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In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 13 VFR3000OMH0003B S Revision history A Renewal KQ B Renewal PP 1st printing: HT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on

If any trouble should happen with the uni,please send it back to the supplier for repair or replacement. 8 No.SYJ300-OMO0002-A Revision history A Added the SYJA3000 SS 1st printing PP 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on

ISE70 (Air) ISE75 (Fluid) ISE75H (Fluid) Rated pressure range 0 to 1 MPa 0 to 10 MPa 0 to 15 MPa Set pressure range -0.1 to 1 MPa 0.4 to 10 MPa 0.5 to 15 MPa Withstand pressure 1.5 MPa 30 MPa 45 MPa Set pressure resolution 0.01 MPa 0.1 MPa Fluid Air, inert gas and incombustible gas Fluid which has no corrosive effect on SUS304, SUS430, SUS630 Power supply voltage 12 to 24 VDC 10%, ripple (pp

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 14 No.VF1000-OMN0002-A S Revision history A Safety Instructions PP 1st printing : oQ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

. -15VFR2000-OMH0002-A S Revision history A Safety instructions PP 1st printing: 90.4 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved VFR2000-OMH0002-A

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

OO PP QQ RR SS TT UU VV Model Applicable gasket ML1C25 ML1C32 ML1C40 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C11.2 17 23.5 12.5 10 53 40 34 26 C14 A B C D E F G H I J K L M N O P Q R S T U V W Y Z Model ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 M5 x 0.8 8.5 M6 x 1 9.5 11 M8 x 1.25 322 306 161 160 108 131 101 99.5 64 92 118

Phone: 317-762-7621 Fax: 317-899-3102 www.smcusa.com 2715 Bristol Circle, Oakville, Ontario L6H 6X5 Canada Phone: 800-762-7621 Fax: 905-812-8686 www.smcpneumatics.ca QQ-PP-5M

Maximum flow capacity Note 2) Up to 3 L/min (ANR) Up to 30 L/min (ANR) Up to 65 L/min (ANR) Up to 130 L/min (ANR) Up to 200 L/min (ANR) Filtration rating Note 3) 0.01 m (Trapping efficiency 99.99%) Noise reduction Note 3) 30 dB (A) Operating temperature 5 to 45C Differential pressure proof Note 4) (Maximum operating pressure) 0.1 MPa Material Note 5) Body PBT, Polyolefin, Polyurethane, PP

Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5

All elements inspected for quality assurance 0.2m item: Pre-rinsed with ultra pure water, germ removal efficiency of LRV = 7 or more Paper Element PP Fiber Element EXM-X3 For standard washing HEPO II Element EJ Nominal filtration accuracy: 5, 10, 20m Pleated type cartridge provides large filtration area Low cost, disposable Material: Filter paper (cotton, resin impregnated phenol) Nominal

Principal Parts Material Body C3604BD, PBT, PP C3604BD (Thread portion) Stainless steel 304 Stainless steel 304, C3604BD, POM POM NBR Stud Chuck Guide Collet, Release button Seal, O-ring Stainless steel 304, NBR Gasket P. 15-2-30 15-2-11 3 Series KQ2 Model Hex. socket head male connector Universal male elbow P. 17 KQ2V P. 14 KQ2S Internal hex. allows thread connection by using an allen wrench

Model: LVH40 (Body Class 4, N.C.), Lever Operation: Non-locking, Self-reset, Port Size: 04 (1/2), Pilot Port Thread: N (NPT), Material: A (Body: SUS, Actuator Section: PP, Diaphragm: PTFE)

Model: LVH30 (Body Class 3, N.C.), Lever Operation: L (Locking), Port Size: 03 (3/8), Pilot Port Thread: N (NPT), Material: B (Body: PPS, Actuator Section: PP, Endplate: PPS, Diaphragm: PTFE)

Model: LVH30 (Body Class 3, N.C.), Lever Operation: Non-locking, Self-reset, Port Size: 03 (3/8), Pilot Port Thread: N (NPT), Material: A (Body: SUS, Actuator Section: PP, Diaphragm: PTFE)

Model: LVH40 (Body Class 4, N.C.), Lever Operation: L (Locking), Port Size: 03 (3/8), Pilot Port Thread: N (NPT), Material: A (Body: SUS, Actuator Section: PP, Diaphragm: PTFE)

Model: LVH40 (Body Class 4, N.C.), Lever Operation: L (Locking), Port Size: 04 (1/2), Pilot Port Thread: N (NPT), Material: A (Body: SUS, Actuator Section: PP, Diaphragm: PTFE)

Model: LVH40 (Body Class 4, N.C.), Lever Operation: L (Locking), Port Size: 04 (1/2), Pilot Port Thread: N (NPT), Material: B (Body: PPS, Actuator Section: PP, Endplate: PPS, Diaphragm: PTFE)