Rotary Actuator [mm] Note 1) Port size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA BB BC CA CB Note 2) Key dimensions S SB SC SD SE S b L1 Size D50 Rc1/8 62 48 46 15 25 2.5 36 M8 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 8.5 6 9.5 7.5 5 0 0.030 25 63 Rc1/8 76 60 57 17 30 2.5 41 M10 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 10 7 11 8
Hs (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Hs Ht Bore size 40 56 54 16 44 77 10 47 14 65 M12 x 1.5 86 122.5 5 39 27.5 124 238 45 28 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 49 28 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 54.5 28 Unclamp side lock (F) 3-Rc 1/4 Unclamp side port 3-Rc 1/4 Clamp side port 52 N L + Stroke Rear
Hs (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Hs Ht Bore size 40 56 54 16 44 77 10 47 14 65 M12 x 1.5 86 122.5 5 39 27.5 124 238 45 28 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 49 28 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 54.5 28 Unclamp side lock (F) 3-Rc 1/4 Unclamp side port 3-Rc 1/4 Clamp side port 52 N L + Stroke Rear
) (Slide bearing type) Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) St: Stroke (mm) St: Stroke (mm) St: Stroke (mm) Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGCM 40-R Stroke (Slide bearing type) St: Stroke (mm) Allowable end load F (N) MGCM 50-R Stroke (Slide bearing type) Deflection Y (mm) St: Stroke (mm) Allowable end load F (
6 to 12 Applications B B 8 x 18 8 x 18 F F S S Conduit terminal: T (V) (U) E 25 32 G1/2 R T B 8 x 18 F S (mm) Electrical entry Grommet Model Applicable flange Conduit DIN terminal Conduit terminal U 103.5 106 106 B C D A E F H N Q R S N.C.
03 Rc 1 4 Rc 3 8 T F SJ Option Mountable only for VFS3120.
A B C D E F H I G Model VHS20 VHS30 VHS40 VHS40-06 VHS50 59 78 107 110 134 20 29 39 42 53 40 53 70 75 90 34 46 63 67 78 22 21 26 45 55 58 65 76 28 30 36 44 54 45 55 63 69 81 33 42 44 50 61 How to Order 30 03 RZ F VHS Residual pressure relief 3 port valve Caution 1. Pleae consult with SMC when a pressure switch and T type spacer are installed on the outlet of pressure release valve. 2.
Stroke (mm) 200st 1 300st 1 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 60 10 20 30 40 50 20 40 60 80 100 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGL 40Stroke 4 (Ball bushing type) 800st Deflection Y (mm) 3 700st 600st 2 500st 400st 1 300st st: Stroke (mm) 200st 100st 0 0 20 40 60 80 100 120 Allowable end load F (N) MGGL 50Stroke
M5 x 0.8 F NN MM GA GB BA CB D LH LB LY With head cover port in axial position (R) LT BB NB A NA X Y LX LZ S + Stroke Z + Stroke H 2-LC Mounting hole (mm) Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8
plate assembly u F kit L kit T kit S kit P (J) kit q !
2 to 16 (symbol 20) 33 14 33 14 40 5 to 40 (symbol 40) 33 14 33 14 45 -64No.PF-OMW0004-B Remote sensor type (return type): PF3WR (mm) A B Flow range a (L/min) Open Close Open Close 0.5 to 4 (symbol 04) 33 14 33 14 40 2 to 16 (symbol 20) 33 14 33 14 40 5 to 40 (symbol 40) 33 14 33 14 45 -65No.PF-OMW0004-B Side view Integrated display type (Basic type): PF3WB Flow range: 0.5 to 4 L/min (symbol
an accessory for the thread symbol F.
C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR E D C GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11
I/F DICOM CN3-5 DC24V(DC24V10% 150mA) DC24V CN3-10 DC24V I/F DOCOM CN3-3 EM1LG DC24V DC24V LG CN3-1 MO1MO2 CN3-11 SD 3 22 3 3.6 OFFON CPU () ON ON OFF OFF ON ON OFF OFF ON ON ON () OFF () OFF 1s ON ON () OFF 50ms 60ms () OFF 50ms 60ms .
-D ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.
C C1 L L1 L2 L3 L Individual wiring V V V V F D-sub connector V V P Flat ribbon cable connector V V 8 (Common PV) 6 (Common PS) P Vacuum pump system PN 5/16"(Common PV) 1/4" (Common PS) 10 10 stations 1 Common wiring F/P is available only for solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.
0 Units selection function 30 F 1 Setting of OUT1 31 F 2 Setting of OUT2 34 F 3 Digital filter setting 36 F 4 Auto-preset function 37 F 5 FUNC terminal setting 39 F 6 Fine adjustment of display value 40 F10 Sub display setting 41 F11 Display resolution setting 47 F14 Zero cut-off setting 48 F80 Power saving mode 49 F81 Security code 50 F90 Setting of all functions 52 F96 Number of pressurizing
preparation equipment GA GC Piping port 4M5 x 0.8 GA MM NN GC NN Cover side MM NDh8 D D FY FB A 2-FC Mounting hole FT FX A NA F F NA FZ H S + Stroke H + Stroke Z + 2 x Stroke (mm) 16 10 15 15 5 4 8 8 5.5 5.5 2.3 2.3 33 33 20 20 5 5 FB FY Bore size D FC FZ GA FX FT F A 12-0.027 10-0.022 H NA NDh8 Z S NN 11 11 17.5 19 66 65 M12 x 1.0 M10 x 1.0 MM 42 42 GC 0 122 121 20.5 20.5 M5 x 0.8 M4 x
Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. Warning Caution How to Use Plug Connectors Manual Override Operation 1. Attaching and detaching connectors Since connected equipment will operate when manual override is performed, firtst confirm that conditions are safe.