HRX-OM-Q033

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-Q033 Chapter 5 Simple communication

HRX-OM-S010

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRS100/150 Series 5-20 HRX-OM-S010 Chapter 5 Simple communication

Table of Contents

YES Calculation of resistance force f n 1 (L/GP) 2 (Provided that L > GP) Calculation of theoretical output F L W Refer to Theoretical Output 1 on page 8-27-3.

HRX-OM-R028

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-R028 Chapter 5 Simple communication

HRX-OM-T004

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRS090 Series 5-20 HRX-OM-T004 Chapter 5 Simple communication

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Equipment L or R shows the left or right of the filter IN when viewed from front. 100 200 50 l /min (ANR) 200 l /min (ANR) Port size Thread type B (ZFA100) 1 8 1 4 02 01 ZFA200 B (ZFA200) Nil T Rc NPTF F G How to Order Manifold JIS Symbol Indicate both the symbols for air suction filter and bracket for manifold.

-fl Seies

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

How to find the flow rate for water Formula based on Cv factor Q = 14.2 Cv 10.2 P l/min Formula based on effective area (Smm) Q = 0.8 S 10.2 P l/min Q: Flow rate (l/min), P: Pressure differential (P1P2), P1: Upstream pressure (MPa) P2: Downstream pressure (MPa), S: Effective area (mm), Cv: Cv factor 17

Air Cylinder Series CM2

-H -R -W N L Stroke Axial foot style: CBM2L Bore size LH B 4 x LD 2 x LC LT X Y Y X LS + Stroke Z ZZ + Stroke LZ LX -H -R -W N L Stroke N L Stroke Head side flange style: Rod side flange style: CBM2F Bore size -H -R -W CBM2G Bore size 4 x FD Mounting hole C2 2 x FD Mounting hole FY B FX FZ Z + Stroke FT FT Z 20 to 32 40 -H -R -W N L Stroke Single clevis style: CBM2C Bore size CD U L RR CX

C95Series

Applicable ba", size l ~ C95S-W Non-lube Speci Icatlons 1MPa~ 10.2k:gf/crn2 Bore size %32 J . 0'40 .1 .0'50 .L %63 ,.I . .0'80 1 %1 00 Action .-.

NCM

K A E NE 0.09 MM NC KK-UNF-2A B Pilot 1/8 NPT D-Across Flats NN-Mounting Nut (included) Double end mount / Spring return NCME_-_S Rear pivot mount / Spring return NCMC_-_S ZB + Stroke LB + Stroke ZB + Stroke LB + Stroke Y W ZC 0.50 A K W Y G Pivot Pin Hole L ZC ZD ZD K 0.50 ZD ZC L E GB ZC A G ZD E GA Pin MM MM B Pilot N YC B Pilot F YC L B Pilot N F YC FF-UNF-2A NCME 150 NN-Mounting Nut

Vacuum Unit

How to Order Manifold w r q e ZZK2 A P 2 L 04 If the manifold parts (set of end plates for both ends and tension bolts) are shipped unassembled, please refer to page 33. q Stations w System/Port e Supply valve and release valve wiring1 Symbol System Port Symbol Stations 01 1 station 02 2 stations Symbol Wiring Selectable wiring for manifold r (Refer to page 16.)

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

Manifold Specifications

Non plug-in type Thread type 02 2 stations Standard Nil NPT Rc N T F Symbol 24 24 stations NPTF G Option VV5ZS2-51FD-091-01-MP5 VZS2150-5FZ VZS2250-5FZ 1 5 2 Note) Maximum stations 51F 16 stations 51G15 stations 51 24 stations Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol Port size 1 1 8 01 Rc (Manifold base) (2 position single) VV5ZS2-51-071-01-M5

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

W 223 235.5 248 260.5 273 285.5 298 310.5 323 335.5 L dimension 40.1 42.4 44.6 46.9 49.1 51.4 53.6 55.9 58.1 Weight (g) 60.4 L (15.6) Terminal no. 20 21 22 23 24 25 26 27 28 29 No. 348 360.5 373 385.5 398 410.5 423 435.5 448 460.5 L dimension 62.5 64.9 67.1 69.4 71.6 73.9 76.1 78.4 80.6 Weight (g) 82.9 Example of connector manufacturers HIROSE ELECTRIC CO., LTD.

VKF300

Mounted Type Common SUP, Common EXH Type 40/for base mounted type (Port A bottom ported) How to Order Applicable solenoid valves VKF334VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A Option Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Valve stations None With bracket (not mounted) Nil 1 station 01 Bracket VK300-43-1A F 20 stations 20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Function Symbol Specifications DC (1.0 W) AC Electrical entry Nil Standard type High pressure type (Metal seal, VQZ100 only) Light/Surge voltage suppressor (1.0 W) (1) K Electrical entry Symbol (0.5 W) Low wattage type G L LO M MO Y YO YZ YS No Y Grommet (DC specifications) L plug connector with lead wire L plug connector without connector M plug connector with lead wire M plug connector

OMS0020

How to order L E C C G 2 L Cable length K 0.3m L 0.5m 1 1m ii. Dimensions (4) Branch connector i. How to order L E C C G D Branch connector ii. Dimensions (5) Terminating resistor i. How to order L E C C G R ii. Dimensions 40 8.