MNB

D-F59F D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 50 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 CL1 63 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 80 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4

MNB

switch Auto switch Ht Ht A A 32 B B L 9-6-20 21 Series MNB Cylinder with Lock Double Acting, Single Rod Proper Auto Switch Mounting Position D-F5W D-J59W D-F5 D-J5 D-F5BAL D-F59F D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5

Vacuum Unit

Refer to ) 3) Remove the junction box B (top) for all stations using a precision screwdriver. (Refer to ) (Remove the junction box B from D side.) 4) Remove all connectors mounted to the junction box B. (Be careful not to break the connector clip.) 5) Remove the tension bolt. 6) Remove the end plate D assembly. 7) Remove the connector housing assembly from the end plate D assembly.

CNA

, A44C D-G39, G39C D-K39, K39C D-B5/B6 D-G5lW D-K59W D-G5BAL D-G59F D-G5l D-K59 D-G5NTL D-F5l D-J5l D-F5lW D-J59W D-F5BAL D-F5lF D-A3lC D-G39C D-K39C D-B59W D-A59W D-F5NTL Bore (mm) Bore (mm) A B A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 40 40 0 0 0.5 0 3.5 1.5 2 0 4 2 10.5 8.5 11.5 9.5 38 72.5 80.5 40 31 38.5 31 73 69 81 69 50 50 0 0 0.5 0 3.5 1.5 2 0 4 2 10.5 8.5 11.5 9.5

VQ7-6/7-8

/Double : VQ7-6-FG-D-SC Double (reverse pressure): VQ7-6-YZ-D-SC 3 position/Closed center : VQ7-6-FHG-D-SC Exhaust center : VQ7-6-FJG-D-SC Pressure center : VQ7-6-FIG-D-SC 145 86.5 155 68.5 76.5 50 50 68.5 50 50 Manual override 13 (port A) 13 (port B) Manual override 13 (port A) 13 (port B) B A B A 62 38 50 38 50 62 A B A B Prewired connector (M12) (L approx. 500) R1 R2 P Prewired connector

Air Fittings & Tubing

Port B min. port size Tube O.D. (mm) Fitting size d D1 Part No.

Cylinder with Lock Series CNS

(mm) D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F Auto switch model D-A9 D-A9V D-A59W D-F5NTL Bore size (mm) A B B B B A B B A B A A A A 125 140 160 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 The above

CG5-S

(10 to 60C) PBT (10 to 60C) AI SUS304 Hydrochloric acid (20%, Room temperature) D D B A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulphuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

(Looked by double solenoid valve) (Looked by double solenoid valve) SOL. location B (*) B (*) B B A B A B A B A B A A A A B A B A SOL. location VQC 3 position 3 position Double Double Double Double SI unit Single Single SI unit Single Single SQ Stations 1 2 3 4 5 Stations 1 2 3 4 5 VQ0 The places of asterisk are not used.

Air Cylinder Series CS1

D-F5BAL D-F5 D-J5 D-F59F D-A9 D-A9V D-A59W D-F5NTL B B B B B B B A A A A A A A Bore size 125 140 160 180 200 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 9.5 7.5 13.5 12.5 7 5 3.5 1.5 7.5 5.5 10 8 15 13 12 10 16 14 9.5 7.5 6 4 10 8 12.5 10.5 17.5 15.5 The mounting position should be referred for reference only for

Compressed Air Preparation Filter

1 2 How to Order AMK F 30 03 B D Option/Semi-standard: Select one each for a to d.

RQ

Hs A B A B Proper Auto Switch Mounting Position Auto Switch Mounting Height D-A7H D-A80H D-F7 D-A7H, A80H D-A73C, A80C D-F7, F7V D-F79F, J79 D-J79C, F7W D-F7WV, J79W D-F7BAL, F7BAVL D-J79W D-F7BAL D-F79F D-F7NTL D-F7V D-A7 D-A80 D-A73C D-A80C D-J79C D-A79W D-F7WV Bore size (mm) D-A7, A80 D-A79W D-F7NTL Bore size (mm) D-J79 D-F7W D-F7BAVL Hs Hs Hs Hs Hs Hs 20 A B A B A B A B 25 20 32 25 31.5

CG5-S

(10 to 60C) PBT (10 to 60C) AI SUS304 Hydrochloric acid (20%, Room temperature) D D B A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulfuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium

VQ7-6/7-8

25 25 X (PE) port 1/8 A, B port 2-/4, 3/8 9 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 Y(PE) port 2 position double : VQ7-6-FG-D double (Reverse pressure): VQ7-6-YZ-D 3 position closed center : VQ7-6-FHG-D exhaust center : VQ7-6-FJG-D pressure center: VQ7-6-FIG-D 155 145 68.5 86.5 76.5 68.5 50 50 50 50 13 (A port) 13 (B port) 13 (A port) 13 (B port) Manual override Manual override A B A B B B

VQ7-6/7-8

1/4, 3/8 VFN 2 position double : VQ7-6-FG-D-SC double (Reverse pressure): VQ7-6-YZ-D-SC 3 position closed center : VQ7-6-FHG-D-SC exhaust center : VQ7-6-FJG-D-SC pressure center: VQ7-6-FIG-D-SC 145 155 76.5 68.5 68.5 86.5 50 50 50 50 Manual override Manual override 13 (A port) 13 (B port) 13 (A port) 13 (B port) A B A B 38 50 62 38 50 62 B A B A R1 (L 500) Cable with connector R2 P R2 R1

MG

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

D-F5BAL/F59F D-F5W/J59W CP95 ~ = NCM ~ = ~ = NCA D-X 20Proper Auto Switch Mounting Position Auto Switch Mounting Height Data D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL Auto switch model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A59W D-F5NTL Bore size (mm) A B A B A B A B Hs Hs Hs Ht Hs Ht 74.5 125 0 0 2 2 4.5 4.5 9.5

Refrigerated Air Dryers

air inlet (D) Specific Product Precautions Refrigerant R134a (HFC) IDF E Port size (B) Port size (E) (A) (A) (B) (D) (C) (C) Refrigerant R407C (HFC) IDF E Dimensions [mm] Refrigerant R407C (HFC) IDF F Part no.