Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  

Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  

Series XLA-2 are high vacuum angle valves for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLA-2 valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  

Compact Cylinder

Note 1) 16 and 25 are the new models so that they are not applicable.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

, 20 25 to 63 16, 20 6, 10, 12, 16 8 to 40 6, 10 12 to 20 25 32 to 100 25 to 63 10 to 20 25 to 40 50, 63 16, 20 25 to 63 16, 25, 40 16 to 63 6 to 20 25 to 63 6 to 40 10 to 32 10, 15, 25 15, 32 6 to 20 6 to 16 6 to 25 6 to 25 8 to 20 8 to 25 4, 6, 8 6 to 16 32 to 63 32 to 63 25 to 32 10 to 20 Bore size D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A

Smooth Cylinder/Low Speed Cylinder

(n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) With 2 pcs. (Different surfaces, Same surface), With 1 pc. 15 105 110 115 D-M9 D-M9W 15 + 40(n 2) 2 105 + 40(n 4) 2 110 + 40(n 4) 2 115 + 40(n 4) 2 With n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) With 2 pcs.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

, 20, 25 MHS3-16, 20, 25 MHSJ3-16, 20, 25, 32, 40, 50, 63, 80 MHSH3-16, 20, 25, 32, 40, 50, 63, 80 MHSH3-A32, 40, 50, 63, 80 MHSL3-16, 20, 25 MHS4-16, 20, 25 (1) To set the auto switch, insert the auto switch into the installation groove of the cylinder as shown below and set it roughly. (2) Insert the auto switch into the auto switch bracket installation groove. (3) After confirming the

Air Cylinder Series MB

47 51 58 58 72 72 46 52 65 75 95 114 33.5 38.5 45 50 62 71.5 32.5 38 46.5 56.5 72 89 45 52.5 59 64 76.5 86 12 16 20 20 25 30 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 9 12 13 13 16 16 6 6 7 7 10 10 30 35 40 45 45 55 15 21 21 21 30 30 13 13 14 14 20 20 16 16 16 16 16 16 13 14 15.5 16.5 19 19 4 4 5 5 5 5 21 27 27.5 28.5 37 37 -W Stroke range (mm) Bore size (mm) MO N NB P RF S MM

Air Cylinder

Hs 16 D-M9lV D-M9lWV D-M9lAV 22 B A A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch. Hs D-C7/C8/C73C/C80C 16 Hs A 20 (22) B 16 ( ): Values for D-M9lAV A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch.

Rotary Clamp Cylinders

Indicator light Auto switch model Perpendicular In-line DC AC Load voltage Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) None (N) Applicable load Type Special function Electrical entry Wiring (Output) Pre-wired connector 1 (M) 20 to 63 12, 16 20 to 63 12, 16 M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA F79F P4DW M9NV M9PV M9BV 5 V, 12 V 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 2-wire 12 V

5

, 8, 12, 16) Note 2) 115 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 1 90 95 110 115 120 2 (Different surfaces, same surface) 100 105 120 125 130 n (Same surface) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 125 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 130 +

Air Cylinder Series CA2

= 4, 8, 12, 16) (n = 4, 8, 12, 16) 95 2 (Different surfaces and same surface) 1 20 100 105 110 D-Y7BAL n 100 + 45 (n 4) 2 (n = 4, 8, 12, 16) 110 + 45 (n 4) 2 (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 20 + 45 (n 2) 2 95 + 45 (n 4) 2 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 (Different surfaces and same surface) 1 120 15 130 140 D-P4DWL 140 + 65 (n 4) 2 (n = 4, 8, 12, 16) (n = 2,

Compact Cylinder Series CQS

11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16 5.5 6 10 11 9.5 9 14 16 -X Individual -X Note 1) The product is shipped out of the factory in installation state a).

Compact Cylinder

16 30 35 40 45 45 55 22 26 32.5 38 46.5 56.5 72 89 22 22 24.5 26 31 31 38.5 45 7 7 7 10 10 10 12 14.5 6.6 6.6 7 9 9 9 12 14 27 29 33.5 38 45 50 63 74 4 4 4 4 5 5 6 6 2.8 2.8 5 5 6 6 8 8 22 26 32 36 45 50 63 75 36 40 46 52 64 74 96 116 8 8 10 10 12 12 16 16 22 26 32.5 38 46.5 56.5 72 89 8 10 15 17.5 20 22.5 38 38 50 55 70 80 100 120 16 16 16 18 21 21 26 27 7 7 7 9 9 9 11 13 55 60 64 72

Solid State Auto Switches

Weight (g) D-A53 D-A54 D-A56 D-A64 D-A67 Auto switch model 0.5 m (Nil) 3 m (L) 5 m (Z) 24 48 96 24 48 24 48 Lead wire length Dimensions (mm) 6 14 6 4.5 5 12 22 Indicator light 12 33 D-A64/A67 without indicator light DD4 16 11 16 Most sensitive position 1639 Reed Auto Switch Tie-rod Mounting Style D-A33C/D-A34C/D-A44C Refer to SMC website for the details of the products conforming to the

NCG/CG1

WH Rod End Lock: -R Head End Lock: -H Bore size (mm) Bore size (mm) WH W P WA WB WH W P WA WB 20 M5 x 0.8 16 15(16) 30 M5 x 0.8 16 16 30 23 23 20 25 M5 x 0.8 16 15(16) 30 30 M5 x 0.8 16 16 25 25 25 32 Rc 1/8 16 15(16) 25 Rc 1/8 16 16 25 28.5 28.5 32 40 20 Rc 1/8 16 15(16) Rc 1/8 16 16 20 33 33 40 50 20 Rc 1/4 18 17(18) 40.5 Rc 1/4 18 18 20 40.5 50 63 47.5 20 Rc 1/4 18 17(18) Rc 1/4 18 18

Electric Actuator

(Refer to page 16.)

155

-400 KN-16-600 KN-20-400 KN-20-600 10 10 12 12 16 16 20 20 4 6 4 6 4 6 4 6 17 17 17 17 17 17 17 17 29.5 27.7 41.3 31.2 40.1 38.4 45.6 43.9 17 17 19 19 24 24 27 27 14 14 17 17 22 22 26 26 D H2 H1 L2 L1 Nozzle with Male Thread / KN (mm) Model Nozzle diameter D Connection size L1 A With across flats H1 Connection thread KN-R02-600 KN-R03-400 KN-R03-600 KN-R04-400 KN-R04-600 KN-R06-600 KN-R06

Compact Cylinder

Y-G02 Y-MU03 A1 8.5 12 L1 25 31 E1 18 L1 25 31 MM M8 x 1.25 M12 x 1.25 NDH10 8 10 MM M8 x 1.25 M12 x 1.25 E1 16 18 A1 8.5 12 Size 20, 25 32, 40 Size 20, 25 32, 40 +0.058 0 +0.058 0 NL 9 10 R1 10.3 4 NZ 16 22 NX 8 11 NO 20.5 24 U1 11.5 14 R1 10.3 10 NX 8 11 NO 20.5 24 U1 11.5 14 NDH10 NL 9 10 Part no. I-G02 I-MU03 Part no.

24

16 20 16 16 12 12 1 1 12 12 MGJ JMGP 0.1 10 30 50 51 100 300 200 0.1 10 30 50 51 100 300 200 MGP MGP Stroke [mm] Stroke [mm] MGPW MGQ (15) L = 50 mm, V = 400 mm/s (16) L = 100 mm, V = 400 mm/s 50 50 MGG 100 100 100 100 80 80 MGC 80 80 63 63 MGF 50, 63 50, 63 50 50 MGZ 10 10 40 40 40 40 MGT 5 5 32 32 Load mass m [kg] Load mass m [kg] 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12