Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

) Temperature characteristics Standards Compliant with CE marking, UL (CSA) Piping Specifications Model 01 02 N01 N02 C01 A2 B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 TSJ 1/4 Port size Rc 1/8 URJ 1/4 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Material Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316L PSE56-: Oil proof heavy-duty vinyl cable with air tube, 3 cores, 5.1, 3 m, Conductor

5 Port Solenoid Valve Series SV1000/2000/3000/4000

EX260 Serial transmission Calculation of dimensions L1 = 12.5 x n1 + 16 x n2 + 88.7 L2 = 12.5 x n1 + 16 x n2 + 48 M = L1/12.5 + 1 Remove all numbers after the decimal.

Metal Seal/Rubber Seal Series VQ Body Ported

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB, CA1 T0425 x 1 m Tube bore x Length VQ0149-C4 Speed controller AS2001F-04 AN103-X233 Silencer Tube bore x Length T0604 x 1 m 30 41 VQ11 -C6 Speed controller AS3001F-06 Silencer AN103-X233 T0806 x 1 m Tube bore x Length VQ2149-C8 Speed controller AS3001F-08 Silencer AN200-KM8

Rotary Clamp Cylinders

Operating range Cylinder model C D 8 8 8 8 Mounting bolt size M3 x 50 L M3 x 60 L M3 x 50 L M3 x 60 L M5 x 75 L M5 x 85 L M5 x 75 L M5 x 85 L M5 x 85 L M5 x 95 L M5 x 75 L M5 x 85 L M6 x 95 L M6 x 130 L M8 x 100 L M8 x 130 L 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

for 4), , C6 (One-touch fitting for 6) M5 x 0.8 1/8 Port size M5 x 0.8 A port M5 x 0.8 X port Note) M5 x 0.8 M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1R2 (PRA) 2R3 (ARR) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv SYJ52 Type SS3YJ5-20 Body ported for internal pilot M5 x 0.8 0.47 0.71 0.98 0.71 1.0 0.68 1.0 0.47

ZP

Thread dia. 4, 6 tube 4, 6, 8 tube 6, 8 tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Flat 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20 25, 32, 40, 50 Flat with ribs Deep Bellows Pad

VZ3000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB 4 x 1 m AS1301F-04 AN120-M5 SZ3120-M5 3-3-19 Series VZ3000 Construction 2 position single 2 position double 3 position closed center 3 position closed center/exhaust center/pressure center

REA/REB

8 REAR32 3 1.5 10.5 11 6.5 35 10.5 7 55 53.5 55 52 54 51 7 29 M8 x 1.25 x 10 REAR40 5 2 10 11 6.5 43 13 7 65 63.5 67 62 66 62 8 36 M8 x 1.25 x 10 QW T W X Y LD MM N P PW Q WS Z K L M Model REAR10 14 19.5 20 15 39.5 3.5 M3 x 0.5 4.5 M5 x 0.8 26 68 8 80 9 38 4 REAR15 18 21 25 18 54.5 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 14 53 5 REAR20 17 20.5 40 22 64 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 11 62 5

REA/REB

E K L LD M MM N P PW QW T TC W WP Q Model CC REBR15 M5 x 0.8 x 7 14 53 4.3 5 M4 x 0.7 6 M5 x 0.8 32 18 21 17 25 84 REBR25 M6 x 1 x 8 15 70 5.6 6 M5 x 0.8 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 105 RB REBR32 M8 x 1.25 x 10 13 76 7 7 M6 x 1 8.5 Rc 1/8 54 26 33 28 50 27 116 J X Y Z Model REBR15 18 54.5 98 DREBR25 28 72 125 REBR32 35 79 148 -X 20Data 10-2-71 71 Series REBR Proper Auto Switch Mounting

MGP

, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 x 0.8 M5 x 0.8 M5 x 0.8 15 10 19 53 37 10.5 M5 x 0.8 M5 x 0.8 Rc 1/8 12.5 10.5 25 53.5 37.5 11.5 M6 x 1.0 M6 x 1.0 Rc 1/8 12.5 13.5 28.5 WA WB Bore size (mm) Q R S T U VA VB X XA XB YY YL Z 30st or less Over 30st to 100st Over 300st 30st or less Over 30st to 100st 23 24 28 34 Over 100st to 200st 200

0.55

VP500-224-1 (M4 x 46) VP300-224-1 (M3 x 36) VP700-224-1 (M5 x 66) For valve mounting 10 Series VP300/500/700 How to Order Pilot Valve Assembly Caution When only the pilot valve assembly is replaced, it is not possible to change from V211 (Grommet or L/M-type) to V212 (DIN or Conduit type), or vice versa.

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r 140-150 16,9'8 Tube Connection Male thread Female thread 12",:18 M5XO.8,M6 x l M4 x 0.7,M5 x 0,8 Mounting Thread dia 110-1)6 M5XO.8,M6 x l M5 x 0.8,M6 x 1 12Q'9'32 M6X1,M8 x 1 M5 X0,8,M6xl ,M8 x 1.25 r ~40 150 M6Xl,M8X1 M6 x l,M8 x l ,25 Pad type Aat type FI, at with rib Deep type Bellows type Pad Oia.

3 Port Solenoid Valve Series SYJ300/500/700

P, R port thread type S 20 20 stations A A X port (External pilot type) M5 x 0.8 A port size Nil Rc X P R A port M5 x 0.8, C4 R port M5 M5 x 0.8 + + + + F G 1/8 C4 4 one-touch fitting A A P port X P R N NPT P port 1/8 N3 5/32" one-touch fitting 1/8 T NPTF X port (External pilot type) M5 x 0.8 R port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides

CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

Air Cylinder

Bore size A1 H MM ZZ 20 8 10 M4 x 0.7 86 25 8 10 M5 x 0.8 86 32 12 10 M6 x 1 88 40 13 10 M8 x 1.25 114 H ZZ + Stroke (mm) DBore size Stroke range A AL B1 F FF FX GA GB H H1 I KB MM N ND P S ZZ 20 1 to 150 18 15.5 13 30.4 M5 x 0.8 depth 9 22 22 8 27 5 28 8.2 M8 x 1.25 24 20 0 0.033 1/8 76 103 25 1 to 200 22 19.5 17 36.4 M6 x 1 depth 11 26 22 8 31 6 33.5 10.2 M10 x 1.25 30 26 0 0.033 1/8 76

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB/CA2 Series CJ2 Series CM2 4 x 1 m Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AS2301F-04 6 x 1 m 4 x 1 m AS1301F-04 AN120-M5 SYJ5120-M5 SYJ5140-01 AN101

Sine Rodless Cylinder Series REA/REB

PW QW W N X WS Q Z L T M Nil TN TF REAR10 19.5 15 39.5 14 20 68 80 8 M3 x 0.5 4.5 3.5 26 M5 x 0.8 4 38 9 REAR15 21 18 54.5 18 25 98 84 7 M4 x 0.7 6 4.3 32 M5 x 0.8 5 53 14 REAR20 20.5 22 64 40 17 NPT 1/8 107 95 7 M4 x 0.7 7 5.6 38 Rc 1/8 5 62 11 REAR25 21.5 28 72 40 20 NPT 1/8 105 7 117 M5 x 0.8 6.5 5.6 43 Rc 1/8 G 1/8 6 70 15 REAR32 24 35 79 26 50 NPT 1/8 116 130 7 M6 x 1 8.5 7 54

CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.