ARM10/11

C U U O O S S L L H H 8 3 11.5 5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

C85

2 !3 !4 !5 !6 !

C85

2 !3 !4 !5 !6 !

VQ4000

(A) 4 (B) 2 (A) 4 (B) 2 VQZ 3 1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2)

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Vacuum Module Series ZX

Work adsorption 2. Vacuum release 3. Operation stop Supply valve Solenoid valve ON OFF OFF Solenoid valve Release valve Valve Condition 1. Work adsorption 2. Vacuum release 3.

REA/REB

3 !2 y r @4 !4 !5 @9 #2 !8 @8 t u !0 e w #1 #3 !1 @0 i !7 @3 @1 @7 @2 @6 @5 #0 REAL10 Parts list Parts list Note No. Description No.

LJ1H

LJ1H20 How to Order 300 LJ1H20 F R 2 A1 NA S2 Auto switch Nil Without switch 1 2 3 4 5 6 NPN, A contact 1pc.

Modular Type Air Filters Series AF

Model AF20 AF40 AF40-06 AF50 1/8, 1/4 AF30 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AF60 Applicable Model Port size 1 Model AF30 AF40 AF40-06 AF50 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AF60 30 AF X425 2 03 B Port size 1 30 AF 2 03 B X430 For high pressure Semi-standard: Select one each for a to c. Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Sensor Monitor

Press the button for 2 second or longer. Measurement mode (Initial setting is completed) Perform the setting with the 3 step setting mode, simple setting mode and function selection mode. -20No.PS-OMU0012-C 3 Step Setting Mode 3 step setting mode In this mode, the set values can be input in just 3 steps.

PFxx-OMA1007

Silencer Compact resin type Metal body type High noise reduction type Part Part number number AN20-02 AN30-03 AN40-04 AN500-06 AN600-10 AN202-02 AN302-03 AN402-04 ANA1-06 ANA1-10 Piping size 1/4 3/8 1/2 3/4 1 1/4 3/8 1/2 3/4 1 AMA20#-##C-#-#L# NC AMA20#-##D-#-#L# NO AMA30#-##C-#-#L# NC AMA30#-##D-#-#L# NO AMA40#-##C-#-#L# NC AMA40#-##D-#-#L# NO AMA60#-##C-#-#L# NC AMA60#-##D-#-#L# NO -147No.PF-OMA1007

SYJ3000/5000/7000

(B) 2 (A) 4 (B) 2 (A) 4 Effective area (mm2) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) (B) 2 (A) 4 JIS Symbol 1 3 position pressure center 3 position pressure center (B) 2 (A) 4 (B) 2 (A) 4 3 (R) 1 (P) (Single) 0 (Fully open) (Fully closed) 1 2 3 4 5 6 7 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) How to order valve with built-in speed controller SYJ5 5 When using SYJ553 model the speed controller must be opend

NCA1

2 3/4 1/2 1/2 2 3/8 3/8 2 3/4 1/2 1/2 2 1/2 3/8 3/8 2 1/2 3/4 1/2 1/2 3 3/8 3/8 3 1/4 1 1/4 3/4 5/8 3 3/4 1/2 5/8 4 1 1/4 3/4 5/8 4 1/2 1/2 5/8 5 1 1/4 3/4 5/8 5 1/2 1/2 5/8 6 1 1/2 1 3/4 6 1/2 3/4 3/4 BORE G J K L LR MR 1 1/2 3/8 2 11/4 3/4 3/4 5/8 2 2 1 5/16 3/4 3/4 5/8 2 1/2 2 1 1/8 5/16 3/4 3/4 5/8 3 1/4 2 1/4 1 1/4 3/8 1 1/4 1 1/4 7/8 4 2 1/4 1 1/4 3/8 1 1/4 1 1/4 7/8 5 2 1/4 1 1/2 7

Air Cylinder NCA1 Series

2 3/4 1/2 1/2 2 3/8 3/8 2 3/4 1/2 1/2 2 1/2 3/8 3/8 2 1/2 3/4 1/2 1/2 3 3/8 3/8 3 1/4 1 1/4 3/4 5/8 3 3/4 1/2 5/8 4 1 1/4 3/4 5/8 4 1/2 1/2 5/8 5 1 1/4 3/4 5/8 5 1/2 1/2 5/8 6 1 1/2 1 3/4 6 1/2 3/4 3/4 BORE G J K L LR MR 1 1/2 3/8 2 11/4 3/4 3/4 5/8 2 2 1 5/16 3/4 3/4 5/8 2 1/2 2 1 1/8 5/16 3/4 3/4 5/8 3 1/4 2 1/4 1 1/4 3/8 1 1/4 1 1/4 7/8 4 2 1/4 1 1/4 3/8 1 1/4 1 1/4 7/8 5 2 1/4 1 1/2 7

Modular F.R.L. Unit

AC60B to W Z C D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 91 Series LTF Construction Construction LTF6/LTF8 e t w !0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

ITV

Linearity: 0.5% F.S. or Less 6 Application examples: Polishing equipment and peripheral equipment for wafers, LCD glasses, color filters, etc. 1 0 0 1 2 S ITV X410 3 0 Model Linearity: 0.5% F.S. or less 1 2 3 1000 type 2000 type 3000 type 1 3 5 Pressure range 0.1 MPa 0.5 MPa 0.9 MPa Pressure display unit Nil 2 Note) MPa kgf/cm2 Bracket 3 4 Note) bar psi kPa Power supply voltage Nil B C Without

HRL

usage example Contact output 1: Operation status [Operation ON] 19 This products power supply usage example Contact output 2: FLT [Fault alarm occurrence OFF] 7 24 VDC 1 Contact output 3: WRN [Warning alarm occurrence OFF] Circuit diagram 2 20 14 I n t e r n a l c i r c u i t Contact output 4: OFF 8 3 Contact output 5: OFF 4 15 Users power supply usage example Contact output 1-5 common 5

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

2 RS 20 20 10 MI 10 10 5 4 3 4 5 3 4 5 3 2 2 2 1 1 1 1 5 10 20 10 5 1 20 30 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) Transfer speed (m/min) Lever-type mass of transferred object and transfer speed graphs (graphs (2) and (3)) show the values at room temperature (20 to 25C).

Standard Combinations

1/4, 3/8, 1/2 AF + ARG ACG20B ARG20 AF20 1/8, 1/4 ACG30B ARG30 AF30 1/4, 3/8 ACG40B ARG40 AF40 1/4, 3/8, 1/2 AF + AFM + ARG ACG20C ARG20 AF20 AFM20 1/8, 1/4 ACG30C ARG30 AF30 AFM30 1/4, 3/8 ACG40C ARG40 AF40 AFM40 1/4, 3/8, 1/2 AWG + AFM ACG20D AWG20 AFM20 1/8, 1/4 ACG30D AWG30 AFM30 1/4, 3/8 ACG40D AWG40 AFM40 1/4, 3/8, 1/2 INDEX Air Combination Regulator with Built-in Pressure Gauge