5 Port Solenoid Valve Series SZ3000 Plug-in Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Connector type F: D-sub connector (25 pins) P: Flat ribbon cable (26 pins) SUP/EXH block mounting position Power supply terminals LOCK FREE LOCK FREE U side (2 to 10 stations) U D B M Specifications Symbol P P12 N N12 D side (2 to 10 stations) 24 VDC, Positive common Both sides (2 to 20 stations) 12 VDC, Positive common Special specifications 24 VDC, Negative common For special specifications

I

|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL. NVF353O f l Operating prs6sur range 2 pGiEon singb 20 -129 PSI S(1.5 -gkgF) 2 pssition double-15-128 P$l (1 -gkgflcm'?)

PF2D

l/min Note 1) Output for the display units of PF2D 300/301 04 20 40 PF2D504 PF2D520 PF2D540 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Specifications for Sensor Unit PF2D504 PF2D520 PF2D540 Model Measured fluid Liquid not to corrode nor erode deionized water

PF2D

Supersonic cleaning Drying Double-packing Sensor Clean room class 1000 Shipment 381 For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc.

Compact Vacuum Ejector Series ZA

pressure 80 80 40 Suction flow (l/min(ANR)) Air consumption (l/min(ANR)) 1 2 3 4 5 6 7 8 Left Right Vacuum pressure (kPa) Vacuum pressure (kPa) 70 ZA1071-K15L-FP1-M2 ZA1051-Q15L-FB-M1 ZA-BP1 60 60 30 Vacuum (V) port 50 40 40 20 Air consumption 30 20 20 Suction flow 10 10 0 0.6 0.4 0.2 0.5 0.3 0.1 0 8 6 4 2 Suction flow (l/min(ANR)) Supply pressure (MPa) 851 Series ZA Specifications General

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

3 Port Solenoid Valve/Residual Pressure Release Valve with Detection of Main Valve Position VP500/700-X536, X538, X555 Safety Standard ISO13849-1 Certified * Refer to page 2 for compliant products. *

Valve with Detection of Main Valve Position VP500/700-X536, X538, X555 How to Order Residual pressure release valve VP 2 5 4 5 Z R D 1 03 M X536 VP 4 1 X538 5 4 R 5 D Z 03 M A Dual residual pressure release valve Dual residual pressure release X555 VP 4 1 5 4 5 D Z 03 M valve with soft start-up function Throttle Thread Series Nil Variable throttle 10 1 xed orice 15 1.5 xed orice 20* 2 xed

3 Port 3 Position Valve Body Ported VEX3 Series

VEX312 VEX332 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC * DC specification of type D and DO is only available with 12 and 24 VDC. 32 02 1/4 03 3/8 04 1/2 Foot bracket ( VEX312 and VEX332 only) F N* Pilot exhaust (PE) silencer Electrical entry Grommet L plug connector M plug connector DIN terminal G: Lead

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

PF2D Dimensions: Separate Type Display Unit PF2D30 -A Panel mounting type 0 1 Internal circuits and wiring examples z to , are terminal numbers. 40 41.8 OUT2 4.3 40.3 NC Sensor 8 Load 4 OUT1 Black Main circuit Main circuit 7 3 Load SMC FLOW SWITCH Brown + 6 2 35.8 36 Blue A 40 5 1 UNIT 12 to 24VDC Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimension 3 x 7.2(=21.6) 8-M3 36 +0.5

Pneumatic Positioner IP300/IP3100

INSTALLATION B D Installation Transmission Din & Feed-back lever Fig. SINGLE-ACTING ACTUATOR SIGNAL PRE-Y%i-rpur SIGNAL RANGE INSTALLATION STYLE IREF. FIG. 1) OUT 1 OUT2 Direct ? OPEBATION ACTUATOR 315 DSi used pruggeo 1/2 Solit D c pruggeo used 1/2 Solit B 3-15 osi c USEO plugged '1l2 Solit B 3-15 nsi pruggeo used '112 Solit D Fig. Reverse = ) Y INSTALLATION STYLE (REF.

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF, Exhaust Cleaner Mounting Direction: D Side, D Side Mounting

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Stations: 04 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: T (NPTF), Exhaust Cleaner Mounting Direction: CD (D Side, D Side Mounting)

0.01

SFD-EL101 SFD SFD Element set Element set 1 1 With O-ring With O-ring Bracket Bracket 2 2 Material: Stainless steel 304 Material: Stainless steel 304 SFD-BR101 SFD-BR101 LLB Dimensions AD SFD101-02 SFD102-02 GD 25 66 66 25 19 19 24 24 50 40 50 40 13 2 x 4.5 Bracket Bracket 13 2 x 4.5 325 SFD Series Made to Order Specifications 2 Please contact SMC for detailed specifications, delivery and

Series KV2 Fittings

40 41 68 57 111 121 172 100/800 100/800 100/800 100/1000 100/800 100/600 100/400 100/400 100/400 100/400 100/200 100/200 100/200 100/200 100/200 100/200 50/100 50/100 50/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation.

P

X2709 2 B 02 30 R B AW Body size Flow direction Nil Flow direction: Left to right R Flow direction: Right to left 30 Body size 30 40 Body size 40 60 Body size 60 Bowl Port size 2 Metal bowl Symbol Port size Body size 30 40 60 02 Rc1/4 V V 03 Rc3/8 V V 04 Rc1/2 V 06 Rc3/4 V V 10 Rc1 V Mounting option1 Nil Without mounting option B2 With bracket H3 With set nut (for panel mount) Waterproof

Precision Regulator

We guarantee that the product complies with the outline dimensions provided. d.

tTV2000/3000

(Austin) 2324-D Ridgepoint Drive Austin, TX 78754 Tel: (512) 926-2646 FAX: (512) 926-7055 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc. (Dallas) 12801 N. Stemmons Frutry, Ste.815 Dallas, TX 75234 rel: (972\ 406-0082 FAX: (972) 406-9904 SMC Pneumatics lnc.