (2) Number of solenoids (A) (4) (B) 2 Single 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Manual Override Operation Double Warning 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Light/Surge Voltage Suppressor Handle carefully, as connected equipment can be actuated through manual override operation.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

5 Lateral load resisting type: MQQL (Built-in ball bushing) !1 !6 !

Plate Cylinder with Lock Series MLU

1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

Angular Air Gripper Series MHC2/MHCA2/MHCM2

5 !4 u Parts list No. Description Parts list No.

Hydraulic Cylinders

Minimum Strokes for Auto Switch Mounting 20 & 25 Auto switch type No. of auto switches D-A9, D-F9W D-A9V, D-F9WV D-F9 D-F9V D-F9BAL 1 pc. 5 5 20 2 pcs. 10 5 20 Auto switch type 32 to 100 D-Y5, D-Y6 D-Y7 D-Y7V D-Y7W D-Y7WV No. of auto switches D-Z7 D-Z8 D-Y7BAL 10 1 pc. 15 5 5 10 2 pcs. 15 5 10 2 Series CHKDB Theoretical Output Unit: N Operating pressure (MPa) Operating direction Bore size

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) Snap ring l A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m l +0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 C type 3.2 C type 3.2 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 0.030 0.060 +0.048 0 0.030 0.060 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 C type 5 C type 5 8 25 M5 x 0.8 6.4 12 14 4.8 22.7 18.3 1.5 0.7

5 Port Solenoid Valve Series SV

SV B00 SOL.b SOL.a 3(EB) 5(EA) 1(P) 4(A) 2(B) N.C. valve N.O. valve SOL.b SOL.a 1 2 SV C00 3(EB) 5(EA) 1(P) External pilot specification is not available for 4 position dual 3 port valves.