F/ISE

pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction None Nil NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output Bracket D NPN

IR1000/2000/3000

N01 Connection NPT 1/8 N02 Connection NPT 1/4 Port size N03 Connection NPT 3/8 Option specifications Application Size Symbol N04 Connection NPT 1/2 IRV3000 IRV2000 IRV1000 F01 Connection G 1/8 01 02 03 04 1/8 1/4 3/8 1/2 F02 Connection G 1/4 F03 Connection G 3/8 F04 Connection G 1/2 Accessory (Option) Part No. Part no.

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.

E-P HYREG ® Series VY1 1

0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

VDW Series

Materials Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N Brass 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size M5 1/8 (6A) 1/4 (8A) Symbol 02 : 10 2 stations : 10 stations 30 10 M5 01 02 Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (for Manifold) VDW 2 3 5

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output Bracket D NPN

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Materials Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N Brass 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size M5 1/8 (6A) 1/4 (8A) Symbol 02 : 10 2 stations : 10 stations 30 10 M5 01 02 Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (for Manifold) VDW 2 3 5

HRX-OM-X071

HRX-OM-X071 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

NAMUR

Note) For other voltages, please contact SMC. 3-12-1 A Series VFN2000N Dimensions (mm) VFN2120N--02 148 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 37 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 3-1/4 3 4 5 1 Manual override (Non-locking) 23 23 VFN2220N--02 224.5 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 189 3-1/4 3 4 5 1

Thermo-chiller

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

HRS100/150

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

VXA21/22

LVQ Model VXA212 VXA213 VXA21 VXA22 VX070-020 LQ 1 8 1 4 1 4 3 8 1 2 01 ( / ) 02 ( / ) 02 ( / ) 03 ( / ) 04 ( / ) VXA223 VXA224 VXA225 VXA226 VX070-022 LVN VX070-029 TI/ TIL PA Ordering example (Example) Series VXA21, Orifice size 4.5 mm, Normally closed, Rc 1/4 (Part no.) VXA2130-02 PAX PB 17-3-95 4 The VX series will be revised shortly.

53

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

Lubrication Equipment

ALF400 ALT-9 1.17-11 Auto Feed Lube ALF400 to 900 Operating pressure range Tank and line pressure How to Order Auto Feed Lube ALF 40 02 0 Option Auto Feed Lube Port size Symbol Description Applicable model W/ bracket ALF400 to 600 B 02 03 04 06 10 12 14 20 4 1 Body size 8 3 AC 40 50 60 80 90 2 1 2 1 4 3 4 3 AV 1 1 2 1 1 1 2 2 1 4 1 AU 2 1 AF Thread Rc (PT) NPT G (PF) N F AR Note 1) Tank

Air-hydro Unit

VNA VNA 2 1 2 1 2 1 VNA VNA D-X Technical Data 1177

HRX-OM-R028

HRX-OM-R028 Contents Contents Chapter 1 Read before using. 1-1 1.1 Communication mode and operation method .1-2 1.2 Communication port.1-3 1.3 Key operations.1-4 1.4 Parameters .1-6 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication .2-1 2.1.1 Precautions wiring communication. 2-1 2.1.2 Precautions after wiring and before communication . 2-1 2.2 Communication

HRX-OM-T004

HRX-OM-T004 Contents Contents Chapter 1 Read before using . 1-1 1.1 Communication mode and operation method . 1-2 1.2 Communication port . 1-3 1.3 Key operations . 1-4 1.4 Parameters . 1-6 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring and before communication . 2-1 2.2

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006