AC Servo Motor Driver (CC-Link Type ）

A L 3 7 # 0 0 P B 1 0 P B 1 1 P B 1 2 P B 1 6 S p d 0 0 1 Point table error details For the point table No.1 speed data error Point table No. with error Error item Spd: speed Acc: acceleration time constant Dec: deceleration time constant 15 113 16. SERVO MOTOR 16.

AIR COMBINATION

Model AC10*-A AC20*-B AC25*-B AC30*-B AC40*-B AC40*-06-B AC50*-B AC55*-B AC60*-B Port size M50.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 Gauge port size Note 1) 1/16 1/8 Fluid Air Ambient and fluid -5 to 60 (Should be no freezing) temperature Note 2) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Set pressure range 0.05 to 0.7 MPa 0.05 to 0.85 MPa Filtration / Air filter 5

Air Cylinder

8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

MR-J3-B LECSS (2 axis) (Note 7) SW1 CN1A (Note 8) SW2 CN1B 2 1 LE-CSS-S MR-J3-B (Note 7) LECSS (3 axis) (Note 6 ) SSCNET cable (option) SW1 CN1A SW2 (Note 8) CN1B 2 1 MR-J3-B (Note 7) LECSS (n axis) SW1 CN1A (Note 9) Cap SW2 (Note 8) CN1B 2 1 3 6 3.

CNA

B With rod boot on both sides S + Stroke H + Stroke H ZZ + 2 l + 2 strokes ZZ + 2 strokes Bore size (mm) Stroke range (mm) 40 50 63 80 100 AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA A 30 35 35 40 40 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20

CNA

7 %0 Clip B O-ring Stainless steel NBR !8 %1 Steel ball A Carbon steel !9 Steel ball B Carbon steel @0 Replacement Parts: Seal Kit Tooth ring Stainless steel @1 Bore size (mm) Kit no.

90

Refer to Fig.1 ) 3) Remove the junction box B (top) for all stations using a precision screwdriver. (Refer to Fig.2 ) (Remove the junction box B from D side.) 4) Remove all connectors mounted to the junction box B.

5 Port Air Operated Valve Series VFA3000 1

1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.

Tie-rod Type Hydraulic Cylinder

B5/B64/B59W Note 1) BD1-10M CHS BA-08 BA-10 BA-05 BA-04 CH2 Note 1) The auto switches listed below cannot be mounted on 63.

IDG

Applicable model 25 25 25 1l/min (ANR) {In case of Inlet air pressure 0.7 MPa} Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) BM59 IDG3, 5 BM61 IDG10 Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) BM63 IDG20 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 BM64 IDG30/50 0.11 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (

ISO Standard Hydraulic Cylinder

4.5 7 6 8 10 14.5 A 15.5 24 24 26 29 32.5 B 9.5 12 11 13 15 19.5 A 16 16 18 21 24.5 B 4 3 5 7 11.5 A 12.5 12.5 14.5 17.5 21 B 0.5 0 1.5 3.5 8 A 16.5 16.5 18.5 21.5 25 B 4.5 3.5 5.5 7.5 12 32 40 50 63 80 100 32 40 50 63 80 100 Note 1) D-M9, M9V, M9W, M9WV, M9A, M9AV cannot be mounted to 100.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

CNA

1 o q $8 y $1 r #5 $6 #2 #7 #3 #4 B A CL MLGC CNA CB #1 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !9 @2 @6 $2 @3 !4 %0 !3 #9 CV/MVG A section (Release piston bushing) B section (Piston guide bushing) CXW 100 80 63 50 40 50, 63, 80, 100 CXS @9 CXT !2 !2 MX Description Material Note Component Parts Description Material Note Component Parts MXU No. No.

Modular Type Air Filter Series AF

F 30 41 50 50 G 27 40 54 54 H 22 23 26 25 E 18 16 17 14 C 10 14 18 20 D 40 53 70 70 P 57 73 73 B 97 129 165 169 A 40 53 70 75 AFD20 AFD30 AFD40 AFD40-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification Model With drain guide With barb fitting Metal bowl Metal bowl with level gauge B B 97 142 178 182 B B AFD20 AFD30 AFD40 AFD40-06 162 198 202 137 173 177 136 172 176 34

ARJ1020F

Description ARJM10-4, -6, -10 Manifold base ARJ1020F-M5-06 ARJ1020F-M5-04 How to Order M5 ARJ 20 10 F 04 1 Option 1 0.2 MPa setting Miniature regulator Note 1) Compared with standard specifications, its adjusting spring has only been changed. It is not the product which does not allow the pressure more than 0.2 MPa. Adjusting spring is not replaceable.

5 Port Solenoid Valve SY Series

SGP10A x 1 m AS420-03 AN200-02 Series CS1 SGP10A x 1 m AS420-03 AN300-03 SY9120-03 Tubing bore x Length Speed controller Silencer SY7140-03 Tubing bore x Length Speed controller Silencer SY9140-04 Tubing bore x Length Speed controller Silencer SGP15A x 1 m AS420-04 AN400-04 Features 1 Valve Variations Note 1) Electrical entry Actuation Voltage Light/surge voltage suppressor 2 position 3

Series IDG

Applicable models 0.7MPa (101.5psi) Inlet air pressure IDG3, 5 BM59 25C (77F) 25C (77F) 25C (77F) Inlet air temperature Inlet air saturation temperature Ambient temperature IDG10 BM61 1l/min (ANR) {inlet air pressure at 0.7MPa} IDG20 BM63 Dew point indicator purge air flow rate Port size (nominal size B) Weight kg (with bracket) 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 IDG30, 50 BM64 0.11 0.25

Suction Filter with Case FH99 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model/Rated Flow Rate Model Port size Note 2) INLET OUTLET Rated flow rate (L/min) FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1B 1/2B 20 1B 3/4B 50 1 1/2B 1B 100 1 1/2B 1 1/4B 150 2B 1 1/2B 200 2B 2B 300 2 1/2B 2 1/2B 450 3B 3B 600 3 1/2B 3 1/2B 750 4B 4B 900 Note 2) Both flange

VS7-6

Port size P, A, B R1, R2 Piping Model Side Side Bottom Bottom 1 4 3 8 VS7-1-A02 VS7-1-A03 VS7-1-B02 VS7-1-B03 3 8 1 4 3 8 3 8 1.19-8 Series VS7-6 Manifold Manifold: Series VV71 Standard Specifications SV ISO size q Series ISO size q 1 to 10 Manifold block size Applicable solenoid valve Number of stations SY 1 4 3 8 One-touch fitting: 12 1 4 3 8 A, B-port P, R1, R2-port One-touch fitting:

-fl Seies

Stations t Bottom porling spscmcabn wilh 'r02T is 1," qA,B boitom and 1/4'A,B side.