Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

306 13-/22-MXQ2010 13-/22-MXQ2020 13-/22-MXQ2030 13-/22-MXQ2040 13-/22-MXQ2050 13-/22-MXQ2075 13-/22-MXQ20-100 13-/22-MXQ20-125 13-/22-MXQ20-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20-50. 817 MXQ 1322Air Slide Table Dimensions: MXQ20 1322Axial piping (20): MXQ20-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure

CQ2

Rc(PT)3/8 66 6 21 22 25 20 98 77 43 250, 300 100 M20 X 2.5 132.5 M12 X 1.75 23 67.5 26 22 97.5 156 Rc(PT)3/8 75.5 6.5 27 27 30 22 117 94 59 Note 1) All the 125 to 200mm stroke types are in 25mm increments.

SMC Pneumatic Clean Series

-: 50 to 400 mm/s +1.4 0 Bottom mounting style/Front mounting style Mounting style 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Grade 2, 21-: Grade 3 11-/22-: Grade 1 Grease Particle generation grade (Refer to front matter pages 13 to 22 for details.)

KJ

9 17 1 2 22 3 8 KQ2L13-03S 33.5 21.7 38.5 36 62 28 17 9.6 1 2 KQ2L13-04S 37.5 40 22 Reference dimensions after R thread installation.

Table of Contents

19 41 562 MHKL2-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

10 M22 x 1.5 182(196) 22 22 80 Rc 3/8 60.5 Up to 300 301 to 1400 20 108(122) 37 60 16(20) 71 110 M12 x 1.75 depth 22 10 M26 x 1.5 182(196) 22 22 100 Rc 1/2 71 Up to 300 301 to 1500 CP95 Note) ( ): Denotes the dimensions for long stroke.

JIS Standard Hydraulic Cylinder

22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 65 80 25 to 1800 100 39 15 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 80 100 25 to 1800 Rod series Tolerance (mm) B-series rod C-series rod Bore size (mm) Bore size (mm) LH LX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 66 220 0.025 0.064 0.15 0.18 40 40 40 36

CV/MVGQ

25 32 40 Stroke range NA N 41 M8 x 1.25 M20 x 1.5 18 15.5 8 13 65.3 28 5 19.8 Up to 300 13 26 5 20 0 0.033 15 24 13 45 5.5 M10 x 1.25 M26 x 1.5 Up to 300 22 19.5 17 32 10 6 70.5 33.5 22 26 0 0.033 15 30 M26 x 1.5 Up to 300 22 19.5 17 32 12 13 45 6 76.5 37.5 5.5 M10 x 1.25 25.8 26 0 0.033 15 34.5 21 16 50 46.5 7 M14 x 1.5 M32 x 2 29.8 Up to 300 24 22 41 14 8 84.5 32 0 0.039 42.5 21.5 Z ZZ

CV/MVGQ

25 32 40 Stroke range NA N M20 x 1.5 41 M8 x 1.25 13 5 15.5 28 19.8 18 8 65.3 Up to 300 13 26 5 20 0 0.033 24 15 M26 x 1.5 45 M10 x 1.25 13 5.5 19.5 33.5 22 22 10 70.5 Up to 300 17 32 6 26 0 0.033 30 15 M26 x 1.5 45 M10 x 1.25 13 5.5 19.5 37.5 25.8 22 12 76.5 Up to 300 17 32 6 26 0 0.033 34.5 15 M32 x 2 50 M14 x 1.5 16 7 21 46.5 29.8 24 14 84.5 Up to 300 22 41 8 32 0 0.039 42.5 21.5 ZZ Z

CL

) CLM2F40SCLM240, #4 (#1+4+#12) CAD 3.1-22 Fine Lock Cylinder/Double Acting Single Rod Series CLM2 Single Clevis (C) CLM2C Bore size Stroke CL MLGC CNA CB CV/MVG (mm) BN 80 90 90 Bore A 18 22 22 24 AL 15.5 19.5 19.5 21 B1 13 17 17 22 BC 38 45 45 52 BP 1/8 1/8 1/8 1/8 BQ BZ 57.5 69 69 76 CD 9 9 9 10 CX 10 10 10 15 D 8 10 12 14 F 13 13 13 16 GA 73.5 83.5 83.5 90.5 GC 8 9 9 8 GD 55 64.5 64.5

Air Cylinder

22 60.5 20 100 Rc1/2 22 22 71 20 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 MB MB1 CA2 CS1 For dimensions other than listed above, refer to the dimensions with rubber bumper

Table of Contents

16 24 43 45 39 80 62 80 H M 14 8 18.5 14 42 A 17 L 54.3 47.3 49.3 60.5 54.5 17 10 24 21 22 19 22 12 34 22 Connection thread Reference dimensions of R thread after installation.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For auto switch mounting position and its mounting height, refer to page 7-6-22.

C85

6 12 9 16 14 9.5 16 19.7 6H9 16 M5 x 0.8 M16 x 1.5 M6 x 1 18.3 6.2 24 8 5 10 13 5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 20 M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 32 11 62 126 6 13 115 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 32 11 65 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the case

5 Port Solenoid Valve Series SY3000/5000/7000/9000

1 49.5 55.1 (Lead wire length) Approx. 300 37.6 61.7 [68.7] Pg7 105.8 86 [88.2] 94.9 87.5 81 18 18 18 18 18 18 18 18 28 4.3 28 28 28 4.3 9.5 9.5 4.3 4.3 9.5 9.5 22 22 22 22 Note) Refer to page 340 for dimensions of connector types. 135 Series SY3000/5000/7000/9000 Dimensions: Series SY5000 [ ]: AC 2 position double Grommet (G), (H): SY5240(R)-02 G H (A, B port) 1/4 18 9.5 (Light/surge voltage

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: B (w/o Pressure Sensor), Air Pressure Supply, P Port

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: B (w/o Pressure Sensor), Air Pressure Supply, P Port

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: P1A (Pressure Sensor, 0 to -101kPa, Accuracy ±1% F.S.), Air Pressure

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Q1 (Supply: Latching Positive Common, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: B (w/o Pressure Sensor), Air

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: LO (L Plug Connector w/o Connector, Light/Surge Voltage Suppressor), Manual Override: B (Locking Type), Suction Filter: None, Pressure Sensor Specs: P3 (Pressure Sensor, -100 to 100kPa, Accuracy ±2% F.S.), Air Pressure