Part Number Description: O-RING (XLA) Product Line: Z Product Line Description: VACUUM SERIES Family Code: 681 Family Description: XLA HIGH VACUUM VALVE Class Code: 21 Part Code: 2 Reference Code: L Click here to report information errorImage shown may not match exact part number
HIGH VACUUM VALVE, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 11.62871 lb
Smooth Vent Valve Chamber XLA XL XVD By switching to the main valve circuit, the main valve opens and the full amount is introduced into the chamber. XLQ Chamber XM XY DXSA XVD XVD XGT CYV 523 XVD Series Specifications Model XVD2-02V XVD2-02S Valve type Normally closed (Pressurize to open, Spring seal) Fluid Nitrogen, Air, Inert gas, etc.
Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring.
Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring.
Series XLA-2 are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLA-2 valves are single-acting, normally closed, with a bellows seal over the shaft and spring.
Description Material Special resin Seal belt MY16-16A-Stroke MY20-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke 1 !6 Stainless steel NBR NBR NBR NBR NBR NBR MY16-16B-Stroke MY20-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40-16B-Stroke MY50-16B-Stroke MY63-16B-Stroke 1 Dust seal band !
Description Material Special resin Seal belt MY16-16A-Stroke MY20-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke 1 !6 Stainless steel NBR NBR NBR NBR NBR NBR MY16-16B-Stroke MY20-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40-16B-Stroke MY50-16B-Stroke MY63-16B-Stroke 1 Dust seal band !
MY3A16-16A-st MY3A20-16A-st MY3A25-16A-st MY3A32-16A-st MY3A40-16A-st MY3A50-16A-st MY3A63-16A-st MY3B16-16A-st MY3B20-16A-st MY3B25-16A-st MY3B32-16A-st MY3B40-16A-st MY3B50-16A-st MY3B63-16A-st st + 206 st + 225 st + 246 st + 289 st + 336 st + 370 st + 416 st + 218 st + 245 st + 274 st + 321 st + 372 st + 406 st + 452 MY3A MY3B (Note 1) Refer to Dust Seal Band Replacement Procedure for
For details, refer to page 126. 34 MXQA Series Dimensions: MXQ 16A [Standard] MXQ 16A-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.
Special resin Stainless steel 15 1 MY40-16A-Stroke MY50-16A-Stroke MY25-16A-Stroke MY63-16A-Stroke Seal belt MY20-16A-Stroke MY32-16A-Stroke MY16-16A-Stroke Note) 1 MY40-16B-Stroke MY50-16B-Stroke MY25-16B-Stroke MY63-16B-Stroke Dust seal band MY20-16B-Stroke MY32-16B-Stroke MY16-16B-Stroke 16 27 31 32 33 34 48 Scraper Piston seal Cushion seal Tube gasket O-ring O-ring NBR NBR NBR NBR NBR
Port size M5 x 0.8 SY3000 SY3000-39-2A(-Q) SY5000 SY5000-39-16A(-Q) SY7000 SY7000-39-16A(-Q) Series Assembly part no.
SUP passage blocked (VVQ0-16A-5-P) EXH passage blocked (VVQ0-16A-5-R) SUP/EXH passage blocked (VVQ0-16A-5-PR) Name plate [-N] VVQ0-N5-Station (1 to Max. stations) When ordering assemblies incorporated with a manifold, add suffix N to the manifold no. It is a transparent resin plate for placing a label that indicates solenoid valve function, etc.
Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages
Standard (Valve mounting screw without drop prevention) Drop prevention type valve mounting screw SY3000 Internal pilot SY30V-16A SY30V-16A-1 External pilot SY30V-16AR SY30V-16AR-1 SY5000 Internal pilot SY50V-16A SY50V-16A-1 External pilot SY50V-16AR SY50V-16AR-1 SY7000 Internal pilot SY70V-16A SY70V-16A-1 External pilot SY70V-16AR SY70V-16AR-1 The part number is not indicated on the product
MY1B32 MY40-16A-Stroke MY1B40 MY1B25 MY32-16A-Stroke MY1B16 MY1B20 MY25-16A-Stroke MY16-16A-Stroke MY20-16A-Stroke 14 Seal belt 1 MY40-16B-Stroke MY32-16B-Stroke MY25-16B-Stroke MY16-16B-Stroke MY20-16B-Stroke 15 Dust seal band 1 MYB40-15BA5902B MYB32-15BA5901B MYB25-15BA5900B MYB20-15CA7164B 27 Side scraper 2 KA00320 KA00320 KA00311 KA00309 KA00309 34 O-ring 2 (7.15 x 3.75 x 1.7) (7.15
(Refer to pages 482 to 485.) 26.4 48.7 5(R1) 3(R2) 3/8 SUP port 54.5 P1 Po 1(P) 25 13.5 Circuit diagram Po Plug-in type Plug lead type SUP/EXH block plate VVQ4000-16A (1 pc.
MY1B32 MY40-16A-Stroke MY1B40 MY1B25 MY32-16A-Stroke MY1B16 MY1B20 MY25-16A-Stroke MY16-16A-Stroke MY20-16A-Stroke 14 Seal belt 1 MY40-16B-Stroke MY32-16B-Stroke MY25-16B-Stroke MY16-16B-Stroke MY20-16B-Stroke 15 Dust seal band 1 MYB40-15BA5902B MYB32-15BA5901B MYB25-15BA5900B MYB20-15CA7164B 27 Side scraper 2 KA00320 KA00320 KA00311 KA00309 KA00309 34 O-ring 2 (7.15 x 3.75 x 1.7) (7.15
[mm] Model D1 D2 L Weight [g] 8 KQ2C-08A 12.8 9.2 2.6 0.1 10 KQ2C-10A 15.2 11.2 2.7 0.1 12 KQ2C-12A 17.6 13.2 2.7 0.1 16 KQ2C-16A 22.4 17.2 3.2 0.2 Applicable tubing O.D.
Port size M5 x 0.8 10-SY3000 SY3000-39-2A(-Q) 10-SY5000 SY5000-39-16A(-Q) 10-SY7000 SY7000-39-16A(-Q) Series Assembly part no.