XLF Series

Step 6 3 Bolt b 1 Tightening torque of bolt b Nm Valve size Tightening torque Tightening torque of bolt a Nm Tightening torque of bolt a Nm 2 4 Valve size Tightening torque Valve size Tightening torque All sizes 0.3 All sizes 0.3 XLF-16 0.7 -25 1.5 -40 2.5 -50 6 Bonnet assembly -63 6 -80 15 -100 20 Bolt a Heater Pilot port -160 102 Cover Body Apply 0.4MPa of air pressure to the pilot port

High Vacuum L Type Valve

Step 8 3 Bolt b Tightening torque of bolt b Nm Tightening torque of bolt a Nm 1 2 Valve Tightening Valve Tightening 4 Size Torque Size Torque XLD-25 1.5 All size 0.3 -40 2.5 -50 6 -63 6 Bonnet assembly -80 15 -100 20 Heater -160 102 Pilot port M Bolt a Cover Body Apply 0.2MPa of air pressure to the pilot port M (for main pumping).

XSA Series

G Face seal fitting / compression fitting Terminal part Flat terminal connector 250 Series Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Fast on: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-2S 22 55 24 63 30 8.5 20 3 8 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5 52.5 99.5 47.5 68.5 -2V 50 1/4 XSA2-2S 63 31.5 73.5 63 32.5 49.5 50 57 25.5 63 67 55 55 102

ML2B

G 2-PA (Hexagon socket head taper plug) I F B + Stroke 2-PA (Port for operating cylinder) J J J J D D 2-PB 2-PB 2-MB, Depth LB II II (Hexagon socket head taper plug) (Hexagon socket head taper plug) J J 28 32 36 G 30 37 45 J 40 46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69 84 102

Transfer

(Hexagon socket head taper plug) F I B + Stroke 2 x PA (Port for operating cylinder) J J J J D D II 2 x MB, Depth LB II 2 x PB (Hexagon socket head taper plug) 2 x PB (Hexagon socket head taper plug) JJ 28 32 36 A 110 140 170 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 G 30 37 45 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 L 45.5 54 64 M 30.9 32.4 41.5 N 16 15 19 O 69 84 102

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA Mounting base side B D +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2-M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6-M3 x 0.5 depth 4 2-M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-10 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 11-/22-MXP10-20 102

C95

GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2 123.5 157 177 45.5 52.5 58.5 68 81 96 13 13 14 14 20 20 7.5 10 11.5 17.5 22 25 22 24 32 32 40 40 30 35 40 45 45 55 G1/8 G1/8 G1/4 G1/4 G1/4 G1/4 83 91 104.5 119.5 150 170 32 40 50 63 80 100 12 12 15 12 18 20 27 27 31.5 31.5 38 38 54 63 75 90 102

CLK1

+ Stroke 55 6 Hole: 10H8 26 41.2 169 + Stroke Unclamp side lock (F) 3-Rc 1/8 Unclamp side port 3-Rc 1/8 Clamp side port 25 60 34 + Stroke 20 Rear cushion valve 12 4 53 12 6 5 47 45 45 19 9.5 M10 x 1.25 12 40 26 26 10 Width across flats 10 R12 Width across flats 36 Shaft: 10d9 0.040 0.076 +0.022 0 Hole: 10H8 12 +0.5 +0.2 169 + Stroke 102 + Stroke 55 6 12 26 41.2 49 Note) Refer to pages 13

Series CQ2

(D) Q2B20075DC M18 x 215 l M18 x 225 l 215 225 C (D) Q2B180-100DC C (D) Q2B200-100DC 3 Series CQ2 Compact Cylinder Double Acting: Single Rod Dimensions (mm) Dimensions are the same with and without auto switches. 1in = 25.4mm 180 2 x 4-31.5 depth of counter bore 26 29 29 2-Rc 1/2 (port size) 40 52 52 4-19 through 162 204 4.5 3 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 102

Table of Contents

The center of the stroke is aligned with the center of the clean bench. 250 730 300 620 102 103 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order Specifications Series LJ1 Dust Seal Specification (-X70) The dust seal (dust cover) prevents the entry of

LJ1H

The center of the stroke is aligned with the center of the clean bench. 250 730 300 620 102 103 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order Specifications Series LJ1 Dust Seal Specification (-X70) The dust seal (dust cover) prevents the entry of

AS-FPQ/AS-FPG

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard

High Purity Fluoropolymer

Model E M H W L 1/8 LQ1U11 LQ1U12 LQ1U21 LQ1U22 LQ1U31 LQ1U32 LQ1U33 LQ1U41 LQ1U42 LQ1U51 LQ1U52 LQ1U61 LQ1U62 4 3 6 4 10 8 6 12 10 19 12 25 19 10 11.5 29 10 Class 1 14 41 14 15 16.5 H W M 17 17 20 54 23 1/4 28 21 21 24 63 (E) (E) Class 2 to 5 77 26 26 29 39 L 102 39.5 36 49 36 M Inch sizes H Applicable tubing O.D.

SYJ300/500/700

Station n L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 4-4-13 14 Series SYJ300 Type 41 Manifold: Side Ported/SS3YJ3-41Stations -M3 [ ] for AC Grommet (G) Type 41 Manifold: Side Ported (Pilot valve is on

3 Port Solenoid Valve Metal Seal Series VZ200 1

suppressor With light/surge voltage suppressor 19.5 14.5 n-M5 x 0.8 2-4.3 8.5 mounting hole 21.6 17 P E PE 9.5 9.5 43 Max. 10 78 4-Rc 1/8 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5x0.8 2-M5 x 0.8 (Pilot EXH) 300 (Lead wire length) 300 (Lead wire length) 76 68.5 2-M5 x 0.8 (Pilot EXH) Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 22 2 43 54 3 59 70 4 75 86 5 91 102 6 107 118 7 123 134

SV

/N.O. 78 4 position dual 3 port (A) 4 (B) 2 99 Single solenoid SV3000 SOL.b SOL.a 102 Double solenoid 5 (EA) 3 (EB) 110 3 position 1 (P) 186 Single solenoid SV4000 190 Double solenoid 211 3 position Note) Weight of solenoid valve only. 1-2-15 13 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

VFS

port) (A, B port) G 1/2 electrical entry Rc 1/8 external pilot port (VFS6100R) 5-Rc , 1 3 4 2-Rc 1/8 pilot EXH port 2 position double: VFS6200-F Pilot valve manual override 4-9 mounting hole Light window (FZ) Solenoid valve mounting bolt (Hexagon socket head cap screw) 4-M8 x 80 with SW G 1/2 electrical entry 5-Rc , 1 3 4 Rc 1/8 external pilot port (VFS6200R) 2-Rc 1/8 pilot EXH port 3-8-102

Proposals for Energy Saving

flow rate ( ) Unit setting : l/min ( ) Switch specification: Real-time switch output ( ) Output mode: Inverted output ( ) Flow rate setting value: Real-time flow rate Full range median value Accumulated flow 0 Key lock mode: Unlocked ( ) Flow rate conversion conditions: 20, 101.3kPa, 65% RH (ANR) ( ) When the MODE button is pressed, the setting changes to without initializing the setting. 102

F

) Applicable tube* Nylon, Soft nylon, Polyurethane *Dimensions to BS5409 Part 1 D I M E N S I O N S KM11 Dimensions in mm Port B min Port Size Model (Metric Size) FA FB N L1 L2 L3 L4 L5 L6 P Q1 Q2 MA MB Mass (g) KM11-04-08-6 6 65 40 22 4 8 10 18 29.5 19.5 27 10.6 12 16 18.5 6 KM11-04-08-10 10 86 61.5 30 KM11-06-10-6 6 76 47 32 6 10 10 19.5 31.5 21.5 31 13 13.5 17 21 7.5 KM11-06-10-10 10 102

194 mm, Width: 4 in / 102 mm, Height: 6.14 in / 156 mm, Net Weight: 5.1 lbs. / 2.3 Kg Series Configured Datasheet.