SL5200 (ASME B40.1 Grade B or better) psig/bar 4) (No code) Accuracy Cleanliness No oil ASME B40.1 level IV No oil Brass Polycarbonate Brass Phosphor bronze B Case Window Socket Bourdon tube Material MPa MPA 1.14 (29) 2.28 (58) 2.1 (53.5) 2.12 (54) NPT 1/4 0.42 (10.5) inch (mm) 3) Part number of pressure gauge itself.
(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
D-A59W D-Z7/Z80 D-M9/M9W D-M9A Bore size (mm) Bore size (mm) D-Z7/Z80 D-A5/A6 A B A B A B A B A B A B Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs 40 50 63 80 100 40 50 63 80 100 11.5 8.5 8 5 13 10 5 2 27 28.5 27 34 35.5 28.5 29 27 13 8 9.5 4.5 14.5 9.5 6.5 1.5 33 33.5 33 38.5 39.5 34.5 33 33 4.5 0 8.5 3.5 47.5 38.5 14.5 9.5 11 6 16 11 8 3 38.5 38 38.5 43.5 45 38.5 28 37 8.5 3.5 12.5 7.5 54
Light/Surge voltage suppressor Electrical entry (2) Manifold base (5) Digital vacuum switch unit 06 ZZX1 R B 21 C 0X ZSE3 D Supply port location Stations 01 1 Unit for replacement Thread type R L Left side Right side Nil F G Rc 1 8 Piping specifications 08 8 B Both sides C Connector (0.6 m) T NPTF Pressure indication System for external vacuum (3) Adsorption confirmation switch unit Output
(Request):0106000C0001EC [CR][LF] (Response):0106000C0001EC [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 06 Function 06 Function 000C Address of specified register 000C Address of register to write 0001 Information written to 000Ch (Stop flag) 0001 Information of register to write EC LRC EC LRC 4.8 Explanation of function codes HRSH
Description POM Valve 19033 19014 19024 e Stainless steel Spring 19037 19015 19025 r NBR O-ring 20 x 17 x 1.5 t NBR Ring 19016 19026 y Brass, NBR Seat ring 19013 19023 u Dimensions Model Port size L1 H B AK2000-01/02 22 25 1/8, 1/4 50 AK4000-02/03/04 36 36 1/4, 3/8, 1/2 67 AK6000-06/10 50 50 3/4, 1 95 Caution Be sure to read before handling.
C A 1(P) 2(A) Air Supply Warning B 1 Mount air filter to supply side close to valve. Filtration rating has to be 5m or smaller. 3(R) Model VHS2500 VHS3500 VHS4500 VHS5500 A 60 78 85 136 B 20 29 32 56 C 12.8 12.8 12.6 32 D 40 53 70 90 E 44 53 64 80 F 33 42 49 65 G 28 29 36 54 H 7.5 7.5 10 10 3.6-18
A B A B A B A B A B A B MB1 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 CA2 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5 32 0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5,
2 (A) 4 (B) 2 Note) Not applicable to S kit. 1 A Note) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) Coil voltage B: Locking type (Slotted) N.C N.C 12 VDC 5 6 4 position dual 3 port valve (B) 2 position double (metal) 24 VDC Note) (A) 4 (B) 2 (A) 4 (B) 2 B Note) S kit is only available for 24 VDC.
System: Vacuum Pump System, Single Unit, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: L-type Plug Connector Lead Wire w/Connector, Vacuum, V Port: Inch Size, ø1/4" One-touch Fitting, Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw Attached)], Pump System PE Port
System: Vacuum Pump System, Single Unit, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: L-type Plug Connector Lead Wire w/Connector, Vacuum, V Port: Metric Size, ø8 One-touch Fitting, Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw Attached)], Pump System PE Port Female
System: Vacuum Pump System, Single Unit, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: L-type Plug Connector Lead Wire w/Connector, Vacuum, V Port: Metric Size, ø8 One-touch Fitting, Bracket: w/o Option, Pump System PE Port Female Thread: with Pump System PE Port Female Thread, Individual
System: Vacuum Pump System, Single Unit, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: L-type Plug Connector Lead Wire w/Connector, Vacuum, V Port: Metric Size, ø8 One-touch Fitting, Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw Attached)], Pump System PE Port Female
System: Vacuum Pump System, Single Unit, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: L-type Plug Connector Lead Wire w/Connector, Vacuum, V Port: Inch Size, ø1/4" One-touch Fitting, Bracket: w/o Option, Pump System PE Port Female Thread: w/o Option, Individual Release Pressure Supply
System: Vacuum Pump System, Single Unit, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: L-type Plug Connector Lead Wire w/Connector, Vacuum, V Port: Metric Size, ø8 One-touch Fitting, Bracket: w/o Option, Pump System PE Port Female Thread: w/o Option, Individual Release Pressure Supply
System: P (Vacuum Pump System, Single Unit), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (w/o Pressure Sensor, Digital Pressure Switch for Vacuum), Connector: L2 (L-type Plug Connector Lead Wire w/Connector), Vacuum, V Port: 07 (Inch Size, ø1/4" One-touch Fitting), Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw Attached
System: P (Vacuum Pump System, Single Unit), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (w/o Pressure Sensor, Digital Pressure Switch for Vacuum), Connector: L2 (L-type Plug Connector Lead Wire w/Connector), Vacuum, V Port: 08 (Metric Size, ø8 One-touch Fitting), Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw Attached
System: P (Vacuum Pump System, Single Unit), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (w/o Pressure Sensor, Digital Pressure Switch for Vacuum), Connector: L2 (L-type Plug Connector Lead Wire w/Connector), Vacuum, V Port: 08 (Metric Size, ø8 One-touch Fitting), Bracket: w/o Option, Pump System PE Port Female Thread: C (with Pump System
System: P (Vacuum Pump System, Single Unit), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (w/o Pressure Sensor, Digital Pressure Switch for Vacuum), Connector: L2 (L-type Plug Connector Lead Wire w/Connector), Vacuum, V Port: 08 (Metric Size, ø8 One-touch Fitting), Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw Attached
System: P (Vacuum Pump System, Single Unit), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (w/o Pressure Sensor, Digital Pressure Switch for Vacuum), Connector: L2 (L-type Plug Connector Lead Wire w/Connector), Vacuum, V Port: 07 (Inch Size, ø1/4" One-touch Fitting), Bracket: w/o Option, Pump System PE Port Female Thread: w/o Option, Individual