VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

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NPT, G) ,'" r .r "'" ',.. 1-::' : H I-::' r-Q Q , .J w =i" ~ I ~ ~ K F H -NJ ..!L M Stroke S + Stroke ZZ + Stroke (mmJ oS~((lr.;~ r;ilMg9 ' .:a6ra'~~ FT FZ 'AL QIl B E F FD FX FY G J 11 Ii. DC 0 " : '(mm~ .

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If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

CNS

Maximum piston speed: 500 mm/s It can be used at 50 to 500 mm/s provided that it is within the allowable kinetic energy range.

CJ5-S

port in axial location (R) BB H BA S + Stroke 0 0.3 0 0.3 CY Z + Stroke MQQ M RHC Bore size (mm) A BA BB CA CB D F GA GB H MM NN NA NB NDn8 S Z MK(2) 0 0.022 0 0.027 10 15 15 12 17 14 4 8 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 10 46 74 RS Q G 16 15 18.3 18.3 20 20 5 8 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 12 47 75 RS H A R V Axial foot style (L): CJ5LS RZQ CA MI W S Rod cover side GB F NN MM GA

CJ5-S

RS Q G RS H A Relation of Liquid Entry and Sliding Distance Amount of liquid entry (g) x 15 RZQ 10 Standard cylinder MI W S Stainless steel cylinder 5 CEP1 0 50 100 150 200 Sliding distance (km) 250 300 CE1 Conditions Working fluid Air Pressure 0.5 MPa Liquid Water-soluble coolant Piston speed 200 mm/sec (60 cpm) CE2 ML2B Special scraper C J G5-S Exterior configuration reduces residual

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

DeviceNet EX140-SDN1 OMRON Corp.: CompoBus/S (16 outputs) EX140-SCS1 OMRON Corp.: CompoBus/S (8 outputs) EX140-SCS2 CC-Link EX140-SMJ1 How to Order Valve Manifold Assembly Ordering example (CompoBus/S compatible SI unit) Double solenoid (24 VDC) 10-SZ3260-5LOZ-C6(-Q) (3 sets) 10-SS5Z3-60SR1D-05U (-Q) 1 set (Manifold part no.)

MXH Series Compact Slide

Q Q Q Q Q Q Q Q Q Q Q Q Q Q MXH Series 6, 10, 16, 20 The use of a recirculating linear guide produces a slide table with excellent rigidity, linearity and non-rotating accuracy.

Prevents Micro-Bubbles

S) C 2-Q Breathing port: R H G SMC SMC SMC SMC N V 1/4 1/4 1/4 U 3/8 E Pitch = B Dimensions (mm) Station n-A port 2 3 4 5 Model Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 LLC2A 75 106 137 168 146 177 208 239 73 109.5 146 182.5 LLC3A 84 120.5 157 193.5 183 219.5 256 292.5 (mm) Dimensions 94 141 188 235 A B Q C D E G H K N R S U V W Y LLC4A Model LLC2A LLC3A LLC4A LLC5A 109 156

Fieldbus System

w e q w e No.

Series AP3500

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

RZQ

x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

Title not found

to the control panel,s protective earth (PE).

Cylinder with Lock Series CNS

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Individual -X 763 Series CNS Dimensions Basic style (B): CNSB 2 x MA Thread effective depth R Rc BQ plug with breathing hole BC element CL M GA T G G FA GB BP (Rc, NPT, G) Unlocking port 2 x P (Rc, NPT, G) Cylinder port GL GR Width across flats KA MM Q D EA E C B V C B AL A K F VA BN N N 4 x J M H S + Stroke ZZ + Stroke With rod boot

Vacuum Ejector Series ZM

-Q) ZM071H-K5LZ (-Q) ZM131M-K5LZ (-Q) ZM071H-K5LZ-E15 (-Q) ZM131M-K5LZ-E15 (-Q) ZM101H-K5LZ (-Q) ZM101H-K5LZ-E15 (-Q) 987 Series ZM Model Nozzle dia.

Hydraulic Filters

S-type block companion flange L-type block female threaded companion flange S-type block female threaded companion flange Differential pressure indication switch d S-type block Differential pressure indication switch Differential pressure indication switch Differential pressure indicator Differential pressure indicator (75) (50) W Differential pressure indicator Y E (Rc) S-type block (75)

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L Speed:V [mm/s] Calculation example) T1 to T4 can be calculated as follows. a1 a2 T = T1 + T2 + T3 + T4 [s] Time [s] T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] P T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Sine Rodless Cylinder Series REA/REB

Series REB introduced with a maximum speed of 600 mm/s.

VQ7-6/7-8

0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !