VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Pg.7 Indicator light 3.5 to 7 Cover diameter 1.5 Cross section 0.23mm2 < >: AC 61 53.5 35.5 0 1 M plug connector (M): VQZ312 (R)wMwC6, C8, C10, 02 Cover diameter 1.5 Cross section 0.23mm2 77 37 <42> 300 (Lead wire) 101.5 <102.5> 114 65 <66> Indicator light < >: AC 1.12-15 VQZ1000/2000/3000 Body Ported Dimensions: VQZ3000 2 position double 0 1 Grommet (G): VQZ322 (R)wGwC6, C8, C10, 02 300

%silltr

66 66 66 67 67 68 68 69 69 91 91 ol 91 o, 92 93 94 94 94 95 96 96 96 96 97 97 98 98 98 99 oo 101 1 0 1 101 101 102 103 104 104 104 105 8 BAS|C CIBCUITS lntroduction Flow Amplilication Signal Inversion Selec{ion Memory Function Time tunctions Delayed switching on Delayed switching otf Pulse on switching on Pulse on releasing a valve Cylinder Control Manual Control Single Acting Cylinder Direct

Vacuum

:Pr66 l*o' $eni Flow characlerislics: at 4 5 kgf-cm'?

25

PB1013A/Air-operated type without foot 37 mm 52 mm 37 mm 52 mm 66 mm 66 mm Application Examples Application Examples Space saving (Air operated) Printing machine Semiconductor/ LCD equipment Analyzer for medical and biochemistry Car washing machine Ink/solutions supply DI water/solutions supply, Waste fluid collection Water/ detergents supply Reagents supply Machine tool Cleaning device Devices

Rotary Table/

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 100h9 101 102 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 116h9 118h9 119 120 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

MXU

52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q Note Hard anodized No. !

MY1

Applicable O-ring WX S Y Bore size (mm) 50 63 8 9 74 92 18 18 C15 C15 1356 MY1W Series Mechanically Jointed Rodless Cylinder With Protective Cover Stroke Adjusting Unit With adjusting bolt MY1W Bore size Stroke A h E EA EB W Stroke adjusting unit h TT MY1W50/63 MY1B MY1H EC EY MY1B MY1M E 14.6 20 24 29 35 40 52 EA 7 10 12 14 17 20 26 EB 30 32 38 50 57 66 77 EC 5.8 5.8 6.5 8.5 10 14 14 EY

Vacuum

:Pr66 l*o' $en Flow characlerislics: at 4 5 kgf-cm'?

“

IN 66 2 x 1/2 Port size 2 x 1/4 to 1/2 Port size 786 IR1200-A/2200-A/3200-A Series Specific Product Precautions 1 Be sure to read this before handling the products.

Electric Grippers

32 34 36 38 21 23 25 27 29 31 33 35 37 39 40 L 285.5 310.5 335.5 360.5 385.5 410.5 435.5 460.5 485.5 510.5 273 298 323 348 373 398 423 448 473 498 DIN rail mounting adapter LEC-D0 (with 2 mounting screws) This should be used when the DIN rail mounting adapter is mounted onto the screw mounting type controller afterwards. 56 Series LECP6 Dimensions a) Screw mounting (LECP6-) (81.7) 35 1 66

Compact Manifold Regulator Series ARM5

OUT Fitting Type Metric size Inch size Symbol Position 1 2 Bottom Top Straight Elbow 4 6 4 6 Straight Elbow 5/32 1/4 5/32 1/4 Fitting type Symbol Fitting type Symbol 04 05 16 17 54 55 66 67 4. Accessory (Pressure Display) 5.

Modular Type Air Filters Series AF

35 11 13 90 3.2 47 284 3/4, 1 95 258 24 47.5 20 47.5 70 66 35 11 13 90 3.2 47 297 1 AL Semi-standard specifications AW With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model B B B B AG AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 66 101 97 AV 137 136 142 162 173 172 178 198 AF800 AF900 177 176 182 202 253 252 258 278 266 265 271 291 333 Air Filter AF10 to AF60 Made

Speed Controller: Standard Type Series AS In-line Type

4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C.

Soft Start-up Valve

gauge (Option) 2(A) 1(P) 37.5 Bracket (Option) T M N P X Built-in silencer (Option) 3(R) Q S L K R AV5000-A Flow adjustment needle at low speed air supply D D [mm] 4 x W 2 x W Body size Coil type B Y 20 AC 85 V Y DC 83 30 AC 85 DC 83 U H 40 AC 95 DC 93 50 AC 98 H DC 96 U Dimensions [mm] Standard specifications Port size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66

SYJ300/500/700

Station n L1 L2 Station 2 50 41 Station 20 338 329 3 66 57 4 82 73 5 98 89 6 114 105 7 130 121 8 146 137 9 162 153 10 178 169 11 194 185 12 210 201 13 226 217 14 242 233 15 258 249 16 274 265 17 290 281 18 306 297 19 322 313 Port size One-touch fitting 4-4-29 Series SYJ500 Type 41 Manifold: Side Ported/SS3YJ5-41Stations -M5, 01 [ ] for AC For 1/8 Grommet (G) For M5 (Pitch) P=16 18 (Pitch

5 Port Solenoid Valve

Symbol Nil Specifications Note) For symbol, refer to page 7. 1 2 3 Stations Standard External pilot Note) R Base mounted plug-in Note) Not compatible with dual 3-port valves. 66 M Series S0700 kit (Circular Connector) L4 L3 L2 5.25 4.4 L1 47.1 1.5 12.8 (n-1) x 8.5 8.5 (12) 60 Indicator light 13 Manual override (5.5) 14 14 14 14 14 14 14 14 (35) S0710-5 S0710-5 S0710-5 S0720-5 S0720-5 S0720

Plug-in/Plug Lead: Single Unit

Nil B Side ported Bottom ported Enclosure Nil W Dust-protected Dusttight/Low jetproof type Note) Note) Not required for plug lead type. 2-6-5 Base Mounted Series VQ5000 Plug-in Type Conduit terminal 2 position single: VQ5100 1 2 195 73 59.5 27.5 27.5 195 122 106 59.5 73 4(A) port 17.5 13.5 2(B) port 2-Rc 3/8 5(R1), 3(R2) port Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 40 66 B A VQ5000

New

M Depth 5 G A H i G A 2 x P Port size B1 B b B1 B 2 x P Port size DIN terminal Cable 6 to 12 G1/2 Q F S Bracket mounting hole dimensions D a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) (44) 31.5 6.5 R C E 10.5 IN OUT 2 x M Depth 5 G A H 2 x P Port size B1 B (mm) A B B1 C D E F G Port size P H J M Model 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 35 35 40 40 10.5 14 17 20 22 22 24.5 24.5 40 48 62 66