High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

Air Cylinder

Different surfaces Same surface Different surfaces Same surface CJ1 D-M9l 5 15 Note 1) 40 Note 1) 20 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 55 + 35 (n 2) (n = 2, 3, 4, 5) CJP D-M9lW 10 15 Note 1) 40 Note 1) 20 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 55 + 35 (n 2) (n = 2, 3, 4, 5) CJ2 D-M9lA 10 15 Note 1) 40 Note 1) 25 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 35 (n 2) (n = 2, 3, 4, 5) JCM D-A9l 5

Digital Flow Switches

g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W2/3.

CNA

D-A44 D-A44C G 1/2 (Applicable cable O.D. 6.8 to 11.5) Auto switch HW A 49.5 B G 1/2 (Applicable cable O.D. 6.8 to 11.5) Hs 31.5 56 A 36 B 36 Auto switch Auto Switch Mounting Height Proper Auto Switch Mounting Position D-G59F D-F59F D-G5W D-K59W D-G5BAL D-G5 D-K59 D-G5NTL D-F5 D-J5 D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F Auto switch model D-B59W D-A59W D-F5NTL Auto

CNA

D-A44 D-A44C G 1/2 (Applicable cable O.D. 6.8 to 11.5) Auto switch HW A 49.5 B G 1/2 (Applicable cable O.D. 6.8 to 11.5) Hs 31.5 56 A 36 B 36 Auto switch Auto Switch Mounting Height Proper Auto Switch Mounting Position D-G59F D-F59F D-G5W D-K59W D-G5BAL D-G5 D-K59 D-G5NTL D-F5 D-J5 D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F Auto switch model D-B59W D-A59W D-F5NTL Auto

CNA

16 (n-4) 1 10+55 2 n=4, 8, 12, 16 (n-4) 120+55 2 n=4, 8, 12, 16 10 75 80 90 D-A59W With 1 n (Same) Different mounting 35 55 75 75 80 80 90 90 With 2 With n 15 90 100 110 120 With 1 With 2 (Different and same) With 1 Same side D-F5lW D-J59W D-F5BA D-F5lF D-F5NTL Different mounting n=2, 3, 4, 35+30(n-2) n=2, 4, 6, 8, 75+30(n-2) n=2, 4, 6, 8, 80+30(n-2) n=2, 4, 6, 8, 90+30(n-2) 25 110 120

ISO Standard Hydraulic Cylinder

Auto switch models Bore size (mm) 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F5BA/F59F/F5NT D-A5/A6/A59W D-Z7/Z80 BS5-125 BMB5-032 BA7-040 BA7-040 BA7-063 CHQ CHK BT-12 BT-03 BT-04 BT-04 BT-06 CHN BS4-125 BMB4-032 BA4-040 BA4-040 BA4-063 Note 1) D-A5/A6/A59W cannot be mounted to 40, 50.

Tie-rod Type Hydraulic Cylinder

No. 1 1 Size M4 x 0.7 x 8L BTBT-03, BT-04, BT-05 BT-06, BT-08, BT-12 D-A5, A6 D-F5, J5 D-Z7, Z8 D-Y5, Y6, Y7 BA4-040, BA4-063, BA4-080 BMB4-032, BMB4-050 2 Set screw M4 x 0.7 x 6L 2 BMB5-032 BA7-040, BA7-063, BA7-080 D-A9 D-M9 BBA1 D-A5, A6 D-F5, J5 BT-16, BT-18A, BT-20 BS4-125, BS4-160 BS4-180, BS4-200 BS5-125, BS5-160 BS5-180, BS5-200 D-Z7, Z8 D-Y5, Y6, Y7 When D-F5BA and G5BA auto switches

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-K39A D-A44A D-H7W D-H7BAL D-H7F D-G5NTL D-C73C D-C80C D-H7 D-H7C D-B5 D-B6 D-B59W MGG MGC A 1(0) 1(0) 2(0) 7 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

D-G39A D-K39A D-A44A D-H7W D-H7BAL D-H7F D-G5NTL D-H7 D-H7C D-C73C D-C80C D-B5 D-B6 D-B59W MG MGP A 1(0) 1(0) 2(0) 7 B 0(0) 0(0) 1(0) 6 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B 5(3) 5(3) 6(4) 11 B A B 1.5(0) 1.5(0) A 7(5) 7(5) 8(6) 13 B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 A Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5

CV/MVGQ

D-Y7W D-Y7WV Auto switch model D-F5 D-J5 D-F5W D-J59W D-F59F D-A5, D-A6 D-A3/A3C D-A44/A44C D-G39/G39C D-K39/K39C D-B5/B64 D-G5W D-K59W D-G59F D-G5 D-K59 D-G5NTL D-A59W D-F5NTL Bore size (mm) A A A A A A A B B B B B B B RE A B 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4)

CV/MVGQ

/Y7PV D-Y7W D-Y7WV D-G5W D-K59W D-G59F D-G5 D-K59 D-G5NTL Auto switch model D-F5 D-J5 D-F5W D-J59W D-F59F D-A5, D-A6 D-A3/A3C D-A44/A44C D-G39/G39C D-K39/K39C D-A59W D-F5NTL D-B5/B64 Bore size (mm) A A A A A A A B B B B B B B 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5

CLA

~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

3 5 VBUS LG 1 D USB 14 MO2 D 10VDC GND 11 LG Servo motor CN2 Encoder 7 8 MD MDR 3 MR 2 4 MRR LG E M Note 1.

90

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 04 06 08 10 For 2 stations manifold For 4 stations manifold For 6 stations manifold For 8 stations manifold For 10 stations manifold d Model and dimensions D Applicable size d 6 8 1/4" 5/16" Weight (g) Note A L D Symbol 06 08 07 09 White White Orange Orange 18 20.5 18 20.5 35 39 35 39 8 10 8.5 10 1 2 1 2 Connector type 1 2 D sub-connector (

Speed Controller with Uni One-touch Fitting AS Series

AS-D Bore size AS-T U01 Uni Uni Uni Uni 1 8 1 4 3 8 1 2 U02 U03 U04 ASP ASN Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.