Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

CG1

A L1 R1 E1 U1 MM A1 NDH10 NX Bore size (mm) Applicable pin 20 25, 32 40 50, 63 80 100 Part No.

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

PSxx-OMH0002CN

OUT1(NPN) DC12 24 V OUT2(NPN) DC(-) -43 43 43 43 NPN 1 + PNP 1 Max.30 V(NPN)80 mA 1 V NPN PNP DC(+) OUT1(NPN) DC12 24 V OUT2(PNP) DC(-) DC(+) OUT1(PNP) -65 65 65 65 PNP 1 Max.80 mA DC12 24 V N.C.

VM

A commercially available actuator for the V microswitch can be installed. However, be aware that there are different microswitches, such as the P.T./O.T. or F.O.F. types. T.T. 2.5 mm is available for basic style only.

KB

D L A2 A1 M Part No.

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

Cylinder (including thin round plate) Position of rotational axis: Through the plate's central axis Position of rotational axis: Perpendicular to the shaft anywhere along its length I = m1 x + m2 x 3 a1 3 a2 I = m x 2 r 2. Thin shaft Position of rotational axis: Through the shaft's center of gravity 7.

Series KC Self-seal Fittings

A1 M A2 D L Part No.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?3C)Lights up when output is turned ON.

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)1 to 5 V ?2.5% F.S.?

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?3C)Lights up when output is turned ON.

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)1 to 5 V ?2.5% F.S.?

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?3C)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?3C)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?3C)Lights up when output is turned ON.

q"s

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ISO Cylinder

state auto switch 2-wire 12 V M9BV M9B M9BV M9B V V V v v Connector H7C J79C V V V V 3-wire (NPN) 5 V, 12 V M9NWV M9NW M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 M9NAV1 M9NA1 v v V v v IC circuit 3-wire

Cylinder with Lock

) Grommet Grommet 3-wire (NPN) 5 V, 12 V M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 v v V v v 2-wire 12 V M9BAV*1 M9BA*1 v v V v v Water-resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96V A96 V V

High Vacuum Angle Valve

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 427 B XLF/XLFV Series Specifications Model XLF(V)-16 XLF(V)-25 XLF(V)-40 XLF(V)-50 XLF(V)-63 XLF(V)-80 XLF(V)-100 XLF(V)-160 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLF 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLFV 5 to 50 Operating pressure