High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

Vacuum Ejector Series ZM

Electrical entry G H L LN LO Nil Grommet type, with 0.3 m lead wire (applicable to DC) Grommet type, with 0.6 m lead wire (applicable to DC) L plug connector, with 0.3 m lead wire L plug connector, without lead wire (applicable to DC) L plug connector, without connector (applicable to DC) Air operated/Without valve Pilot valve DC: 1 W (With indicator light: 1.05 W) DC: 0.45 W (With indicator

Air Pilot Operated

>Aiv EJ E) =:-:H8 I 10 l 1 I : i/b.a $n a ltfllon!. @nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

Title not found

, H, L r u. E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .

45

+ 190 Manifold base weight W (g) n: Stations Note) For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.

Air Pilot Operated Series NVSA

>Aiv EJ E) =:-:H8 I 10 l 1 I : i/b.a $n a ltfllon!. @nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

45

+ 190 Manifold base weight W (g) n: Stations Note) For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.

Microspeed Cylinder

Vertical actuation I II P W A P a (b) (a) P P a A W (1) Basically adjusted with meter-out control. When meter-in control is also used, lurching is reduced. (1) Basically adjusted with meter-out control.

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 Cuts air consumption by operating the return stroke at a reduced pressure.

JXCx-OMT0062

(unit mm): When the current position is within W-AREA1 and W-AREA2, the WAREA output turns ON. When W-Area 1 < W-Area2, the Parameter ALM of alarm occurs.

H/DL/L/LL

P. 64 15-2-61 Series H/DL/L/LL Male Connector: H H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Compact Proportional Solenoid Valve Series PVQ

) 24 VDC 12 VDC SRP PVQ30 (2.3) SRF 120 ARX20 P = 0.35 MPa 100 P = 0.25 MPa VCHR Flow rate (l/min) 80 P = 0.18 MPa ITV 60 P = 0.1 MPa 40 IC 20 PVQ 0 0 0 20 40 40 80 60 120 80 160 100 200 120 240 140 280 160 320 180 360 200 400 Current (mA) 24 VDC 12 VDC VEF VEP VER PVQ30 (4.0) VEA 120 100 P = 0.12 MPa VY2 Flow rate (l/min) P = 0.08 MPa 80 VBA VBAT P = 0.06 MPa 60 AP100 40 P = 0.04 MPa

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

3 Port Solenoid Valve

L Terminal no.

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

FILTER REGULATOR

Round type pressure gauge (with colour zone) G36-10-N01-L G46-10-N01-L G36-4-N01-L NPT G46-4-N01-L 1 0.2MPa setting G36-10-01-L G46-10-01-L G G36-4-01-L G46-4-01-L 1 0.2MPa setting ARP20P-310AS-01 Rc Pressure gauge adaptor assembly Aluminium die ARP20P-310AS-N01 G cast ARP20P-310AS-F01 NPT ARP20P-320AS-01 Rc Plug assembly ARP20P-320AS-N01 G ARP20P-320AS-F01 NPT AR20P-370AS

IDG

for purge air discharge (Option: P) u t e q IN OUT i } r w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

-A18 ZPT40HNJ50-01-A18 ZPT40HNJ75-01-A18 ZPT50HNJ25-01-A18 ZPT50HNJ50-01-A18 ZPT50HNJ75-01-A18 ZPT63HNJ25-01-A18 ZPT63HNJ50-01-A18 ZPT63HNJ75-01-A18 ZPT80HNJ25-01-A18 Model Mass ZPT80HNJ50-01-A18 ZPT80HNJ75-01-A18 ZPT100HNJ25-01-A22 ZPT100HNJ50-01-A22 ZPT100HNJ75-01-A22 ZPT100HNJ100-01-A22 ZPT125HNJ25-01-A22 ZPT125HNJ50-01-A22 ZPT125HNJ75-01-A22 ZPT125HNJ100-01-A22 Pad dia.

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.1 i'--... 01 5 O~ o 0.2 0.3 0.4 0.5 0.6 0.7 08 0.9 1 00 1000 2000 Flow ra te / mi n IANR) Inlet pressure MPa AR3001-03 AR3001-03 0.6 ~ 0.5 ---'" " Jp J 0.25 '" I r~r " ::;; l' 0.2 ~ --P l' a. r< & "" & l' ::> 0.4 ~ ~ ~ 0.3 ~ -... a. ID '$'2 1-?/"(9 . "OS .