4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

3 position 59(33) 73(47) 61(35) 77(51) 2 position 5 Port Base mounted type (With sub-plate) 1.8 (0.1) Body ported type M5 0.8 76(50) 80(54) 3 position 33 47 35 51 2 position 4 Port Base mounted type For manifold use only Note1) 1.2 (0.067) _ ( ) 50 54 3 position Note1) In case of M5 and mounted on manifold base.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Pg.7 Indicator light 3.5 to 7 32 Cover diameter 1.5 Cross sectional area 0.23mm2 61.5 54 36 M type plug connector (M): VQZ2 2(R)M -N3T, N7T, M5T 89 37.5 300 (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light 77 35 Series VQZ Body Ported Type VQZ300 Dimensions: VQZ300 (mm) Valve Scale: 40% N7T, N9T, N11T, 02T Grommet (G): VQZ3 2(R)G -N7T, N9T, N11T, 02T N7T

AC Servo Motor Driver (SSCNET Type)

Parameter setting (PLC side) . 53 7.1 SSCNET Setting .53 7.2 Movement amount per pulse .54 7.3 Stroke limit .55 7.4 Operating conditions .56 8. Home position return (PLC) . 57 8.1 Returning to home position .57 9. Positioning operation (PLC) . 58 9.1 Setting of Operation data .58 9.2 Movement MOD .62 10.

4/5 Port Air Operated Valve Series SYJA3000

Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center 48 (22) 51 (25) Body ported 5 port base mounted (with sub-plate) 4 Port base mounted (For manifold) Note 1) 2 position 0.36 0.12 0.46 0.35 0.12 0.46 0.33 0.12 0.47 0.31 0.12 0.47 SYJA340-M5 M3 x 0.5 M5 x 0.8 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54

PFA/PFW

Construction For air Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR SUS PBT PBT Flow direction 5 Series PFA Digital Flow Switch for Air For Air Dimensions (mm)/ Integrated Display Type 1in=25.4mm Scale: 70% PFA7 0-m 1 5 -27 (N) -67 (N) 67 98 58 6 82 17 1.6 60 FLOW SWITCH UP 34 54 44 SET OUT1 OUT2 DOWN FOR AIR 24 2-Piping port size 4-4.5 40 50 (41.5

SYJA3000

SYJA3120-M3 Body ported 5 port base mounted (With sub-plate) 25 2 position double SYJA3220-M3 0.9 (0.05) 3 position closed center SYJA3320-M3 M3 X 0.5 M3 X 0.5 3 position exhaust center SYJA3420-M3 28 3 position pressure center SYJA3520-M3 2 position single SYJA3140-M5 48(22) Base mounted 2 position double SYJA3240-M5 51(25) 1.8 (0.1) 3 position exhaust center SYJA3340-M5 M3 X 0.5 M5 X 0.8 54

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ1110-54 setsValve No. (Stations 1 to 3) VQ1210-54 setsValve No. (Stations 4 to 7) VVQ1000-10A-11 setBlank plate No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Pg.7 Indicator light 3.5 to 7 : AC 61.5 54 M plug connector (M): VQZ2l2(R)-lMl-C4, C6, M5 36 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 89 Indicator light 77 78 37.5 42.5 : AC 2.10-9 VQZ100/200/300 Body Ported Dimensions: VQZ300 Valve single unit C6, C8, C10, 02 Grommet (G): VQZ3l2(R)-lGl-C6, C8, C10, 02 C6: One-touch fittings for 6 C8: One-touch fittings for 8 300 (Lead wire) 75.5

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

39 8 13.7 4.2 17 79.5 54 39 8 13.7 4.2 17 B C D E F G H ZQ ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 14.2 S type: White color L type: Black color 14.2 Applicable tubing diameter N ZF 14.2 Applicable tubing diameter E 14.2 17.2 ZP 17.2 19.95 ZCU 19.95 93.3 58.5 41 10 15.3 4.2 19 ZH15DS-10-03-12 22.45 AMJ

CE

25 70 0.5 Width across flats 8 5 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7.5 2-M5 x 0.8 (Port size) 71.5 103 + Stroke 24 127 + Stroke 2 10-12-12 12 High Precision Stroke Reading Cylinder Non-rotating Piston Type Series CEP1 Foot style: CEP1L12 Stroke 4-4.5 (Positioning pin hole) 40 5.5 13 25 6 RE A B +0.05 +0.02 4 REC CX 66 54

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

4 x M5 x 0.8 (Piston rod thread and rack thread) 5.5 2 x M5 x 0.8 Vacuum port H 7 8.4 16.8 0.5 7 9 7 12.5 8 6 6 O S 15 31 (46) 20 K 12.4 15 15 7 7 4 4 20 When open F 10 4 x M4 x 0.7 through (Thread for mounting attachment) 34 10 When open G (mm) J 24 39 57 H 116 158 196 G 92 134 172 F 72 94 112 E 26 42 60 D 67 83 101 B C 36 52 70 A MHL2-10D MHL2-10D1 MHL2-10D2 11221122112296 124 162 38 54

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fl {rrrn 1m) o o t: 0 16" :Il o Co 10{) 25g004 33 IY-12 5 32:::5; 79.5 69.5 04 x40 1-12A 125 54 46 M30 x 1.5 27 125 4 8 25:t m 28 ~g[84 39 IY-14 5 1-14A 48 M30x1.S 30 140 .78.5 4 140 8 54 105 36 ::8: 1 8M ~4:x4Q 28 :Z~L 32 _ g' 39 IY-16 5 M36x1.5 94.5 94.5 04 x40 1-16A 160 8 60 55 110 40 :3:1 34 160 4 32 :::li1: ~ Spilt pin IS Included -

Compact Cylinder with Solenoid Valve/

Bore size (mm) Stroke range (mm) OB P1 P2 Q RA RB S V W Y Z 32 40 50 63 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 59 38 5 to 100 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 67 46 5 to 100 11 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 14 8 17 54 63 83 58 10 to 100 14 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 18 10.5 17 54 63 97 69 10 to 100 6 Compact Cylinder with Solenoid Valve/Guide Rod Type Series CVQM Auto Switch

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

(Normally closed) in vacuum passage are reversed: Function plate N.C. indicated on the plate N.O. in vacuum passage (Normally open) N.O. indicated on the plate N.C. in vacuum passage (Normally closed) 1309 VP3145 Series Dimensions: VP3145 Grommet: VP3145-G A B 87.4 54 30 71 101 G1/2 1/4 (PA port) [External pilot specification] Lead wire length 200 mm Manual override 3/4 (EXH port) 1/4

Plug-in Unit

For each additional input block, add 54 mm.) n: Stations (Maximum 16 stations) n L L1 L2 1 131 266 2 156 291 3 181 316 4 206 341 5 231 366 6 256 391 7 281 416 8 306 441 9 331 466 10 356 491 11 381 516 12 406 541 13 431 566 14 456 591 15 481 616 16 506 641 2-2-37 Base Mounted Series VQC VQC1000/2000/4000 Kit (Serial transmission kit) for I/O S IP67 compliant Compatible network CC-Link The

Foot Pedal Type

MODEL VM2 SMC 54 71 177 152 Lock lever LOCK UNLOCK T.T. 2.5 (70) 30 18.5 11 B A XT34-60/67 2 x Rc1/8 (Port 2, 4) 38.2 26.2 2 x M5 x 0.8 (Port 3, 5) Rc1/8 (Port 1) 14-E624 0.2 32 A 2 x M5 x 0.8 (Port 3, 5) 39.2 33.2 27.2 XT34-60/67 2 x Rc1/8 (Port 2, 4) Rc1/8 (Port 1) 3 x 6.5 mounting hole 53 XT34-67 (Without lock) 159 3 x 6.5 mounting hole MODEL VM2 SMC 54 71 177 152 T.T. 2.5 (70) 30 18.5

Vacuum Pad: Ball Joint Type

flats 3 2 A B 3 2 A B Dimensions: 10 mm Stroke (mm) B Stroke: 10 mm A C D F H I J Y Model ZPT10F10-B5-A10 10 12 10 12.5 27 38.5 74.5 1.5 ZPT13F10-B5-A10 13 15 23 10.5 13 27.5 39 75 2 ZPT16F10-B5-A10 16 18 1/8 (Rc, NPT, NPTF) Hexagon width across flats 13 Additional Dimensions by Stroke (mm) H I J Stroke M14 x 1 20 +10 +38 Hexagon width across flats 19 +28 30 +20 +48 40 +30 +84 5 5 D C +54

Clean Regulator/Fluororesin Type

) 23 32 SRF10 1/4" A1 A2 B1 B2 Model SRF10S-1S07 SRF10S-1S0711 SRF10S-1S11 SRF10S-1S1107 SRF10S-2S07 SRF10S-2S0711 SRF10S-2S11 SRF10S-2S1107 31 48 31 48 OUT IN 28 51 54 26 28 51 28 51 31 48 28 52 28 52 27 55 5.5 27 55 A1 A2 27 55 28 52 B1 B2 Tube extensions 23 Pilot port Rc, NPT 1/8 R 12 32 54 26 48 40 1 2 SMC 4 x 3.5 (Mounting hole) 23 5/32" OUT IN 1/4" 5.5 32 30 30 884 Clean Regulator

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

Compact Cylinder with Air Cushion

30 to 100 50 49.5 9 75.7 26.5 18 43.5 mm LX X X LG Y Y Bore size (mm) 3.2 4-LD LS + Stroke A + Stroke LG LH LX LY LZ X Y LZ 32 4 57 57 11.2 30 71 5.8 40 4 64 64 11.2 33 78 7 Rod end male threads 50 5 79 78 14.7 39 95 8 Foot bracket material: Carbon steel Rod end nut L1 Front flange type Front flange type/RQF, RDQF mm Bore size (mm) Stroke range (mm) A B FD FT FV 20 to 100 32 37 5.5 8 48 54