Table of Contents

DC (42 mA), 1.5 W DC (63 mA) (3), 0.5 W DC (21 mA) (4) 24 VDC 1 W DC (83 mA), 1.5 W DC (125 mA) (3), 0.5 W DC (42 mA) (4) 12 VDC 100 VAC Inrush 0.75 VA (7.5 mA), Holding 0.75 VA (7.5 mA) Power consumption (Current) Rubber seal 110 VAC Inrush 0.83 VA (7.5 mA), Holding 0.83 VA (7.5 mA) 200 VAC Inrush 1.0 VA (5 mA), Holding 1.0 VA (5 mA) 3 position closed center 220 VAC Inrush 1.1 VA (5 mA),

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-08 80 18 depth 12 52 13 38 11 16 d1 d2 YB-10 100 21 depth 14 62 17 50 14 19 L UT Weight (g) Bore size (mm) RS W T1 T2 V Part no.

IIIIIII

Cam Lever NVM121-NO1-02 = z-wayi 2 porl-lh" NPT w/One Way Cam Lever NVM131-N01-01 : 3-way; 2 porl:/e" NPT w/Std.

LX Series Compact Electric Actuators

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping I M <-iD;;,;; uo200 08; 12mm lead 10.05 100 08

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Meter-out Meter-in y y u u q w e r t q w e r t i i o o !

Fluoropolymer Piping Equipment

B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.

Mechanical Valves Series NVM, NVFM, NVZNI

Cam Lever NVM121-NO1-02 = z-wayi 2 porl-lh" NPT w/One Way Cam Lever NVM131-N01-01 : 3-way; 2 porl:/e" NPT w/Std.

CLQ

Component Parts No. q w e r t No. !7 !8 !

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Construction w e r !2 !4 L-Bracket !5 !5 w e r !2 !4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

VQ5000

How to order manifolds U side VV5Q 5 5 08 03 C 5 W n Base mounted Plug-in Kit designation 1 2 4 3 1. Stations 5.

CLQ

Bore size (mm) T1 M F E D B T2 Part no. 42 50 62 76 6 8 10 12 16 20 25 30 6.8 9 11 14 18 20 26 31 6.5 6.5 8.5 10.5 10 12 16 18 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 YA 03 Applicable cylinder bore size 32, 40 50, 63 80 100 03 05 08 10 Mounting bracket Bore size (mm) W V U Weight (g) Part no.

Series SV

Tie-rod base SS5V W 1 A1W D 05 U 10S Cassette base SS5V W D 05 16S 1 A1W U DIN rail length Enclosure IP67 specification 1 2 SV1000 SV2000 Series Standard length Nil 3 Specify a rail longer than the standard length.

Compact Cylinder with Lock Series CLQ

Bore size (mm) T1 M F E D B T2 Part no. 42 50 62 76 6 8 10 12 16 20 25 30 6.8 9 11 14 18 20 26 31 6.5 6.5 8.5 10.5 10 12 16 18 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 YA 03 Applicable cylinder bore size 32, 40 50, 63 80 100 03 05 08 10 Mounting bracket Bore size (mm) W V U Weight (g) Part no.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

0 q t t r r u u i i y w y Meter-in type Meter-out type !1 w Meter-in type Meter-out type Seal method: Face seal For G thread e !0 o q t r u i y w !2 Meter-in type Meter-out type Component Parts No.

Compact manifold regulator ARM5 Series

ARM ARM Fitting size 18.5 C4 C6 N3 N7 4 6 5/32 1/4 ARP 8.5 14 IR-A IR Straight type IRV VEX SRH V SRP SRF Elbow type ITV IC ITVH W X ITVX Y PVQ VY1 One-touch fittings for regulator VBA VBAT Fitting size Elbow Elbow Elbow Straight V W X Y AP100 4, 5/32 2.5 6 11 35.5 6 3 6.5 11 36 1/4 6.5 6 11.5 38.5 8, 5/16 Note) The O-ring is attached.

2/3 Port Valve

Power dissipation (W): For AC , W=V/A cos. For DC, W=V/A (Note) cos (Note) cos shows power factor. w Surge voltage The surge voltage is a high voltage generated momentarily when cutting the power supply. e Hum sound The hum sound is a noise generated through repeated adsorption and releasing on an armature adsorption surface.

Vacuum System Peripherals:

Left Right 08 8 T NPTF 2 stations 1 station w How to Order Vacuum Module Model for Ejector System Fill in the blanks below with symbols of necessary specifications. w-1 Common specifications Common Specifications (Symbol , , , , , , ) Common specifications Individual specifications Light/Surge voltage suppressor Pilot valve specifications Individual specifications DC: 1 W (With indicator

0.4

W) High-pressure type (1.0 MPa, 0.95 W) Negative common External pilot Nil (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C.