ZR

Symbol 25 (L) Lead wire length Output specifications NPN output Analog output PNP output NPN output Analog output PNP output Applicable switch Lead wire length 0.6 (3.0) m 26 (L) Lead wire length 0.6 (3.0) m 65 (L) Lead wire length 0.6 (3.0) m 27 (L) Lead wire length 0.6 (3.0) m D1 D2 Ex.) ZR1--CN . 1 pc.

CXS

Standard Type: CXS Vertical mounting L L Mounting orientation m m up to 300 up to 400 up to 700 ( up to 800) up to 200 up to 600 up to 100 Max. speed (mm/s) Stroke (mm) All strokes 1 2 6 10 15 Selection graph 3 4 5 6 20 25 32 Horizontal mounting L Mounting orientation m m Refer to the caution notes below.

Series VQ Base Mounted Metal Seal/Rubber Seal

: M5 thread SYJ Manual override Seal Non-locking push style Push-locking slotted style B SX 0 1 Metal Rubber Option VK Pilot valve (Option) Electrical entry VZ Symbol Specification DC AC G L LO M MO Grommet (Except for AC) L plug connector with lead wire L plug connector without connector M plug connector with lead wire M plug connector without connector (1.0W) (1.5W) (0.5W) (1) Standard

Large Size Vacuum Module: Series ZR

valve Nil L M N Refer to Table (1) in page 969 for details.

KR

(mm) <M5, M6> <M5, M6> A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

High Vacuum Angle Valve

D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL !

Mechanically Jointed Rodless Cylinders

R L NE C NG R R L L G R L A N L R Z + Stroke Slide table operating direction (mm) Model MY3A16 MY3A20 MY3A25 MY3A32 MY3A40 MY3A50 MY3A63 MM M4 x 0.7 N 6 M 55 A 6 B 18 C 2 E 9.5 G 27 H 5 HG M4 x 0.7 JJ 5 KK 65 L 3.5 LD 22.5 LL 41 LW 13.5 M4 x 0.7 15.5 6 64 7.5 22 2 9.5 32 6.5 M4 x 0.7 8.5 80 4.5 24 51 M5 x 0.8 20 8 75 9.5 25 2 14 37 7.4 M5 x 0.8 7.5 95 5.5 27.5 61 M5 x 0.8 22.5 8 96.5 11 32.5

7.5

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not

KJ

(mm) <M5> <M5> Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

•

H:M8X125 oK "l G Model M ; 8 C 0 E F G 140 34 6 I !

24

[mm] (7) L = 50 mm, V = 400 mm/s (8) L = 100 mm, V = 400 mm/s 50 50 80 80 80 80 40 40 30 30 Load mass m [kg] Load mass m [kg] 20 20 50 50 50 50 10 10 50 20 30 40 51 100 200 10 10 50 20 30 40 51 100 200 Stroke [mm] Stroke [mm] 482 Model Selection MGPS Series Operating Range when Used as Stopper 2000 MGPS80 L 50 mm L 50 mm 1000 m m Mass of transferred object: m [kg] MGPS50 500 400 300 200

MG

M5 x 0.8 Nil Slide bearing Ball bushing bearing M L NPT Rc N G TF Copper-free For bore size 16, M5 x 0.8 is only available.

Table of Contents

Flat Ribbon Cable Assembly D-sub Connector Cable Assembly 10P 16P 20P Pins Cable length (L) 1.5 m 15P AXT100-FC10-1 AXT100-FC16-1 AXT100-FC20-1 Pins Cable length (L) 1.5 m 3 m AXT100-FC10-2 AXT100-FC16-2 AXT100-FC20-2 AXT100-DS15-1 5 m AXT100-FC10-3 AXT100-FC16-3 AXT100-FC20-3 3 m AXT100-DS15-2 17.2 24.8 30 5 m AXT100-DS15-3 Connector width (W) For other commercial connectors, use a type

VZ3000

Center/Pressure Center VZ3320 Grommet (G), (H) VZ3 20-M5 G H 3 4 5 VZ3420 VK Manual override (Non-locking) VZ3520 VZ (Lead wire length) (Mounting hole for manifold) VF G: 300 mm H: 600 mm VFR VP4 VZS VFS VS4 (Mounting hole) VQ7 2-M5 x 0.8 (PE port) EVS VFN (Piping port) L plug connector (L) VZ3 20-L-M5 M plug connector (M) VZ3 20-M-M5 3 4 5 3 4 5 300 (Lead wire length) 300 (Lead wire length

Free Mount Cylinder

Where the wiring length to load is greater than 5 m. Where the load voltage is 100 VAC. The contact life may be shortened. (Due to permanent energizing conditions.) L D-M9P (Example) Nil Lead wire length 0.5 m 3 m L 5 m Z Note 1) Applicable auto switch with 5 m lead wire Z Solid state switch: Manufactured upon receipt of order as standard.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

150 + l 20 151 150 130 129 170 + l 149 + l 180 + l 159 + l 25 158 157 137 136 179 + l 158 + l 187 + l 163 + l 32 165 165 141 141 187 + l 163 + l 212 + l 184 + l 40 187(196) 164 159(168) 207(216) + l 179(188) + l 192 242 + l 210 + l 50 217(229) 190 185(197) 237(249) + l 205(217) + l 222 252 + l 215 + l 63 227(239) 195 190(202) 247(259) + l 210(222) + l 232 303.5 + l 245 + l 80 288.5(302.5)

5 Port Solenoid Valve Series SV1000/2000/3000/4000

L dimension L dimension 1.5 m AXT100-DS25-015 AXT100-MC26-015 1.5 m 3 m AXT100-DS25-030 AXT100-MC26-030 3 m 5 m AXT100-DS25-050 AXT100-MC26-050 5 m When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C24308. L L (60) 44 8 16 14 25 1 13 47.04 50 Approx. 10 Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Plug terminal no.

CXWM/CXWL

M L CX Plate mounting style with auto switch: CDPXW S M L Table (1) DHousing mounting style with auto switch: CDBXW M -X M L Table (2) 20Data Table (1) Plate Mounting Style with Auto Switch (CDPXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch Component parts Material CDPXW 10SM L CDPXW 16SM L CDPXW 20SM L CDPXW

Vacuum System Peripherals:

length 0.6 m (Applicable to only DC) Air operated L ZCU Y LN Plug connector type LO AMJ M MN Misc.

Compact Rotary Actuator Series CRQ2

(Example) For M5: L2 = 10 Applicable shaft types: K, T, X Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5,