Valve Single Unit

Gasket Series Round head combination screw SX3000 SX3000-22-2 (M2 x 24) M3 x 30 (Matt nickel plated) M4 x 35 (Matt nickel plated) Gasket SY3000-11-25 SX5000 SY5000-11-15 SX7000 SY7000-11-11 1-6-67 Base Mounted Series SX3000/5000/7000 SX5000: SS5X5-41PStations -01/C6/C8 1 8 Rc (Pitch) (Pitch) 2n-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 (A, B port) SV SZ SY SYJ (Pitch) SX

Direct Operated

Max. system pressure (MPa) Max. operating pressure differential (MPa) Flow characteristics Weight (g) Av x 10-6m2 N.C. 1 0.7 0.3 1 0.7 1.2 1.6 0.3 0.6 1 0.3 0.5 1.2 1.6 0.6 1 0.3 0.5 Cv converted VX311-01 VX312-01 VX313-01 VX311-02 VX312-02 VX322-02 VX332-02 VX313-02 VX323-02 VX333-02 VX324-02 VX334-02 VX322-03 VX332-03 VX323-03 VX333-03 VX324-03 VX334-03 0.08 0.16 0.24 0.08 0.16 1.9 3.8

Table of Contents

PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS121F-M3-23 AS121F-M3-01 3.2 7.2 16.1 19.7 26.6 24.1 24 21.5 4 8.4 10.5 7.2 19.7 26.6 24.1 21.5 4 8.4 10.5 10 12.7 5.5 5.5 16.1 24 10 12.7 M3 x 0.5 M3 x 0.5 AS121F-M3-04 AS121F-M3-03 4 9.3 5/32" 9.3 AS121F-M5-23 AS121F-M5-01 1/8" M5 x 0.8 M5 x 0.8 17.3 8.4 17.3 22.1 3.2 22.1 8.4 AS121F-U10/32-23 AS121F-U10/32-01 12.7 1/8" 10-32UNF 10-32UNF 9.6 12.3 7 12.7 25 12.3 28.6 25.8 22.2 8 AS121F-M5

VK300

: VK332-DM5 01 Grommet: VK332-GM5 01 Max.10 68.8 (Bracket) 14 9 2A 2A 13 2 (Lead wire length) (Mounting hole for manifold) 2 x 3.2 2 x 3.2 16 [14] M5: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

15 34 SMC Cover diameter 1.6 Cross section 0.34mm2 R2 R1 5 1 P 3 Manual override 56 48 4 (54.5) 51 45 A, B port 22 16 16 SMC 9 9 9 2.1 PE port M5 X 0.8 (Not applicable to standard.) 18 18 5-Rc(PT)1/8,1/4 (P, A, B, R1, R2 port) 2.1 28 M5 X 0.8 External pilot port (Only external pilot style(R)) 0 1 01 02 0 1 01 02 DIN connector (Y): VQZ215 (R)lYl L plug connector (L): VQZ215 (R)lLl 97.5<98.5

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2(A) port] 12 7.5 41 2 x 3.4 (For mounting) 3.5 34 3.5 Manual override 2 A 2 A 24 + R 3 P 1 38.4 (Lead wire length) 53.8 Approx. 300 40.9 35.5 30.5 PE 16 7.5 7.5 1/8 [1(P), 3(R) port] 14.5 7 M5 x 0.8 (PE port) L-type plug connector (L): VQZ115l-lLl1-01 M-type plug connector (M): VQZ115l-lMl1-01 (Lead wire length) Approx. 300 50.7 [52.9] 53.8 [60.8] 65.1 [72.1] (Lead wire length) Approx. 300

E-P HYREG

Individual external pilot port: P1 M5 (VY1B01-00 only) 93 2 x 5.5 (For mounting) P1 P1 P1 P1 3.5 31 18.5 Port 3(R): 2 x 1/8 Exhaust from the both sides for 6 stations or more. 3.5 L1 L2 P=23.4 17.7 6.5 Common external pilot port: See Note for P1. 2 x M5 (VVEXB-2n-01 only) 22.4 22.4 Blanking plate Port 2(A): n x 1/8 61.5 94 9.5 R A A P1 31 26 19 P 9 8 18.45 P=23.4 29.95 10 25.5 Port 1(P)

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

pressure (0 to 1 MPa) 0 R(PT) 1/8, M5 X 0.8 01 R(PT) 1/4, M5 X 0.8 02 NPTF 1/8, M5 X 0.8 T01 NPTF 1/4, M5 X 0.8 T02 Sensor Specifications/General Purpose Fluid Applications PSE520-01 PSE520-02 PSE520-T01 PSE520-T02 Model 0 to 1 MPa Operating pressure range 2MPa Max. pressure Fluid non corrosive to SUS304, SUS630 Fluid Analog (1 to 5V, Load impedance: 10k or more) Output specification 12

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

VZA2000

-2-01 VZA2241-1-01 VZA2241-2-01 VZA2341-1-01 VZA2341-2-01 VZA2441-1-01 VZA2441-2-01 Single Double Closed center Exhaust center 0.60 0.60 0.56 0.60 0.43 0.43 0.15 0.20 0.15 0.15 0.13 0.15 0.59 0.59 0.59 0.59 0.30 0.30 0.22 0.22 0.15 0.15 0.14 0.14 Body ported Base mounted (With sub-plate) 2 position Body side M5 x 0.8 3 position M5 x 0.8 Sub-plate side Body side Sub-plate side Body side Sub-plate

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Unified thread (10-32 UNF) NPT N G F AS1200-M3 AS1400-M3 M3 M3 x 0.5 Male thread comes with R thread. AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 522 Series AS Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow characteristics are representative values.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(G), (H): SYJ54G H -01 1/8 (A port) 18 8.5 2-4.5 (For mounting) 4 34 Manual override A 24 P R 33.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] (Light/surge voltage suppressor) M5 x 0.8 (X port) 49.6 [56.6] + 34.2 8.5 16.5 21 X 6 32 24 15 17 9 1/8 (P, R port) 42 L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (W0

VK3000

valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) VK VK A port: Rc 1/8, M5 x 0.8 A, B port: Rc 1/8, M5 x 0.8 VV5K3 21 05 VT VK3120 Valve stations Thread type VK332 Q CE-compliant Nil CE-compliant 01 1 station Nil Rc Applicable blanking plate assembly VK3000-7-1A F N T G 20 20 stations R1 port: M5 x 0.8 R2 port: M5 x 0.8 P port: Rc 1/8 NPT Note) Applicable only for DIN terminal

Precision Regulator

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge234 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 G33-4-01 G43-4-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached

4/5 Port Air Operated Valve SYJA3000 Series

(34) 40 1/8 (P , R1, R2 port) 1.8 (Bleed port) 25.5 VPA4 20 12 1.6 P R2 R1 18 22 22 11.5 SYJA 18 1/4 (R1, R2 port) 31.5 1.8 (Bleed port) 27.2 63 VZA 01 02 2 position double: SYJA7220-01 2 position double: SYJA7240VTA 2 x 4.3 (For mounting) 34 8.5 63.6 2 x M5 x 0.8 (Pilot port) 2 x M5 x 0.8 (Pilot port) VGA B A 1 1 13 3 VPA B A 34 27 B A 1 1 1/8 (A, B port) 2 x 3.2 (For manifold mounting)

Base Mounted Metal Seal/Rubber Seal Series VQ

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 Series MB, CA1 Series Conditions Tube bore x Length Speed controller Silencer Tube bore x Length Speed controller Silencer Tube bore x Length Speed controller Silencer T0425 x 1 m AS2001F-04 AN103-X233 VQ0151 T0604 x 1 m VQ1101 AS3001F-06 AN103-X233 T0806 x 1 m AS3001F-08 VQ2101 AN200-KM8 2-4-119

SYJA3000

) 3.2 (0.18) 3 position closed center SYJA5320-M5 M5 X 0.8 M5 X 0.8 3.6 (0.2) [2.7 (0.15)] 3 position exhaust center SYJA5420-M5 70 PA,B: 4.0 (0.22) [2.7 (0.15)] A,BR1,R2: 3.4 (0.19) 3 position pressure center SYJA5520-M5 2 position single 4.5 (0.25) 79 (45) SYJA5140-01 Base mounted 2 position double 4.5 (0.25) 94 (60) SYJA5240-01 3 position closed center 3.4 (0.19) SYJA5340-01 M5 X 0.8 1

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

across flats) Applicable tubing O.D. mm Note 1) Weight g L1 L2 M D2 M M5 x 0.8 1/8 1/4 M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5